| Budget Amount *help |
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2014: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Outline of Final Research Achievements |
An inchworm-type precision positioning device was optimized. It was revealed that the displacement decreased as the load increases. In order to eliminate the influence of friction, a moving mechanism that generated a non-contact state by levitation was developed. In order to improve the positioning performance, a feedback position control system was implemented. The inchworm-type positioning device which was capable of the positioning with 3 DOF (degrees of freedom) position and 3 DOF orientation was realized by adding the function of inchworm to the mechanism of the parallel mechanism using the piezoelectric element.
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