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Development of Compact Deep-UV Laser Based on Wavelength Converter Integrated with Blue Laser Light Sources

Research Project

Project/Area Number 26600082
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Crystal engineering
Research InstitutionOsaka University (2016)
Tohoku University (2014-2015)

Principal Investigator

Katayama Ryuji  大阪大学, 工学研究科, 教授 (40343115)

Co-Investigator(Kenkyū-buntansha) 横山 弘之  東北大学, 未来科学技術共同研究センター, 教授 (60344727)
窪谷 茂幸  東北大学, 金属材料研究所, 助教 (70583615)
谷川 智之  東北大学, 金属材料研究所, 講師 (90633537)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Keywords非線形光学 / 第二高調波発生 / 窒化アルミニウム / 酸化ジルコニウム / パルスレーザ堆積 / 反応性スパッタリング / 光導波路 / パルスレーザー堆積
Outline of Final Research Achievements

Despite the strong needs for the semiconductor lithography and medical applications, still the semiconductor laser with a deep-UV emission has never been realized. In this work, novel methods for emitting deep-UV has been proposed, via the second harmonic generation in UV regime, pumped by blue laser diodes, based on the wavelength conversion process taking advantage of strong optical nonlinearity in AlN. Also, the elemental technologies for the device fabrication, design as well as the optical investigation have been developed.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (25 results)

All 2017 2016 2015 2014

All Journal Article (8 results) (of which Int'l Joint Research: 4 results,  Peer Reviewed: 8 results) Presentation (17 results) (of which Invited: 5 results)

  • [Journal Article] Homogeneity improvement of N-polar InGaN/GaN multiple quantum wells by using c-plane sapphire substrate with off-cut-angle toward a-sapphire plane2016

    • Author(s)
      Kanako Shojiki, Takashi Hanada, Tomoyuki Tanikawa, Yasuhiko Imai, Shigeru Kimura, Ryohei Nonoda, Shigeyuki Kuboya, Ryuji Katayama, Takashi Matsuoka
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 (5S) Issue: 5S Pages: 05FA09-05FA09

    • DOI

      10.7567/jjap.55.05fa09

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanometer scale fabrication and optical response of InGaN/GaN quantum disks2016

    • Author(s)
      Yi-Chun Lai, Akio Higo, Takayuki Kiba, Cedric Thomas, Shula Chen, Chang Yong Lee, Tomoyuki Tanikawa, Shigeyuki Kuboya, Ryuji Katayama, Kanako Shojiki, Junichi Takayama, Ichiro Yamashita, Akihiro Murayama, Gou-Chung Chi, Peichen Yu, Seiji Samukawa
    • Journal Title

      Nanotechnology

      Volume: 27 Issue: 42 Pages: 425401-425401

    • DOI

      10.1088/0957-4484/27/42/425401

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Ga‐polar GaN film grown by MOVPE on cleaved ScAlMgO4 (0001) substrate with millimeter‐scale wide terraces2016

    • Author(s)
      Takuya Iwabuchi, Shigeyuki Kuboya, Tomoyuki Tanikawa, Takashi Hanada, Ryuji Katayama, Tsuguo Fukuda, Takashi Matsuoka
    • Journal Title

      physica status solidi (a)

      Volume: - Issue: 9 Pages: 1600754-1600754

    • DOI

      10.1002/pssa.201600754

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Polarity control of GaN grown on pulsed-laser-deposited AlN/GaN templates by metalorganic vapor phase epitaxy2016

    • Author(s)
      J. Yoo, K. Shojiki, T. Tanikawa, S. Kuboya, T. Hanada, R. Katayama, and T. Matsuoka
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 (5S) Issue: 5S Pages: 05FA04-05FA04

    • DOI

      10.7567/jjap.55.05fa04

    • NAID

      210000146483

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Effects of Mg/Ga and V/III source ratios on hole concentration of N-polar p-type GaN grown by metalorganic vapor phase epitaxy2016

    • Author(s)
      R. Nonoda, K. Shojiki, T. Tanikawa, S. Kuboya, R. Katayama, and T. Matsuoka
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 (5S) Issue: 5S Pages: 05FE01-05FE01

    • DOI

      10.7567/jjap.55.05fe01

    • Related Report
      2015 Research-status Report
    • Peer Reviewed
  • [Journal Article] Large Stokes-like shift in N-polar (000-1) InGaN/GaN multiple-quantum-well light-emitting diodes2016

    • Author(s)
      T. Tanikawa, K. Shojiki, S .Kuboya, R. Katayama, and T. Matsuoka
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 (5S) Issue: 5S Pages: 05FJ03-05FJ03

    • DOI

      10.7567/jjap.55.05fj03

    • Related Report
      2015 Research-status Report
    • Peer Reviewed
  • [Journal Article] Red to blue wavelength emission of N-polar (000-1) InGaN light-emitting diodes grown by metalorganic vapor phase epitaxy2015

    • Author(s)
      K. Shojiki, T. Tanikawa, J.H.Choi, S. Kuboya,T. Hanada, R. Katayama, and T. Matsuoka
    • Journal Title

      Appl. Phys. Express

      Volume: 8 (6) Issue: 6 Pages: 061005-061005

    • DOI

      10.7567/apex.8.061005

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Suppression of metastable-phase inclusion in N-polar (000-1) InGaN/GaN multiple quantum wells grown by metalorganic vapor phase epitaxy2015

    • Author(s)
      K. Shojiki, J.H.Choi, T. Iwabuchi, N. Usami, T. Tanikawa, S. Kuboya,T. Hanada, R. Katayama, and T. Matsuoka
    • Journal Title

      Appl. Phys. Lett.

      Volume: 106 (22) Issue: 22

    • DOI

      10.1063/1.4922131

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] ワイドギャップ半導体の量子光学素子応用2017

    • Author(s)
      片山竜二
    • Organizer
      第64回応用物理学会春季学術講演会 シンポジウム 金属酸化物の結晶物性に迫る
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] AlN系窒化物半導体のウェハ接合技術の検討2017

    • Author(s)
      高橋 一矢、篠田 涼二、岩谷 素顕、竹内 哲也、上山 智、服部 友一、赤崎 勇、片山 竜二、上向井 正裕
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] 高次結合ディープエッチDBRレーザの作製と単一モード発振2017

    • Author(s)
      山下 諒大、上向井 正裕、片山 竜二
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] 極性ワイドギャップ半導体の量子光学応用2017

    • Author(s)
      片山竜二
    • Organizer
      IEEE Photonics Society Kansai Chapter 講演会
    • Place of Presentation
      伊勢市観光文化会館(三重県・伊勢市)
    • Year and Date
      2017-01-18
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 窒化物半導体極性制御特異構造の非線形光学素子応用2016

    • Author(s)
      片山竜二
    • Organizer
      第77回応用物理学会秋季学術講演会 シンポジウム 窒化物半導体特異構造の科学 ~新機能の発現と理解~
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] ワイドギャップ半導体の 量子光学応用2016

    • Author(s)
      片山竜二
    • Organizer
      第9回 窒化物半導体の成長・評価に関する夏期セミナー
    • Place of Presentation
      立命館大学(滋賀県・草津市)
    • Year and Date
      2016-08-29
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] ワイドギャップ半導体研究の新展開 量子光学デバイス・システム開発2016

    • Author(s)
      片山竜二
    • Organizer
      第1回 電子材料若手研究会
    • Place of Presentation
      広島大学(広島県・東広島市)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Design of the Transverse Quasi-Phase Matched AlN Waveguides for Deep-UV Second Harmonic Generation2015

    • Author(s)
      Y. Mitani, R. Katayama, J. Yoo, K. Shojiki, T. Tanikawa, S. Kuboya and T. Matsuoka
    • Organizer
      The 34th Electronic Materials Symposium
    • Place of Presentation
      La-Foret Biwako, Shiga, Japan
    • Year and Date
      2015-07-15 – 2015-07-17
    • Related Report
      2014 Research-status Report
  • [Presentation] J. Yoo, K. Shojiki T. Tanikawa, S. Kuboya, T. Hanada, R. Katayama and T. Matsuoka2015

    • Author(s)
      Polarity-controlled MOVPE growth of GaN on PLD-AlN/GaN templates
    • Organizer
      The 34th Electronic Materials Symposium
    • Place of Presentation
      La-Foret Biwako, Shiga, Japan
    • Year and Date
      2015-07-15 – 2015-07-17
    • Related Report
      2014 Research-status Report
  • [Presentation] Polarity-controlled MOVPE growth of GaN on PLD-AlN templates2015

    • Author(s)
      J. Yoo, K. Shojiki, T. Tanikawa, S. Kuboya, T. Hanada, R. Katayama and T. Matsuoka
    • Organizer
      The 34th Electronic Materials Symposium
    • Place of Presentation
      ラフォーレ琵琶湖、滋賀県守山市
    • Year and Date
      2015-07-15
    • Related Report
      2015 Research-status Report
  • [Presentation] 横型擬似位相整合AlN導波路を用いた深紫外第二高調波発生素子の設計2015

    • Author(s)
      三谷悠貴, 片山竜二, 劉陳燁, 正直花奈子, 谷川智之, 窪谷茂幸, 松岡隆志
    • Organizer
      日本結晶成長学会ナノ構造・エピタキシャル成長分科会 第7回窒化物半導体結晶成長講演会
    • Place of Presentation
      東北大学片平さくらホール(宮城県仙台市)
    • Year and Date
      2015-05-07 – 2015-05-08
    • Related Report
      2014 Research-status Report
  • [Presentation] Polarity control of MOVPE-grown GaN on AlN/GaN templates2015

    • Author(s)
      J. Yoo, K. Shojiki, T. Tanikawa, S. Kuboya, T. Hanada, R. Katayama and T. Matsuoka
    • Organizer
      日本結晶成長学会ナノ構造・エピタキシャル成長分科会 第7回窒化物半導体結晶成長講演会
    • Place of Presentation
      東北大学片平さくらホール(宮城県仙台市)
    • Year and Date
      2015-05-07 – 2015-05-08
    • Related Report
      2014 Research-status Report
  • [Presentation] Polarity control of MOVPE-grown GaN on AlN/GaN templates2015

    • Author(s)
      J. Yoo, K. Shojiki, T. Tanikawa, S. Kuboya, T. Hanada, R. Katayama and T. Matsuoka
    • Organizer
      日本結晶成長学会 ナノ構造エピタキシャル成長分科会 第7回 窒化物半導体研究会
    • Place of Presentation
      東北大学 片平さくらホール、宮城県仙台市
    • Year and Date
      2015-05-07
    • Related Report
      2015 Research-status Report
  • [Presentation] 横型疑似位相整合AlN導波路を用いた深紫外第二高調波発生素子の設計2015

    • Author(s)
      三谷 悠貴,片山 竜二,劉 陳燁,正直 花奈子,谷川 智之,窪谷 茂幸,松岡 隆志
    • Organizer
      日本結晶成長学会 ナノ構造エピタキシャル成長分科会 第7回 窒化物半導体研究会
    • Place of Presentation
      東北大学 片平さくらホール、宮城県仙台市
    • Year and Date
      2015-05-07
    • Related Report
      2015 Research-status Report
  • [Presentation] MOVPE Growth of GaN onto PLD-Grown AlN Interlayer on GaN Templates2015

    • Author(s)
      J. Yoo, K. Shojiki, T. Tanikawa, S. Kuboya, T. Hanada, R. Katayama and T. Matsuoka
    • Organizer
      The 3rd International Conference on Light-Emitting Devices and Their Industrial Applications (LEDIA ’15)
    • Place of Presentation
      Pacifico Yokohama, Kanagawa, Japan
    • Year and Date
      2015-04-22 – 2015-04-23
    • Related Report
      2014 Research-status Report
  • [Presentation] Accurate Determination of Modal Dispersion in Nonlinear Optical TiOx/GaN Waveguide by Spectroscopic m-line Technique2014

    • Author(s)
      R. Katayama, N. Yoshinogawa, K. Shojiki, T. Tanikawa, S. Kuboya and T. Matsuoka
    • Organizer
      International Workshop on Nitride Semiconductors (IWN2014)
    • Place of Presentation
      Wrocław Congress Center, Wroclaw, Poland
    • Year and Date
      2014-08-24 – 2014-08-29
    • Related Report
      2014 Research-status Report
  • [Presentation] Investigation of Modal Dispersion in Nonlinear Optical TiOx/GaN Waveguide by m-line Spectroscopy2014

    • Author(s)
      N. Yoshinogawa, R. Katayama, K. Shojiki, T. Tanikawa, S. Kuboya and T. Matsuoka
    • Organizer
      The 33rd Electronic Materials Symposium
    • Place of Presentation
      La-Foret Shuzenji, Shizuoka, Japan
    • Year and Date
      2014-07-09 – 2014-07-11
    • Related Report
      2014 Research-status Report

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Published: 2014-04-04   Modified: 2018-03-22  

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