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Significant improvement in performance of liquid-environment atomic force microscopy by silicon nitride membrane

Research Project

Project/Area Number 26600095
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionKanazawa University

Principal Investigator

Fukuma Takeshi  金沢大学, 電子情報学系, 教授 (90452094)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Keywords原子間力顕微鏡 / 窒化シリコンメンブレン / シールド機構 / 液中原子分解能観察 / 力検出器 / チタンシールド / ガラスプローブ
Outline of Final Research Achievements

We have developed atomic force microscope (AFM) with a shielding mechanism and improved its stability and force resolution. We fabricated a small hole in a silicon nitride membrane that was originally designed for electron microscopy by focused ion beam. By inserting a probe into liquid through this hole, we enabled to immerse only the tip apex into liquid. To avoid the contact between the cantilever and the membrane, we used a thin quartz probe glued on the cantilever and fabricated an electron beam deposited tip on the probe apex. With these efforts, we enabled atomic-resolution imaging in liquid by immersing only the tip apex into liquid and improved the force resolution by ~3 times. The developed mechanism is useful for improving the stability in the measurements of gas-generating samples and the quantitative capability of the potential measurements.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (19 results)

All 2017 2016 2015 Other

All Int'l Joint Research (2 results) Journal Article (1 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 1 results) Presentation (12 results) (of which Int'l Joint Research: 1 results,  Invited: 10 results) Remarks (3 results) Patent(Industrial Property Rights) (1 results)

  • [Int'l Joint Research] Aalto University(Finland)

    • Related Report
      2016 Annual Research Report
  • [Int'l Joint Research] Curtin University(オーストラリア)

    • Related Report
      2016 Annual Research Report
  • [Journal Article] Understanding 2D atomic resolution imaging of the calcite surface in water by frequency modulation atomic force microscopy2016

    • Author(s)
      J. Tracey, K. Miyazawa, P. Spijker, K. Miyata, B. Reischl, F. F. Canova, A. L. Rohl, T. Fukuma, A. S. Foster
    • Journal Title

      Nanotechnology

      Volume: 27 Issue: 41 Pages: 415709-415709

    • DOI

      10.1088/0957-4484/27/41/415709

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] 高分解能AFMを用いた3次元水和・揺動構造計測技術の進展2017

    • Author(s)
      福間剛士
    • Organizer
      第3回「水シグナリングの分子動態から病態へ」研究会
    • Place of Presentation
      アオッサ福井(福井)
    • Year and Date
      2017-03-07
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 液中原子間力顕微鏡の新技術開発と固液界面計測への応用2017

    • Author(s)
      福間剛士
    • Organizer
      第41回日本顕微鏡学会関東支部講演会
    • Place of Presentation
      産業総合研究所臨界副都心センター(東京)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 液中原子間力顕微鏡による固液界面計測技術の進展2017

    • Author(s)
      福間剛士
    • Organizer
      第6回生体界面研究会
    • Place of Presentation
      金沢大学(金沢)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 周波数変調AFMによる固液界面での水和と分子吸着構造解析2017

    • Author(s)
      福間剛士
    • Organizer
      極限ナノ造形・構造物性研究会2017年第1回研究会
    • Place of Presentation
      東北大学東京分室(東京)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 液中原子間力顕微鏡を用いた原子・分子スケール固液界面計測2016

    • Author(s)
      福間剛士
    • Organizer
      第18回関西表面技術フォーラム
    • Place of Presentation
      甲南大学(神戸)
    • Year and Date
      2016-11-17
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 液中AFMの新技術開発と産学連携研究への応用展開2016

    • Author(s)
      福間剛士
    • Organizer
      日本顕微鏡学会走査型プローブ顕微鏡分科会研究会
    • Place of Presentation
      湯沢ニューオータニホテル(越後湯沢)
    • Year and Date
      2016-11-13
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 原子スケール液中AFM技術の現状と今後の展望2016

    • Author(s)
      福間剛士
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 周波数変調原子間力顕微鏡を用いたサブナノスケール水和構造解析2016

    • Author(s)
      福間剛士
    • Organizer
      日本表面科学会関東支部第5回関東支部セミナー「表面・界面の水が拓くものづくりの未来」
    • Place of Presentation
      東京大学(東京)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Recent Advancement and Future Prospects in FM-AFM Instrumentation for Liquid-Environment Applications2016

    • Author(s)
      T. Fukuma
    • Organizer
      Japan-Finland Research Exchange Meeting:Experiments and Theory of Liquid-Environment Scanning Probe Microscopy
    • Place of Presentation
      金沢大学(金沢)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Recent Developments in Liquid-Environment frequency modulation AFM2016

    • Author(s)
      T. Fukuma, H. Asakawa, K. Miyata, N. Inada, K. Miyazawa
    • Organizer
      Symposiun Solid-Liquid Interfaces
    • Place of Presentation
      Madrid(スペイン)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 薄膜シールドを備えた液中原子間力顕微鏡の開発2015

    • Author(s)
      山村俊貴、宮澤佳甫、坂井友樹、淺川雅、福間剛士
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] Atomic-scale Investigation of Brookite TiO2 Nanocrystals by FM-AFM in Liquid2015

    • Author(s)
      H. Asakawa, T. Yamamura, T. Ohno and T. Fukuma
    • Organizer
      18th International Conference on non-contact Atomic Force Microscopy (NC-AFM2015)
    • Place of Presentation
      Cassis, France
    • Year and Date
      2015-09-07
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Remarks] 福間研究室ホームページ

    • URL

      http://fukuma.w3.kanazawa-u.ac.jp/

    • Related Report
      2016 Annual Research Report
  • [Remarks] 金沢大学福間研究室ホームページ

    • URL

      http://fukuma.w3.kanazawa-u.ac.jp/frame.html

    • Related Report
      2015 Research-status Report
  • [Remarks] 金沢大学福間研究室ホームページ

    • URL

      http://fukuma.w3.kanazawa-u.ac.jp

    • Related Report
      2014 Research-status Report
  • [Patent(Industrial Property Rights)] 液中原子間力顕微鏡2015

    • Inventor(s)
      福間剛士、宮澤佳甫
    • Industrial Property Rights Holder
      金沢大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-169504
    • Filing Date
      2015-08-27
    • Related Report
      2015 Research-status Report

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Published: 2014-04-04   Modified: 2022-02-16  

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