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Loss reduction of longitudinal-type leaky surface acoustic wave by loading with high-velocity thin film and its application to high-frequency filter

Research Project

Project/Area Number 26420269
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionUniversity of Yamanashi

Principal Investigator

KAKIO Shoji  山梨大学, 総合研究部, 教授 (70242617)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2016: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2015: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Keywords弾性表面波 / LiNbO3 / ScAlN薄膜 / 低損失フィルタ / 異種材料接合 / 縦波型リーキー弾性表面波 / 高結合化 / SAWフィルタ / 低損失化
Outline of Final Research Achievements

For the evolution of next-generation mobile communication systems, surface acoustic wave (SAW) devices with higher frequency are strongly demanded. The longitudinal-type leaky surface acoustic wave (LLSAW) has advantageous for application to high-frequency SAW devices since LLSAWs have a higher phase velocity than the general SAWs. However, LLSAWs exhibit inherent attenuation because they lose energy by continuously radiating bulk waves into the substrate. In this study, it was found experimentally for the LLSAW propagating on LiNbO3 substrate that, the losses can be reduced by loading with a ScAlN thin film with a higher velocity than the substrate. Moreover, it was also found theoretically and experimentally that when the LiNbO3 or LiTaO3 thin plate with a smaller thickness than one wavelength bonded to an quartz or sapphire substrate with a high phase velocity, the electromechanical coupling factor of the LLSAW was increased to two to three times that in the single substrate.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (24 results)

All 2017 2016 2015 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Acknowledgement Compliant: 1 results) Presentation (19 results) (of which Int'l Joint Research: 4 results) Remarks (2 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] High-coupling leaky surface acoustic waves on LiNbO3 or LiTaO3 thin plate bonded to high-velocity substrate2017

    • Author(s)
      Masashi Gomi, Takuya Kataoka, Junki Hayashi, and Shoji Kakio
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 56

    • NAID

      210000148048

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Loss reduction of leaky surface acoustic wave by loading with high-velocity thin film2016

    • Author(s)
      Shoji Kakio and Keiko Hosaka
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55

    • NAID

      210000146804

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] LiTaO3薄板と水晶基板の接合によるリーキー系SAWの高結合化2017

    • Author(s)
      垣尾 省司,五味 将史,林 純貴, 須崎 遥, 米内 敏文, 岸田 和人, 水野 潤
    • Organizer
      第64回応用物理学会春季学術講演会,14p-514-8
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] 圧電薄板と高音速基板の接合によるリーキー系弾性表面波の高結合化2017

    • Author(s)
      五味 将史,片岡 拓哉,林 純貴,垣尾 省司
    • Organizer
      圧電材料・デバイスシンポジウム2017
    • Place of Presentation
      東北大学(宮城県・仙台市)
    • Year and Date
      2017-02-06
    • Related Report
      2016 Annual Research Report
  • [Presentation] 圧電薄板と高音速基板の接合によるリーキー系SAWの高結合化2016

    • Author(s)
      垣尾 省司,五味 将史,片岡 拓哉,林 純貴
    • Organizer
      平成28年度第2回『EMデバイス・システムの新技術調査専門委員会,超精密周波数計測,比較を目指す未来型回路技術調査専門委員会合同委員会』技術報告,EM-1
    • Place of Presentation
      登別会館(北海道・登別市)
    • Year and Date
      2016-12-02
    • Related Report
      2016 Annual Research Report
  • [Presentation] High-coupling leaky SAWs on LiNbO3 or LiTaO3 thin plate bonded to high-velocity substrate2016

    • Author(s)
      Masashi Gomi, Takuya Kataoka, Junki Hayashi, and Shoji Kakio
    • Organizer
      The 37th Symposium on ULTRASONIC ELECTRONICS, 1P3-2
    • Place of Presentation
      Pukyong National University(Korea・Pusan)
    • Year and Date
      2016-11-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] LiNbO3・LiTaO3薄板と高音速基板の接合によるリーキー系SAWの高結合化2016

    • Author(s)
      五味 将史,片岡 拓哉,林 純貴,垣尾 省司
    • Organizer
      第77回応用物理学会秋季学術講演会,13a-D63-4
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] ScAlN/回転Y-X LiTaO3構造におけるリーキーSAWの理論解析2016

    • Author(s)
      垣尾 省司,勝谷 信介,保坂 桂子
    • Organizer
      第77 回応用物理学会秋季学術講演会,13p-P1-1
    • Place of Presentation
      新潟,朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 高音速薄膜装荷によるリーキー弾性表面波の低損失化2016

    • Author(s)
      垣尾 省司,勝谷 信介,保坂 桂子
    • Organizer
      第45回EMシンポジウム
    • Place of Presentation
      東京理科大学(東京都・新宿区)
    • Year and Date
      2016-06-17
    • Related Report
      2016 Annual Research Report
  • [Presentation] 高音速薄膜装荷によるリーキー弾性表面波の低損失化2016

    • Author(s)
      垣尾 省司,勝谷 信介,保坂 桂子
    • Organizer
      日本学術振興会 弾性波技術第150委員会 第144回研究会資料
    • Place of Presentation
      弘済会館(東京都・千代田区)
    • Year and Date
      2016-05-17
    • Related Report
      2016 Annual Research Report
  • [Presentation] 高音速薄膜装荷によるリーキー弾性表面波の低損失化 ― LiTaO3基板への適用 ―2016

    • Author(s)
      垣尾 省司, 勝谷 信介, 保坂 桂子
    • Organizer
      第63回応用物理学会春季学術講演会,20p-S322-12
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都・目黒区)
    • Year and Date
      2016-03-20
    • Related Report
      2015 Research-status Report
  • [Presentation] 高音速薄膜装荷によるリーキー弾性表面波の低損失化2016

    • Author(s)
      垣尾 省司,保坂 桂子
    • Organizer
      圧電材料・デバイスシンポジウム2016, D-1
    • Place of Presentation
      東北大学(宮城県・仙台市)
    • Year and Date
      2016-02-09
    • Related Report
      2015 Research-status Report
  • [Presentation] Loss reduction of longitudinal-type leaky surface acoustic wave by loading with ScAlN thin film2015

    • Author(s)
      Masaya Gomi and Shoji Kakio
    • Organizer
      The 36th Symposium on ULTRASONIC ELECTRONICS, 1P3-2
    • Place of Presentation
      つくば国際会議場(茨城県・つくば市)
    • Year and Date
      2015-11-05
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Loss reduction of leaky surface acoustic wave by loading with high-velocity thin film2015

    • Author(s)
      Shoji Kakio and Keiko Hosaka
    • Organizer
      The 36th Symposium on ULTRASONIC ELECTRONICS, 1P3-1
    • Place of Presentation
      つくば国際会議場(茨城県・つくば市)
    • Year and Date
      2015-11-05
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] ScAlN 薄膜装荷による縦型リーキー弾性表面波の低損失化2015

    • Author(s)
      五味 将史, 垣尾 省司
    • Organizer
      平成27年度第2回『EMデバイス・システムの新技術調査専門委員会』技術報告,1-1
    • Place of Presentation
      山梨大学(山梨県・甲府市)
    • Year and Date
      2015-10-30
    • Related Report
      2015 Research-status Report
  • [Presentation] 高音速薄膜装荷によるリーキー弾性表面波の低損失化2015

    • Author(s)
      垣尾 省司,保坂 桂子
    • Organizer
      第2回『EMデバイス・システムの新技術調査専門委員会』技術報告,1-3
    • Place of Presentation
      山梨大学(山梨県・甲府市)
    • Year and Date
      2015-10-30
    • Related Report
      2015 Research-status Report
  • [Presentation] Loss reduction of leaky surface acoustic wave by loading with high-velocity thin film2015

    • Author(s)
      Shoji Kakio and Keiko Hosaka
    • Organizer
      2015 IEEE International Ultrasonics Symposium, P4A3-5
    • Place of Presentation
      Taipei International Convention Center (Taipei, Taiwan)
    • Year and Date
      2015-10-22
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] 高音速薄膜装荷によるリーキー弾性表面波の低損失化2015

    • Author(s)
      垣尾 省司,保坂 桂子
    • Organizer
      日本音響学会2015年秋季研究発表会,3-4-10
    • Place of Presentation
      会津大学(福島県・会津若松市)
    • Year and Date
      2015-09-18
    • Related Report
      2015 Research-status Report
  • [Presentation] ScAlN 薄膜装荷による縦型リーキー弾性表面波の低損失化2015

    • Author(s)
      五味 将史, 垣尾 省司
    • Organizer
      第76回応用物理学会秋季学術講演会,14a-2K-8
    • Place of Presentation
      名古屋国際会議場(愛知県・名古屋市)
    • Year and Date
      2015-09-14
    • Related Report
      2015 Research-status Report
  • [Presentation] 高音速薄膜装荷によるリーキー弾性表面波の低損失化 ― 回転YカットLiNbO3におけるカット角依存性 ―2015

    • Author(s)
      垣尾 省司,保坂 桂子
    • Organizer
      第76回応用物理学会秋季学術講演会,14a-2K-9
    • Place of Presentation
      名古屋国際会議場(愛知県・名古屋市)
    • Year and Date
      2015-09-14
    • Related Report
      2015 Research-status Report
  • [Presentation] 高音速薄膜装荷によるリーキー弾性表面波の低損失化2015

    • Author(s)
      垣尾 省司,保坂 桂子
    • Organizer
      第62回応用物理学会春季学術講演会講演予稿集,11p-D12-11,p.02-037
    • Place of Presentation
      東海大学湘南キャンパス(神奈川県平塚市)
    • Year and Date
      2015-03-11
    • Related Report
      2014 Research-status Report
  • [Remarks] 垣尾・鈴木研究室

    • URL

      http://www.ccn.yamanashi.ac.jp/~kakio/

    • Related Report
      2016 Annual Research Report
  • [Remarks] 山梨大学垣尾研究室ホームページ

    • URL

      http://www.ccn.yamanashi.ac.jp/~kakio/

    • Related Report
      2015 Research-status Report 2014 Research-status Report
  • [Patent(Industrial Property Rights)] 接合基板,弾性表面波素子,弾性表面波デバイスおよび接合基板の製造方法2016

    • Inventor(s)
      栗本 浩平,岸田 和人,茅野 林造,水野 潤,垣尾 省司
    • Industrial Property Rights Holder
      国立大学法人山梨大学,(株)日本製鋼所,学校法人早稲田大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-157122
    • Filing Date
      2016-08-10
    • Related Report
      2016 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2018-03-22  

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