• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Distortion-compensated multifocusing of ultrashort pulse beams for nano- and micro-processing

Research Project

Project/Area Number 26420059
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Production engineering/Processing studies
Research InstitutionToyo University

Principal Investigator

AMAKO JUN  東洋大学, 理工学部, 教授 (20644628)

Co-Investigator(Kenkyū-buntansha) 中野 秀俊  東洋大学, 理工学部, 教授 (90393793)
Research Collaborator MURAKAKI Takumi  
UEDA Yoshihito  
SATO Shin  
TAKEDA Shu  
KANNO Takayuki  
KOBAYASHI Masaya  
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2016: ¥390,000 (Direct Cost: ¥300,000、Indirect Cost: ¥90,000)
Fiscal Year 2015: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2014: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Keywords超短パルス / ビーム列 / 回折光学 / 光学設計 / 光線行列解析 / ビームアレイ / 色収差補正 / 分散補償 / 回折光学素子 / 自己相関計 / 非線形光学結晶 / 自己相関器 / 第二高調波 / フリンジ分解
Outline of Final Research Achievements

We have developed a cascade optical system for multifocusing of ultrashort pulse beams. The system consists of a diffractive subsystem, a refractive subsystem, and a phase plate located between them. The primary reason for pulse distortions is chromatic aberrations arising from a diffractive beam splitter. Two subsystems optically coupled in cascade correct chromatic aberrations and the phase plate compensates for angular dispersions, while remaining material dispersions are removed by pre-chirping the input pulse. We designed a prototype system for evaluation by applying the aberration correction conditions derived from a ray-matrix analysis. The designed system was evaluated with 20-fs pulses by characterizing the transmitted pulses in terms of spatial and temporal profiles to verify the proposed beam delivery scheme. This optical system, which has the potential to be extended to sub-20 fs, enables thermal-free and high-throughput nano-and micro-processing using ultrashort pulses.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (6 results)

All 2017 2016 2015 2014

All Presentation (5 results) Patent(Industrial Property Rights) (1 results)

  • [Presentation] 20fsパルスビームアレイ生成のためのカスケード光学系の提案2017

    • Author(s)
      尼子 淳、中野 秀俊
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-15
    • Related Report
      2016 Annual Research Report
  • [Presentation] カスケード光学系による20fsレーザーパルス集光特性2017

    • Author(s)
      中野 秀俊、村上 拓、植田 義人、尼子 淳
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-15
    • Related Report
      2016 Annual Research Report
  • [Presentation] 回折光学素子対によるフェムト秒レーザーパルスビーム配列生成ならびに集光特性の評価2016

    • Author(s)
      中野 秀俊 ,尼子 淳
    • Organizer
      電気学会 光・量子デバイス研究会
    • Place of Presentation
      産業技術総合研究所(つくば市)
    • Year and Date
      2016-09-20
    • Related Report
      2016 Annual Research Report
  • [Presentation] 回折光学素子対により集光されたフェムト秒レーザーパルス幅の評価2016

    • Author(s)
      中野 秀俊、佐藤 慎、竹田 州、尼子 淳
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学(大岡山キャンパス)
    • Year and Date
      2016-03-21
    • Related Report
      2015 Research-status Report
  • [Presentation] 回折レンズによるフェムト秒レーザーパルスのパルス幅伸張の評価2015

    • Author(s)
      中野 秀俊、菅野 貴行、小林 誠也、尼子 淳
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-14
    • Related Report
      2015 Research-status Report
  • [Patent(Industrial Property Rights)] レーザー加工方法及びレーザー加工装置2014

    • Inventor(s)
      尼子 淳、中野秀俊
    • Industrial Property Rights Holder
      学校法人東洋大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2014-12-09
    • Related Report
      2014 Research-status Report

URL: 

Published: 2014-04-04   Modified: 2018-03-22  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi