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Development of tunable wavelength filter chip with remarkable productivity and optical properties

Research Project

Project/Area Number 26420298
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionUtsunomiya University

Principal Investigator

Yoda Hidehiko  宇都宮大学, 工学(系)研究科(研究院), 准教授 (30312862)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2016: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords光波長フィルタ / 光デバイス / 透明ヒータ膜
Outline of Final Research Achievements

In future optical access network based on WDM-PON, wavelength-tunable narrow bandpass filters (BPFs) are required for colorless optical network units. Tunable BPFs using a-Si:D/SiOx multilayer have simple structure, high productivity, narrow bandpass (0.8 nm), and wide tuning range (30 nm). The tunable BPF is based on thermo-optic effect in thin film of amorphous silicon. In fabrication, a-Si:D/SiOx multilayer was deposited using RF magnetron sputtering. A heating layer of ITiO film was formed on the multilayer in advance. The BPF chip size was 2x2 mm and 0.05 mmt. When current is applied to the heater layer, both temperature and selective wavelength of the BPF increase. We measured the center wavelength of the BPF chip when the power consumption at the heating layer was varied. The power of 0.3 W was used for the wavelength shift of +20 nm. It is noteworthy that the power required for the wavelength shift of +30 nm can be reduced to 0.45 W.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (14 results)

All 2017 2016 2015 2014

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results,  Acknowledgement Compliant: 1 results) Presentation (13 results)

  • [Journal Article] Silver-film subwavelength gratings for polarizers in the terahertz and mid-infrared regions2016

    • Author(s)
      Kazuo Shiraishi, Shogo Higuchi, Kengo Muraki, and Hidehiko Yoda
    • Journal Title

      Optics Express

      Volume: 24 Issue: 18 Pages: 20177-20186

    • DOI

      10.1364/oe.24.020177

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] TLZ法による高純度SiGe結晶育成2017

    • Author(s)
      木下恭一, 荒井康智, 前田辰郎, 佐藤靖則, 依田秀彦
    • Organizer
      応用物理学関係連合講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] 光ファイバ集積型TOチューナブル波長フィルタの作製2017

    • Author(s)
      北川大河, 田村拓磨, 依田秀彦
    • Organizer
      第7回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      栃木県足利市 足利工業大学
    • Year and Date
      2017-03-03
    • Related Report
      2016 Annual Research Report
  • [Presentation] 近赤外波長フィルタ用ITiO透明電極膜の特性改善2017

    • Author(s)
      小池俊輔, 清水淳, 依田秀彦
    • Organizer
      第7回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      栃木県足利市 足利工業大学
    • Year and Date
      2017-03-03
    • Related Report
      2016 Annual Research Report
  • [Presentation] TOチューナブルフィルタの光学特性の温度依存性測定2017

    • Author(s)
      戸賀沢舟, 田村拓磨, 依田秀彦
    • Organizer
      第7回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      栃木県足利市 足利工業大学
    • Year and Date
      2017-03-03
    • Related Report
      2016 Annual Research Report
  • [Presentation] PLZTチューナブル波長フィルタの作製とNIR光学特性評価2016

    • Author(s)
      山本浩輔, 清水淳, 依田秀彦
    • Organizer
      第6回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      前橋工科大学
    • Year and Date
      2016-03-02
    • Related Report
      2015 Research-status Report
  • [Presentation] 近赤外波長フィルタ用ITiO透明電極膜の特性評価,2016

    • Author(s)
      清水淳, 山本浩輔, 依田秀彦
    • Organizer
      第6回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      前橋工科大学
    • Year and Date
      2016-03-01
    • Related Report
      2015 Research-status Report
  • [Presentation] マルチキャビティ型Si/SiOx多層膜フィルタの作製と光学特性評価2016

    • Author(s)
      田村拓磨, 依田秀彦
    • Organizer
      第6回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      前橋工科大学
    • Year and Date
      2016-03-01
    • Related Report
      2015 Research-status Report
  • [Presentation] a-Si:D/SiNx多層膜フィルタの耐熱性2015

    • Author(s)
      依田秀彦, 田村拓磨
    • Organizer
      応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-16
    • Related Report
      2015 Research-status Report
  • [Presentation] 近赤外波長フィルタ用ITiO透明ヒータ膜の特性評価2015

    • Author(s)
      依田秀彦, 白石和男
    • Organizer
      応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] Si/SiNチューナブル波長フィルタの作製と評価に関する研究2015

    • Author(s)
      田島正彦, 依田秀彦
    • Organizer
      第5回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      宇都宮大学工学部
    • Year and Date
      2015-03-02 – 2015-03-03
    • Related Report
      2014 Research-status Report
  • [Presentation] EOチューナブル波長フィルタ用PLZT薄膜の電気及光学特性評価に関する研究2015

    • Author(s)
      飯富真, 依田秀彦
    • Organizer
      第5回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      宇都宮大学工学部
    • Year and Date
      2015-03-02 – 2015-03-03
    • Related Report
      2014 Research-status Report
  • [Presentation] Robust lensed fibers having high focusing effects in resin bond2014

    • Author(s)
      K. Shiraishi, M. Horiuchi, H. Yoda, and C. S. Tsai
    • Organizer
      International Conference on Electronics Packaging (ICEP 2014)
    • Place of Presentation
      Toyama, Japan
    • Year and Date
      2014-04-23 – 2014-04-25
    • Related Report
      2014 Research-status Report
  • [Presentation] A spot-size converter with vertical down taper for the coupling between single-mode fiber and silicon-wire waveguide2014

    • Author(s)
      K. Shiraishi, R. Takasaki, H. Yoda, H. Oshikiri, and C. S. Tsai
    • Organizer
      International Conference on Electronics Packaging (ICEP 2014)
    • Place of Presentation
      Toyama, Japan
    • Year and Date
      2014-04-23 – 2014-04-25
    • Related Report
      2014 Research-status Report

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Published: 2014-04-04   Modified: 2018-03-22  

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