| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2016: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2015: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
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| Outline of Final Research Achievements |
We have developed a novel bimetal MEMS calorimeter as a high-sensitivity photothermal detector having large size of 5 mm × 5 mm for high-throughput optical radiometry. Prototypes of the Si/Al bimetal MEMS sensors were fabricated via SOI processes. Their thermo-mechanical displacements can be measured with a fiber Fabry-Perot interferometer. Noise equivalent power (NEP) of the sensor system was estimated to be 12 nW in air at room temperature, being comparable to the conventional thermoelectric devices. Further reduction of the NEP toward sub-nW, in principle, would be possible owing to their Johnson-noise-free merit.
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