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Restoration of negative electron affinity feature on high-quality diamond surfaces using liquid process

Research Project

Project/Area Number 26600085
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Crystal engineering
Research InstitutionOsaka University

Principal Investigator

Ito Toshimichi  大阪大学, 工学(系)研究科(研究院), 教授 (00183004)

Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2015: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2014: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
KeywordsCVDダイヤモンド / マイクロ波プラズマCVD / 液中プロセス / 負性電子親和力 / 超音波 / キャビテーション / マイクロ波プラズマ / 多結晶ダイヤモンド
Outline of Final Research Achievements

In order to develop a conventional process to restore negative electron affinity (NEA) features for which electrons can be easily emitted from the solid surface, a high-quality microwave-plasma CVD diamond having a NEA surface that was converted to a positive electron affinity has been treated suitably with ultrasonic vibrations in a special solution, leading to the fact that its NEA feature can be restored partially. Then, a possible semi-quantitative characterization method of the diamond NEA feature has been proposed that is based on an quantitative analysis of local secondary electron signal intensity measured with a conventional scanning electron microscope. However, both improvement of the controllability and clarification of the mechanism of the concerned NEA restoration process have been put to a future study.

Report

(3 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • Research Products

    (1 results)

All Other

All Remarks (1 results)

  • [Remarks] 伊藤研究室@大阪大学 電気電子情報工学専攻 (Ito Laboratory)

    • URL

      http://daiyan.eei.eng.osaka-u.ac.jp

    • Related Report
      2015 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2017-05-10  

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