Significant improvement in performance of liquid-environment atomic force microscopy by silicon nitride membrane
| Project/Area Number |
26600095
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Kanazawa University |
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Principal Investigator |
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
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| Keywords | 原子間力顕微鏡 / 窒化シリコンメンブレン / シールド機構 / 液中原子分解能観察 / 力検出器 / チタンシールド / ガラスプローブ |
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| Outline of Final Research Achievements |
We have developed atomic force microscope (AFM) with a shielding mechanism and improved its stability and force resolution. We fabricated a small hole in a silicon nitride membrane that was originally designed for electron microscopy by focused ion beam. By inserting a probe into liquid through this hole, we enabled to immerse only the tip apex into liquid. To avoid the contact between the cantilever and the membrane, we used a thin quartz probe glued on the cantilever and fabricated an electron beam deposited tip on the probe apex. With these efforts, we enabled atomic-resolution imaging in liquid by immersing only the tip apex into liquid and improved the force resolution by ~3 times. The developed mechanism is useful for improving the stability in the measurements of gas-generating samples and the quantitative capability of the potential measurements.
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Report
(4 results)
Research Products
(19 results)
