Nanofabrication of semiconductors based on Voronoi tessellation in two-dimensional space
| Project/Area Number |
26420744
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Material processing/Microstructural control engineering
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| Research Institution | Kogakuin University |
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Principal Investigator |
Asoh Hidetaka 工学院大学, 先進工学部, 准教授 (80338277)
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| Co-Investigator(Renkei-kenkyūsha) |
ONO Sachiko 工学院大学, 工学部, 教授 (90052886)
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| Research Collaborator |
IMAI Ryota
YAMADA Kohei
ITO Daiki
SUZUKI Yuta
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Keywords | ナノ材料 / 材料加工・処理 / 自己組織化 / 半導体 |
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| Outline of Final Research Achievements |
III-V compound semiconductors have attracted attention as next-generation materials and potential alternatives to silicon-based semiconductors. In this study, we fabricated self-aligned GaAs nanowire arrays by the anodic etching of n-type GaAs (111)B using neither a mask nor a catalyst. Furthermore, we demonstrated the field-emission properties of the GaAs nanowires. Concerning the conditions of fabrication process without applying an external bias, we demonstrated that ordered nanopillar arrays with a periodicity of 100 nm can be fabricated on GaAs substrates using metal-assisted chemical etching with a patterned Au catalyst. The effects of etchant composition and etching time on the morphology of the etched GaAs substrate were also investigated. A natural lithographic approach based on the structural feature of spontaneously generated patterns will offer a new route to the fundamental study of the fabrication of ordered surfaces over large area.
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Report
(4 results)
Research Products
(30 results)
