| Project/Area Number |
26600094
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Nagaoka University of Technology |
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Principal Investigator |
YASUI KANJI 長岡技術科学大学, 工学(系)研究科(研究院), 教授 (70126481)
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| Co-Investigator(Renkei-kenkyūsha) |
TAMAYAMA YASUHIRO 長岡技術科学大学, 工学部, 助教 (50707312)
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| Project Period (FY) |
2014-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2015: ¥390,000 (Direct Cost: ¥300,000、Indirect Cost: ¥90,000)
Fiscal Year 2014: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
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| Keywords | 触媒反応 / ラバールノズル / 高エネルギー水分子 / 圧力センサー |
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| Outline of Final Research Achievements |
In order to establish a new CVD method using a high-energy H2O beam generated by a catalytic reaction, the H2O beam condition and the structure of de Laval nozzle was analyzed. The following results were obtained. 1. The scaling parameters of the H2O beams were below 200 irrespective of the divergent aperture angle of the de Laval nozzle. The mean cluster sizes in the H2O beam effused from the nozzles was estimated to be less than one, indicating that H2O clusters were not formed in the H2O beam generated by the nozzles. 2. ZnO films grown on a-plane sapphire substrates using the nozzles with various divergent aperture angles exhibited excellent crystal orientation along c-axis and large electron mobility irrespective of the divergent aperture angle. 3. Although dependence of the H2O beam pressure on the divergent aperture angle was measured using a capacitive-coupled pressure sensor, the kinetic energy of the H2O molecules evaluated from the pressure measured was small by two order.
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