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A Study on Power Accumulation Method of Surface Acoustic Standing Wave for Precise Joining by using MHz-band ultrasonic Oscillation

Research Project

Project/Area Number 26420057
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTakushoku University

Principal Investigator

Watanabe Yuji  拓殖大学, 工学部, 教授 (30201239)

Research Collaborator NARUSE Kengo  精電舎電子工業(株), 技術部
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2016: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2015: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2014: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Keywords弾性表面波 / 超音波接合 / 超音波金属接合 / 超音波精密加工 / 超音波精密接合 / 高周波強力超音波 / 超音波金属溶接 / 超精密加工 / MHz帯超音波 / 強力超音波 / 圧電応用 / MHz帯超音波
Outline of Final Research Achievements

The aim of this study is applying ultrasonic joining method to “flip chip bonding”. The advantage of usage of a SAW device for the joining method is follows: Damages of joined parts can be avoided and positioning accuracy becomes higher, because displacement amplitude should be small at higher frequencies. On the other hand, it is very difficult to get wider area of joining parts by using conventionally used longitudinal-mode transducer at higher frequencies. However, we can get a wider work area on a SAW device. Here, we tried using PZT substrate, because PZT substrate is very harder than LiNbO3 substrate. However, oscillation amplitude of PZT will be very low. So, we redesigned of the resonator, and we changed patterning process of resonator to photoetching method from vacuum deposition.
In this study, we designed a SAW power accumulator to obtain the sufficient displacement amplitude, and we joined a couple of Au-foil.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (3 results)

All 2016 2014

All Presentation (3 results) (of which Int'l Joint Research: 1 results)

  • [Presentation] Development of MHz band high-power ultrasonic oscillators2016

    • Author(s)
      Hiroki Nakamura, Yuji Watanabe
    • Organizer
      The 13th IEEE Transdisciplinary Oriented Workshop for Emerging Researchers
    • Place of Presentation
      東京農工大学
    • Year and Date
      2016-12-03
    • Related Report
      2016 Annual Research Report
  • [Presentation] A study on power accumulator of surface acoustic wave by using PZT substrate and its application to Au foil joining2016

    • Author(s)
      Hiroki Nakamura, Yuji Watanabe, Kengo Naruse
    • Organizer
      Proc. The 37th Symposium on Ultrasonic Electronics 2P4-6
    • Place of Presentation
      Pukyong National University (Pusan, Korea)
    • Year and Date
      2016-11-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A Study of Surface Acoustic Wave for Ultrasonic Applications2014

    • Author(s)
      Ayesya Azreena Binti Mohd Azhar, Yuji Watanabe
    • Organizer
      MJASC 2014
    • Place of Presentation
      Keio University, Mita Campus
    • Year and Date
      2014-11-08
    • Related Report
      2014 Research-status Report

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Published: 2014-04-04   Modified: 2018-03-22  

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