Optimization of an inchworm-type multi-DOF positioning system

• Project/Area Number: 26420212
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: Aichi Institute of Technology
• Principal Investigator: Torii Akihiro 愛知工業大学, 工学部, 教授 (70267889)
• Co-Investigator(Kenkyū-buntansha): 道木 加絵 愛知工業大学, 工学部, 准教授 (00350942)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000); Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2014: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
• Keywords: 位置決め装置 / 圧電素子 / インチワーム / スクイーズ膜 / マイクロロボット / 位置決め / 浮上 / 圧電アクチュエータ / 多自由度アクチュエータ / 精密位置決め

Outline of Final Research Achievements

An inchworm-type precision positioning device was optimized. It was revealed that the displacement decreased as the load increases. In order to eliminate the influence of friction, a moving mechanism that generated a non-contact state by levitation was developed. In order to improve the positioning performance, a feedback position control system was implemented. The inchworm-type positioning device which was capable of the positioning with 3 DOF (degrees of freedom) position and 3 DOF orientation was realized by adding the function of inchworm to the mechanism of the parallel mechanism using the piezoelectric element.

Research Products

• [Journal Article] Levitation Caused by the Vertical Vibration of a Piezoelectric Actuator (2015)
  • Author(s): 曽根勝利，鳥井昭宏，元谷卓，道木加絵
  • Journal Title: IEEJ Transactions on Electronics, Information and Systems Volume: 135 Issue: 12 Pages: 1481-1485
  • DOI: 10.1541/ieejeiss.135.1481
  • NAID: 130005112619
  • ISSN: 0385-4221, 1348-8155
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] A DC Voltage Estimations at the Maximum Power Point of a PV System with Partial Shade (2015)
  • Author(s): 中田篤史，鳥井昭宏，石川淳，元谷卓，道木加絵，植田明照
  • Journal Title: IEEJ Transactions on Electronics, Information and Systems Volume: 135 Issue: 12 Pages: 1463-1469
  • DOI: 10.1541/ieejeiss.135.1463
  • NAID: 130005112621
  • ISSN: 0385-4221, 1348-8155
  • Peer Reviewed
• [Journal Article] A 3-DOF Inchworm Using Levitation Caused by Vertical Vibration (2014)
  • Author(s): 鳥井昭宏，西尾光広，道木加絵，植田明照
  • Journal Title: IEEJ Transactions on Electronics, Information and Systems Volume: 134 Issue: 11 Pages: 1716-1723
  • DOI: 10.1541/ieejeiss.134.1716
  • NAID: 130004704431
  • ISSN: 0385-4221, 1348-8155
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Rotational Motion and Load Characteristics of a Movable 5-DOF Platform (2014)
  • Author(s): 上谷亮介，鳥井昭宏，道木加絵
  • Journal Title: IEEJ Transactions on Electronics, Information and Systems Volume: 134 Issue: 12 Pages: 1832-1833
  • DOI: 10.1541/ieejeiss.134.1832
  • NAID: 130004704449
  • ISSN: 0385-4221, 1348-8155
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] 積層型圧電素子を用いた浮上機構の入力信号が特性に与える影響 (2017)
  • Author(s): 田中健翔, 満吉悠太,鳥井昭宏, 道木加絵, 元谷卓
  • Organizer: 2017年度精密工学会春季大会学術講演会講演論文集, C16
  • Place of Presentation: 慶応義塾大学矢上キャンパス
  • Year and Date: 2017-03-13
• [Presentation] 圧電素子を用いたマイクロロボットの位置決め精度 (2017)
  • Author(s): 満吉悠太, 田中健翔,鳥井昭宏, 元谷卓, 道木加絵
  • Organizer: 2017年度精密工学会春季大会学術講演会講演論文集, D81
  • Place of Presentation: 慶応義塾大学矢上キャンパス
  • Year and Date: 2017-03-13
• [Presentation] Motion of a 3-DOF Inchworm Using Piezoelectric Actuator and Electromagnet (2016)
  • Author(s): Yuta MITSUYOSHI, Kento TANAKA, Akihiro TORII, Kae DOKI, Suguru MOTOTANI
  • Organizer: 16th International Conference on Precision Engineering, P25-8171
  • Place of Presentation: Hamamatsu Japan,
  • Year and Date: 2016-11-14
  • Int'l Joint Research
• [Presentation] 3自由度マイクロロボットの平面移動特性の改善 (2016)
  • Author(s): 満吉悠太, 田中健翔, 鳥井昭宏, 元谷卓, 道木加絵
  • Organizer: 平成28年度電気・電子・情報関係学会東海支部連合大会講演論文集, I1-3,
  • Place of Presentation: 豊田市豊田工業高等専門学校
  • Year and Date: 2016-09-12
• [Presentation] 積層型圧電素子を用いた浮上機構の入力電圧の影響 (2016)
  • Author(s): 田中健翔, 満吉悠太, 鳥井昭宏, 道木加絵, 元谷卓
  • Organizer: 平成28年度電気・電子・情報関係学会東海支部連合大会講演論文集, I3-7,
  • Place of Presentation: 豊田市豊田工業高等専門学校
  • Year and Date: 2016-09-12
• [Presentation] 圧電素子を用いたマイクロロボットの平面移動特性の改善 (2016)
  • Author(s): 満吉悠太, 田中健翔,鳥井昭宏, 元谷卓, 道木加絵
  • Organizer: 2016年度精密工学会秋季大会学術講演会講演論文集, J62
  • Place of Presentation: 茨城大学水戸キャンパス
  • Year and Date: 2016-09-06
• [Presentation] 積層型圧電素子を用いた浮上機構の機械的特性と電気的特性 (2016)
  • Author(s): 田中健翔, 満吉悠太,鳥井昭宏, 元谷卓, 道木加絵
  • Organizer: 2016年度精密工学会秋季大会学術講演会講演論文集, J63
  • Place of Presentation: 茨城大学水戸キャンパス
  • Year and Date: 2016-09-06
• [Presentation] The characteristics of an inchworm stage using piezoelectric actuators and electromagnets (2016)
  • Author(s): Akihiro Torii, Yuta Mitsuyoshi, Suguru Mototani, Kae Doki
  • Organizer: european society for precision engineering and nanotechnology, 16th International Conference & Exhibition, (
  • Place of Presentation: University of Nottingham, UK
  • Year and Date: 2016-05-30
  • Int'l Joint Research
• [Presentation] 積層型圧電素子を用いた浮上機構の浮上特性 (2016)
  • Author(s): 田中健翔, 鳥井昭宏, 満吉悠太, 道木加絵, 元谷卓
  • Organizer: 第28回「電磁力関連のダイナミクス」シンポジウム講演論文集, 18A3-2,
  • Place of Presentation: 横浜市慶應義塾大学日吉キャンパス
  • Year and Date: 2016-05-18
• [Presentation] 6自由度インチワームの動作特性と変位量 (2016)
  • Author(s): 石橋伸悟，満吉悠太，鳥井昭宏，道木加絵，元谷卓
  • Organizer: 精密工学会春季大会学術講演会
  • Place of Presentation: 東京理科大学（千葉県野田市）
  • Year and Date: 2016-03-15
• [Presentation] 圧電素子を用いた3自由度インチワームの平面移動特性 (2016)
  • Author(s): 満吉悠太，鳥井昭宏，元谷卓，道木加絵
  • Organizer: 精密工学会春季大会学術講演会
  • Place of Presentation: 東京理科大学（千葉県野田市）
  • Year and Date: 2016-03-15
• [Presentation] The motion of a 6-DOF inchworm on rough surface (2015)
  • Author(s): Shingo Ishibashi, Yuta Mitsuyoshi, Akihiro Torii, Kae Doki, Suguru Mototani
  • Organizer: American society for precision engineering
  • Place of Presentation: Hyatt Regency Austin (Austin, TX, USA)
  • Year and Date: 2015-11-01
  • Int'l Joint Research
• [Presentation] Input signal for levitation caused by vertical vibration of a piezoelectric actuator (2015)
  • Author(s): Akihiro Torii, Shori Sone, Kae Doki, Suguru Mototani
  • Organizer: American society for precision engineering
  • Place of Presentation: Hyatt Regency Austin (Austin, TX, USA)
  • Year and Date: 2015-11-01
  • Int'l Joint Research
• [Presentation] 3自由度マイクロロボットの駆動周波数と変位 (2015)
  • Author(s): 満吉悠太，石橋伸悟，鳥井昭宏，道木加絵，元谷卓
  • Organizer: 電気・電子・情報関係学会東海支部連合大会
  • Place of Presentation: 名古屋工業大学（愛知県名古屋市）
  • Year and Date: 2015-09-28
• [Presentation] 6自由度インチワームの動作変位量の関係 (2015)
  • Author(s): 石橋伸悟，満吉悠太，鳥井昭宏，道木加絵，元谷卓
  • Organizer: 電気・電子・情報関係学会東海支部連合大会
  • Place of Presentation: 名古屋工業大学（愛知県名古屋市）
  • Year and Date: 2015-09-28
• [Presentation] マイクロロボットの変位と駆動周波数 (2015)
  • Author(s): 満吉悠太，石橋伸悟，鳥井昭宏，元谷卓，道木加絵
  • Organizer: 精密工学会秋季大会学術講演会
  • Place of Presentation: 東北大学（宮城県仙台市）
  • Year and Date: 2015-09-04
• [Presentation] Levitation caused by vertical vibration of a piezoelectric actuator (2015)
  • Author(s): Akihiro Torii, Shori Sone, Kae Doki, Suguru Mototani
  • Organizer: International conference of the european society for precision engineering and nanotechnology
  • Place of Presentation: KU Leuven (Leuven, Belgium)
  • Year and Date: 2015-06-01
  • Int'l Joint Research
• [Presentation] 多自由度インチワームの変位と入力信号 (2015)
  • Author(s): 満吉悠太，石橋伸悟，鳥井昭宏，道木加絵
  • Organizer: 電磁力関連のダイナミクスシンポジウム
  • Place of Presentation: ハウステンボス（長崎県佐世保市）
  • Year and Date: 2015-05-14
• [Presentation] 圧電アクチュエータを用いた浮上機構の電気的特性 (2015)
  • Author(s): 曽根勝利, 鳥井昭宏, 道木加絵，元谷卓
  • Organizer: 2015年精密工学会春季大会学術講演会J06
  • Place of Presentation: 東洋大学（東京都）
  • Year and Date: 2015-03-17 – 2015-03-19
• [Presentation] ５自由度インチワームの動作における表面粗さの影響 (2015)
  • Author(s): 石橋伸悟，満吉悠太，鳥井昭宏，道木加絵，元谷卓
  • Organizer: 2015年精密工学会春季大会学術講演会J07
  • Place of Presentation: 東洋大学（東京都）
  • Year and Date: 2015-03-17 – 2015-03-19
• [Presentation] Positioning of a movable Stewart platform (2014)
  • Author(s): Shingo Ishibashi, YutaMitsuyoshi, Akihiro Torii, Kae Doki, Suguru Mototani
  • Organizer: Proceedings of the 6th International conference on positioning technology, (ICPT2014) AC3
  • Place of Presentation: 北九州国際会議場（北九州市，福岡県）
  • Year and Date: 2014-11-18 – 2014-11-21
• [Presentation] Design and performance of a 6-DOF inchworm-type positioning stage (2014)
  • Author(s): A. Torii, S. Ishibashi, K. Doki, S. Mototani
  • Organizer: Proceedings of the American Scoiety for Precision Engineering
  • Place of Presentation: Boston（USA）
  • Year and Date: 2014-11-09 – 2014-11-13
• [Presentation] Levitation energy of piezoelectric actuator using a levitation mechanism (2014)
  • Author(s): Shori Sone, Akihiro Torii, Kae Doki, Suguru Mototani
  • Organizer: The 25th International Symposium on Micro-NanoMechatronics and Human Science,
  • Place of Presentation: 名古屋大学（名古屋市，愛知県）
  • Year and Date: 2014-11-09 – 2014-11-12
• [Presentation] ５自由度インチワームの微小変位特性 (2014)
  • Author(s): 石橋伸悟，鳥井昭宏，道木加絵，元谷卓
  • Organizer: 2014年度精密工学会秋季大会D07
  • Place of Presentation: 鳥取大学（鳥取市，鳥取県）
  • Year and Date: 2014-09-16 – 2014-09-18
• [Presentation] 圧電素子の鉛直振動を用いた浮上機構のエネルギー (2014)
  • Author(s): 曽根勝利，鳥井昭宏，道木加絵，元谷卓
  • Organizer: 2014年度精密工学会秋季大会D08
  • Place of Presentation: 鳥取大学（鳥取市，鳥取県）
  • Year and Date: 2014-09-16 – 2014-09-18
• [Presentation] 圧電素子を用いた浮上機構の消費電力 (2014)
  • Author(s): 曽根勝利, 鳥井昭宏, 道木加絵，元谷卓
  • Organizer: 平成26年度電気・電子・情報関係学会東海支部連合大会F1-6
  • Place of Presentation: 中京大学（名古屋市，愛知県）
  • Year and Date: 2014-09-08 – 2014-09-09
• [Presentation] 圧電素子の鉛直振動を用いた浮上機構の入力信号 (2014)
  • Author(s): 曽根勝利, 鳥井昭宏, 道木加絵
  • Organizer: 第26回電磁力関連のダイナミクスシンポジウム，21Ap4
  • Place of Presentation: アイーナいわて（盛岡市，岩手県）
  • Year and Date: 2014-05-21 – 2014-05-23
• [Presentation] 振動による浮上を用いた３自由度インチワーム (2014)
  • Author(s): 鳥井昭宏, 曽根勝利，上谷亮介，道木加絵
  • Organizer: 第26回電磁力関連のダイナミクスシンポジウム，21Ap5
  • Place of Presentation: アイーナいわて（盛岡市，岩手県）
  • Year and Date: 2014-05-21 – 2014-05-23