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Multifunctional Discharging Jet Array Device Realized by Integration of Micromachined Fluidic Channels and Electrodes

Research Project

Project/Area Number 26600064
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Nano/Microsystems
Research InstitutionKagawa University

Principal Investigator

Takao Hidekuni  香川大学, 工学部, 教授 (40314091)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Keywords微小ジェット / マイクロデバイス / 放電プラズマ / マイクロ・ナノデバイス / 先端機能デバイス / プラズマ加工
Outline of Final Research Achievements

In this study, a multifunctional discharging jet array device and its related technologies have been realized by integration of micromachined fluidic channels and electrodes. The basic technologies and bases of concept have been established in this project successfully. In addition, control technique of the individual discharging jet is newly developed since the jet array can control its overall shape and relative position, and gas components flexibly. In the research period, various test devices have been fabricated to validate the effectiveness of the new device. Packaging of jet array device was explored and finally established to evaluate the essential performances.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (10 results)

All 2017 2016 2015 2014

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results) Presentation (9 results) (of which Int'l Joint Research: 4 results,  Invited: 1 results)

  • [Journal Article] Integrated pressure and temperature sensor with high immunity against external disturbance for flexible endoscope operation2017

    • Author(s)
      Y. Maeda, K. Maeda, H. Kobara, H. Mori, H. Takao
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56-4S

    • NAID

      210000147601

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] 1MPa Resistant MEMS Slide Valve Driven by an External Actuator for High Power Fluidic Applications2017

    • Author(s)
      H. Takao, S. Takemasa, K. Terao, F. Shimokawa
    • Organizer
      The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '17)
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      2017-06-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication and Packaging of an Integrated Pressure and Temperature Sensor with High Immunity Against External Disturbance Under Flexible Endoscopic Operation2016

    • Author(s)
      Y. Maeda, K. Maeda, H. Kobara, H. Mori, H. Takao
    • Organizer
      2016 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2016-09-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Embedded Sensor Packaging on Endoscopy Hood for Real Time Monitoring During Natural Orfice Translumenal Endoscopic Surgery2016

    • Author(s)
      T. Nakagawa, Y. Maeda, K. Maeda, K. Watatani, H. Kobara, H. Mori, H. Takao
    • Organizer
      Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016
    • Place of Presentation
      Kanazawa, Japan
    • Year and Date
      2016-06-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高温微細加工を目指したマイクロフレームアレイデバイス2016

    • Author(s)
      井原拓也; 寺尾京平; 下川房男; 高尾英邦
    • Organizer
      平成28年電気学会全国大会
    • Place of Presentation
      東北大学
    • Year and Date
      2016-03-16
    • Related Report
      2015 Research-status Report
  • [Presentation] 制御性と耐圧性を高めた組立式MEMSマイクロバルブの製作2016

    • Author(s)
      武政智史; 相田泰志; 高尾英邦
    • Organizer
      平成28年電気学会全国大会
    • Place of Presentation
      東北大学
    • Year and Date
      2016-03-16
    • Related Report
      2015 Research-status Report
  • [Presentation] Generation of Low-Temperature Atmospheric Pressure Plasma-Jet Patternable Array at a 320micron Pitch Channel Array2015

    • Author(s)
      T. Ihara; H. Yamasaki; K. Terao; T. Suzuki; F. Shimokawa; H. Takao
    • Organizer
      The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE Transducers2015)
    • Place of Presentation
      Alaska, USA
    • Year and Date
      2015-06-21
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] シリコン微細加工技術を用いた320umピッチの流路を有する大気圧プラズマジェットアレイの製作と評価2014

    • Author(s)
      武政智史; 山崎秀貴; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    • Organizer
      第31回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      くにびきメッセ,松江市
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Research-status Report
  • [Presentation] マイクロフレームジェットデバスの実現を目指した消炎距離の測定2014

    • Author(s)
      井原拓也; 寺尾京平; 鈴木孝明; 下川房男; 高尾英邦
    • Organizer
      第31回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      くにびきメッセ,松江市
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Research-status Report
  • [Presentation] Integrated MEMS Technology for Construction of Diverse Functional Devices” Short Course B2014

    • Author(s)
      H. Takao
    • Organizer
      International Conference on Solid State Device and Materials (SSDM2014)
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2014-09-08 – 2014-09-11
    • Related Report
      2014 Research-status Report
    • Invited

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Published: 2014-04-04   Modified: 2018-03-22  

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