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Direct patterning of ceramics thun films from the precursor solutions by electro-chemical deposition method under the pulsed electric feild

Research Project

Project/Area Number 26420736
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Material processing/Microstructural control engineering
Research InstitutionUniversity of Toyama

Principal Investigator

SAIKI Atsushi  富山大学, 大学院理工学研究部(工学), 教授 (50221255)

Research Collaborator HSSHIZUME Takashi  
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2016: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywordsイットリア安定化ジルコニア / セリア / 酸化チタン / 電気化学堆積法 / パルス電場印可 / 水溶液 / 析出形態 / パターニング / 部分安定化ジルコニア / パルス電圧印加 / 薄膜形成 / 線状パターニング / 縞状析出 / 薄膜 / 外部刺激 / 定在波
Outline of Final Research Achievements

Thin films of YSZ and Ceria were used as buffer layer in electro devices because of their chemical stability and insulation property. In this study, by applying the pulsed electric fields during the electrochemical deposition, the morphology control method was investigated. The thin films were deposited from the precursor solution on the glass substrate by applying the electric field. In addition, another pulsed electric field was applied to the perdicular direction to the film deposition direction. In the limited condition, the pinstripe patterns of ceramic films according to the frequency of the applied pulsed electrical field were observed. Ions movements were restricted by the standing waves due to the applied pulsed electric field and therefore deposition area were limited. The cyclical correlation between the applied pulsed electrical field and the distances of pinstripes was also observed. These methods were thought to be applied to new patterning techniques.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (25 results)

All 2017 2016 2015 2014 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Acknowledgement Compliant: 1 results) Presentation (20 results) (of which Int'l Joint Research: 6 results,  Invited: 2 results) Remarks (2 results)

  • [Journal Article] Fabrication of YSZ thin film by electrochemical deposition method and the effect of the pulsed electrical fields for morphology control2015

    • Author(s)
      T. Fujita, A. Saiki, T. Hashizume
    • Journal Title

      Archives of Metallurgy and Materials

      Volume: 60 Pages: 946-948

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Surface morphology of YSZ thin films deposited from a precursor solution under the electrical fields2014

    • Author(s)
      A,Saiki, T. Hashizume, K.Hamada
    • Journal Title

      Ceramic Transactions

      Volume: 243 Pages: 193-199

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Preparration of the brookite-type titanium oxide nanocrystal by hydrothermal synthesis2014

    • Author(s)
      S.Kitahara, T.Hashizume, A.Saiki
    • Journal Title

      Ceramic Transactions

      Volume: 246 Pages: 119-124

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Presentation] Relation between the applied pulse and current fluctuation cycle and morphology of YSZ thin films fabricated by the electrochemical deposition method2017

    • Author(s)
      Atsushi Saiki, Tadashi Fujita,Takashi Hashizume
    • Organizer
      12th Pacific Rim Conference on Ceramic and Glass Technology (PacRim12)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Year and Date
      2017-05-21
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Relation between current fluctuation cycle and interval distance of pinstripe on YSZ thin films fabricated by the pulsed electrochemical deposition method2016

    • Author(s)
      A.Saiki, T.Fujita, T.Hashizume
    • Organizer
      11th International Conference on the Physical Properties and Application of Advanced Materials(ICPMAT2016)
    • Place of Presentation
      Changji China
    • Year and Date
      2016-07-25
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] パルス印加型電気化学定積法により水溶液から作成したYSZ薄膜組織の周期性2016

    • Author(s)
      佐伯淳
    • Organizer
      第19回日本セラミックス協会北陸支部秋季研究発表会
    • Place of Presentation
      福井AOSSA
    • Related Report
      2016 Annual Research Report
  • [Presentation] パルス電圧印可ECD法により作製した線状YSZ膜とその周波数の関係2015

    • Author(s)
      藤田忠士、橋爪隆、佐伯淳
    • Organizer
      平成27年度金属学会北陸信越支部連合講演会
    • Place of Presentation
      富山大学、富山
    • Year and Date
      2015-12-05
    • Related Report
      2015 Research-status Report
  • [Presentation] Direct patterning of YSZ thin films from a precursor solution by electro-chemical deposition method2015

    • Author(s)
      Atsushi Saiki, Takashi Hashizume
    • Organizer
      10th International Conference on the Physical Properties and Application of Advanced Materials
    • Place of Presentation
      Chiang Mai, Thailand
    • Year and Date
      2015-09-17
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] The relationship between frequency of the pulsed voltage and spacing of linear films by electrochemical deposition method2015

    • Author(s)
      Tadashi Fujita, Atsushi Saiki, Takashi Hashizume
    • Organizer
      10th International Conference on the Physical Properties and Application of Advanced Materials
    • Place of Presentation
      Chiang Mai, Thailand
    • Year and Date
      2015-09-17
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Orientation control of YSZ thin film using RF sputtering method2015

    • Author(s)
      Shogo Miwa, Atsushi Saiki, Takashi Hashizume
    • Organizer
      10th International Conference on the Physical Properties and Application of Advanced Materials
    • Place of Presentation
      Chiang Mai, Thailand
    • Year and Date
      2015-09-17
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] パルス電圧印可電気化学堆積法による縞状YSZ膜の作製2015

    • Author(s)
      藤田忠士、橋爪隆、佐伯淳
    • Organizer
      日本セラミックス協会 第28回秋季シンポジウム
    • Place of Presentation
      富山大学、富山
    • Year and Date
      2015-09-16
    • Related Report
      2015 Research-status Report
  • [Presentation] RFスパッタリング方によるYSZ薄膜の配向性Arガス流入量の関係2015

    • Author(s)
      三輪省吾、橋爪隆、佐伯淳
    • Organizer
      日本セラミックス協会 第28回秋季シンポジウム
    • Place of Presentation
      富山大学、富山
    • Year and Date
      2015-09-16
    • Related Report
      2015 Research-status Report
  • [Presentation] M-CeO2 thin films fabricated by mist deposition from aqueous solution and their optical property2015

    • Author(s)
      A.Saiki, Y.Yamashita, T.Hashizume
    • Organizer
      The 11thPacific Rim Conference of Ceramic Societies(PACRIM 11)
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2015-08-30
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] パルス電圧印可ECD法によるYSZ膜の作製2015

    • Author(s)
      藤田忠士、橋爪隆、佐伯淳
    • Organizer
      日本セラミックス協会 2015年 年会
    • Place of Presentation
      岡山大学
    • Year and Date
      2015-03-18 – 2015-03-20
    • Related Report
      2014 Research-status Report
  • [Presentation] Surface Morphology of YSZ Thin Films Deposited from a Precursor Solution under the Electrical Fields2014

    • Author(s)
      Atsushi Saiki, Tadashi Fujita and Takashi Hashizume
    • Organizer
      2014 Japan-Thailand Joint Seminar on Metallurgy and Materials
    • Place of Presentation
      Chiang Mai University, Thailand
    • Year and Date
      2014-12-09
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] P-ECD法による縞状のYSZ薄膜と周波数の関係2014

    • Author(s)
      藤田忠士、橋爪隆、佐伯淳
    • Organizer
      平成26年度金属学会北陸信越支部連合講演会
    • Place of Presentation
      新潟大学
    • Year and Date
      2014-12-06
    • Related Report
      2014 Research-status Report
  • [Presentation] パルス電圧を印可した電気化学堆積法によるYSZ薄膜の作製2014

    • Author(s)
      藤田忠士、橋爪隆、佐伯淳
    • Organizer
      第18回日本セラミックス協会北陸支部秋季研究発表会
    • Place of Presentation
      富山大学
    • Year and Date
      2014-11-14
    • Related Report
      2014 Research-status Report
  • [Presentation] 前駆体溶液中で作製したYSZ薄膜のパターンニング2014

    • Author(s)
      有様恒太、橋爪隆、佐伯淳
    • Organizer
      第18回日本セラミックス協会北陸支部秋季研究発表会
    • Place of Presentation
      富山大学
    • Year and Date
      2014-11-14
    • Related Report
      2014 Research-status Report
  • [Presentation] Fabrication of CeO2-TiO2 Composited Thin Films on Glass Substrate from Aqueous Solution by Electro-Chemical Deposition Method and Their Optical Property2014

    • Author(s)
      Atsushi Saiki, Takashi Hashizume
    • Organizer
      9th International Conference on the Physical Properties and Application of Advanced Materials
    • Place of Presentation
      AGH, Krakow, Poland
    • Year and Date
      2014-09-14 – 2014-09-18
    • Related Report
      2014 Research-status Report
  • [Presentation] Fabrication of YSZ Thin Film by Electrochemical Deposition Method and the Effect of the Pulsed Electrical Fields for Morphology Control2014

    • Author(s)
      Tadashi Fujita, Atsushi Saiki, Takashi Hashizume
    • Organizer
      9th International Conference on the Physical Properties and Application of Advanced Materials
    • Place of Presentation
      AGH, Krakow, Poland
    • Year and Date
      2014-09-14 – 2014-09-18
    • Related Report
      2014 Research-status Report
  • [Presentation] パルス電圧印可型電気化学堆積法によるセラミックス薄膜の成膜2014

    • Author(s)
      佐伯淳、藤田忠士、橋爪隆
    • Organizer
      日本セラミックス協会 第27回秋季シンポジウム
    • Place of Presentation
      鹿児島大学
    • Year and Date
      2014-09-09 – 2014-09-11
    • Related Report
      2014 Research-status Report
  • [Presentation] 前駆体溶液中でプルーブ移動により作製したYSZ薄膜のパターンニング2014

    • Author(s)
      有様恒太、橋爪隆、佐伯淳
    • Organizer
      日本セラミックス協会 第27回秋季シンポジウム
    • Place of Presentation
      鹿児島大学
    • Year and Date
      2014-09-09 – 2014-09-11
    • Related Report
      2014 Research-status Report
  • [Presentation] 水溶液中でのパルス電場アシストによるセラミックス薄膜の作製2014

    • Author(s)
      佐伯 淳
    • Organizer
      2014年度 電気化学会北陸支部春季大会
    • Place of Presentation
      富山県新川郡
    • Year and Date
      2014-05-15 – 2014-05-16
    • Related Report
      2014 Research-status Report
    • Invited
  • [Remarks] 材料機能工学科機能制御工学研究室ホームページ

    • URL

      http://www3.u-toyama.ac.jp/mater13/

    • Related Report
      2016 Annual Research Report
  • [Remarks] 研究者総覧 佐伯淳

    • URL

      http://evaweb.u-toyama.ac.jp/html/229_ja.html

    • Related Report
      2016 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2018-10-02  

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