Basic study for development of inch-scale diamond wafers
| Project/Area Number |
26600096
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Kanazawa University |
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Principal Investigator |
Tokuda Norio 金沢大学, 電子情報学系, 准教授 (80462860)
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| Research Collaborator |
ITO Shinya
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2014: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
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| Keywords | ダイヤモンド / 結晶成長 |
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| Outline of Final Research Achievements |
The purpose of this study has been to develop the fundamental technologies about a large-area and low-cost fabrication of diamond wafers for the realization of next-generation diamond power devises. We report that freestanding diamond films were fabricated by a new self-separation method. Thick poly-crystalline diamond films were grown on poly-crystalline Ni substrates by microwave plasma-enhanced chemical vapor deposition after the substrates were saturated with carbon via a saturation process using a carbon solid solution. This saturation process suppressed the erosion of diamond nuclei on the Ni substrates. During the cooling process after diamond growth, the carbon atoms dissolved in the Ni substrates became supersaturated and precipitated as graphite interlayers at the diamond films/Ni interfaces. The graphite interlayers caused the thick diamond films to spontaneously separate from the Ni substrates without cracking, allowing the Ni substrates to be reused.
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Report
(4 results)
Research Products
(18 results)
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[Presentation] CVD単結晶ダイヤモンド(100)自立基板の開発2014
Author(s)
渡邊 俊介, 森本 隆介, 金田 大輝,徳田 規夫,加藤 宙光， 梅沢 仁，山崎 聡, 有屋田 修，猪熊 孝夫
Organizer
平成26年度 応用物理学会 北陸・信越支部 学術講演会
Place of Presentation
富山大学
Year and Date
2014-11-07 – 2014-11-08
Related Report
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