Development of high speed measurement technique for low temperature field by utilization of phosphor thermometry in photo annealing process
| Project/Area Number |
26420717
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Composite materials/Surface and interface engineering
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| Research Institution | National Institute of Advanced Industrial Science and Technology |
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Principal Investigator |
Shinoda Kentaro 国立研究開発法人産業技術総合研究所, 先進コーティング技術研究センター, 主任研究員 (10442732)
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | エキシマレーザー / 塗布光照射法 / 高速温度計測 / 放射温度計測 / 燐光寿命計測 / 酸化物薄膜 / 放射温度計 / 燐光計測 |
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| Outline of Final Research Achievements |
Excimer laser-assisted metal organic deposition is a promising method for realization of low temperature deposition of functional oxide films at low temperature in atmospheric conditions. In order to elucidate the mechanism of photo-assisted crystal growth during irradiation of nano-second pulsed UV laser, which is the key for low temperature deposition, we have developed a high-speed phosphor thermometry to monitor the low temperature field of oxide films under irradiation of a nano-second pulsed UV laser in addition to a high-speed radiation thermometry. We confirmed that the temperature fields drastically changed with the increase in the number of pulses, which is important for understanding photo-assisted crystal growth. We also confirmed that phosphor thermometry could be useful for temperature measurement in photo anneal processing.
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Report
(4 results)
Research Products
(14 results)
