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Study of low-temperature formation of group IV nanodots made by use of Bi surfactant and its device application

Research Project

Project/Area Number 26420264
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionHirosaki University

Principal Investigator

Hiroshi Okamoto  弘前大学, 理工学研究科, 教授 (00513342)

Co-Investigator(Renkei-kenkyūsha) TAWARA Takehiko  日本電信電話株式会社, NTT物性科学基礎研究所, 主任研究員 (40393798)
TATENO Kouta  日本電信電話株式会社, NTT物性科学基礎研究所, 主任研究員 (20393796)
ZANG Guoqiang  日本電信電話株式会社, NTT物性科学基礎研究所, 主任研究員 (90402247)
Research Collaborator SUZUKI Yoshihiro  弘前大学, 大学院・理工学研究科
TAKITA Kensuke  弘前大学, 大学院・理工学研究科
TUSHIMA Kazuto  弘前大学, 大学院・理工学研究科
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2016: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2015: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2014: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywordsナノドット / Ⅳ族半導体 / ゲルマニウム / ビスマス / Ⅳ族ナノドット / 低温形成 / サーファクタント
Outline of Final Research Achievements

Group IV nanodots are expected for various applications such as optical devices for Si photonics, memory devices with new structures, and high-efficiency solar cells. The purpose of this study is to develop the method of low-temperature formation and to control their shapes by making use of the growth technique of In(Ga)As QDs using bismuth (Bi) as a surfactant, which we have developed in our previous work. The newly developed method is sequential evaporation of Bi and Ge under low temperature (Room temp. to around 130℃) and relatively low-temperature annealing (300℃ to 400℃). By this method, we have successfully formed crystalline Ge nanodots. Also, we have revealed that the formation mechanism under this method is not based on surfactant which we have expected at first but based on the newly found mechanism.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (14 results)

All 2017 2016 2015 2014 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results,  Acknowledgement Compliant: 1 results) Presentation (11 results) (of which Int'l Joint Research: 3 results,  Invited: 3 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Self-Organized Nanostructure Formation of III-V and IV Semiconductors with Bismuth2016

    • Author(s)
      Hiroshi Okamoto
    • Journal Title

      Journal of Advances in Nanomaterials

      Volume: 1 Issue: 2 Pages: 82-94

    • DOI

      10.22606/jan.2016.12005

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] 真空蒸着と低温アニールによるBi媒介Geナノドット形成-12017

    • Author(s)
      滝田健介、対馬和都、遠田義晴、俵毅彦、舘野功太、章国強、後藤秀樹、池田高之、水野誠一郎、岡本浩
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      横浜市パシフィコ横浜
    • Year and Date
      2017-03-15
    • Related Report
      2016 Annual Research Report
  • [Presentation] 真空蒸着と低温アニールによるBi媒介Geナノドット形成-22017

    • Author(s)
      対馬和都、滝田健介、中澤日出樹、遠田義晴、俵毅彦、舘野功太、章国強、後藤秀樹、岡本浩
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      横浜市パシフィコ横浜
    • Year and Date
      2017-03-15
    • Related Report
      2016 Annual Research Report
  • [Presentation] REALD形成Al2O3/GeO2/p-Ge MOSキャパシターの電気的特性に及ぼすゲート電極金属の影響2016

    • Author(s)
      山田大地, 王谷洋平, 山本千綾,山中淳二,佐藤哲也, 岡本浩,福田幸夫
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      新潟市朱鷺メッセ
    • Year and Date
      2016-09-16
    • Related Report
      2016 Annual Research Report
  • [Presentation] Effects of electrode metal and thermal treatment on the electrical properties of Al2O3/GeO2 gate stack grown on Ge substrate by radical-enhanced atomic layer deposition2016

    • Author(s)
      Yukio Fukuda, Daichi Yamada, Yohei Otani, Chiaya Yamamoto, Junji Yamanaka, Tetsuya Sato, Hiroshi Okamoto
    • Organizer
      16th International Conference on Atomic Layer Deposition (ALD 2016)
    • Place of Presentation
      Dublin, Ireland
    • Year and Date
      2016-06-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Self-organized nanostructure formation of III-V and grope IV semiconductors by using bismuth2016

    • Author(s)
      Hiroshi Okamoto
    • Organizer
      Collaborative Conference on 3D and Materials Research (CC3DMR)
    • Place of Presentation
      Incheon/Seoul, Korea
    • Year and Date
      2016-06-23
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Radical-enhanced ALD法によるGe-MIS構造の欠陥評価価(2);熱処理効果2016

    • Author(s)
      成田 英史、山田 大地、福田 幸夫、岡本 浩
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学(目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] Effects of postdeposition treatments on the electrical properties of Al2O3/GeO2 gate stack grown on Ge substrate by radical-enhanced atomic layer deposition2016

    • Author(s)
      Hiroshi Okamoto, Daichi Yamada, Hidefumi Narita, Yohei Otani, Chiaya Yamamoto, Junji Yamanaka, Tetsuya Sato, and Yukio Fukuda
    • Organizer
      9th International WorkShop on New Group IV Semiconductor Nanoelectronics
    • Place of Presentation
      Tohoku Univ., Sendai, Japan
    • Year and Date
      2016-01-11
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Bi プレディポジションによる Ge ナノドットの 石英基板上への低温形成2015

    • Author(s)
      鈴木良優, 滝田健介, 俵毅彦, 舘野功太, 章国強, 後藤秀樹, 岡本浩
    • Organizer
      応用物理学会東北支部 第70回学術講演会
    • Place of Presentation
      ホテルアップルランド(青森県平川市)
    • Year and Date
      2015-12-03
    • Related Report
      2015 Research-status Report
  • [Presentation] Radical-enhanced ALD法によるGe-MIS構造の欠陥評価2015

    • Author(s)
      成田 英史、山田 大地、福田 幸夫、鹿糠 洋介、岡本 浩
    • Organizer
      第76 回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋市国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] Radical-Enhanced ALD法によって形成したAlジャーマネイト/Ge界面とその近傍の欠陥評価2015

    • Author(s)
      成田英史、山田大地、福田幸夫、鹿糠洋介、岡本浩
    • Organizer
      電子情報通信学会技術研究報告
    • Place of Presentation
      弘前大学(弘前市)
    • Year and Date
      2015-08-10
    • Related Report
      2015 Research-status Report
  • [Presentation] Formation mechanism of aluminum germanate layer on germanium substrate by radical-enhanced atomic layer deposition2015

    • Author(s)
      Hiroshi Okamoto, Tomoya Yokohira, Kosei Yanachi, Chiaya Yamamoto, Byeonghaku Yoo, Junji Yamanaka, Tetsuya Sato, Toshiyuki Takamatsu, Hidefumi Narita, and Yukio Fukuda
    • Organizer
      8th International WorkShop on New Group IV Semiconductor Nanoelectronics
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2015-01-30
    • Related Report
      2014 Research-status Report
    • Invited
  • [Remarks] 岡本研究室ホームページ

    • URL

      http://www.eit.hirosaki-u.ac.jp/~okamoto/home/

    • Related Report
      2015 Research-status Report
  • [Patent(Industrial Property Rights)] ナノ構造の製造方法2014

    • Inventor(s)
      俵毅彦、舘野功太、章国強、後藤秀樹、岡本浩
    • Industrial Property Rights Holder
      俵毅彦、舘野功太、章国強、後藤秀樹、岡本浩
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-123112
    • Filing Date
      2014-06-16
    • Related Report
      2014 Research-status Report

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Published: 2014-04-04   Modified: 2018-03-22  

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