Development and sophistication of new microfabrication technique of polyimide using supercritical carbon dioxide
| Project/Area Number |
26420765
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Properties in chemical engineering process/Transfer operation/Unit operation
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| Research Institution | Kanazawa University (2016)
Hiroshima University (2014-2015) |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
滝嶌 繁樹 広島大学, 工学研究院, 教授 (10188120)
木原 伸一 広島大学, 工学研究院, 准教授 (30284524)
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2016: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2015: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2014: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
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| Keywords | ポリイミド / 超臨界二酸化炭素 / 微細加工 / 重合速度 / 高圧蒸着重合 / 蒸着重合 / 薄膜 |
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| Outline of Final Research Achievements |
In the present work, the new deposition technique of polyimide using supercritical carbon dioxide was developed and sophisticated. The polyimides that were consisted of 2,2-bis(3,4-anhydrodicarboxyphenyl)-hexafluoropropane (6FDA) and 2,2’-bis(trifluoromethyl)-4,4’-diaminobiphenyl (TFDB) (fluorinated polyiomide), and pyromellitic dianhydride (PMDA) and TFDB (Kapton-fluorinated polyimide) could be fully deposited inside the microscale trenches of Si wafer at the high level of feed monomer concentration.
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Report
(4 results)
Research Products
(10 results)
