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Creation of three-dimensional mechanical elements by controlling anisotropic nanostructures of thin films

Research Project

Project/Area Number 26630012
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Materials/Mechanics of materials
Research InstitutionOsaka University

Principal Investigator

Hirakata Hiroyuki  大阪大学, 工学(系)研究科(研究院), 准教授 (40362454)

Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2015: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2014: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywordsマイクロ・ナノ材料力学 / ナノマイクロ材料力学 / ナノ構造 / 薄膜
Outline of Final Research Achievements

Titanium and copper nanoporous films with anisotropic internal structures were fabricated by glancing angle deposition. The nanoporous films consisted of oblique nanocolumns connected to each other, and the film internal structures were relatively discrete in the column-tilt direction and continuous in the transverse direction. Removing of the substrate induced the bending of film due to internal stress only in the column tilt direction irrespective of the two-dimensional film shape, indicating that the bending direction could be controlled by adding the structural anisotropy. In addition, the nanoporous films had high tensile and creep strengths which were similar to those of solid film counterparts. Thus, this technique enabled the creation of three-dimensional mechanical elements such as coil springs made of high strength nanoporous films.

Report

(3 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • Research Products

    (3 results)

All 2016 2015 Other

All Presentation (2 results) Remarks (1 results)

  • [Presentation] 斜め蒸着法により作製した銅ナノポーラス薄膜の引張およびクリープ特性2016

    • Author(s)
      藤原圭介, 近藤俊之, 平方寛之, 箕島弘二
    • Organizer
      日本機械学会関西支部第91期定時総会講演会
    • Place of Presentation
      大阪電気通信大学
    • Year and Date
      2016-03-12
    • Related Report
      2015 Annual Research Report
  • [Presentation] 斜め蒸着法による自立ナノ構造薄膜の作製と機械的特性評価2015

    • Author(s)
      藤原圭介, 近藤俊之, 平方寛之, 箕島弘二
    • Organizer
      日本材料学会「第1回材料WEEK」材料シンポジウ
    • Place of Presentation
      京都テルサ(京都市)
    • Year and Date
      2015-10-13
    • Related Report
      2015 Annual Research Report
  • [Remarks] 大阪大学大学院工学研究科機械工学専攻 箕島・平方研究室

    • URL

      http://www-micro.mech.eng.osaka-u.ac.jp/home.html

    • Related Report
      2014 Research-status Report

URL: 

Published: 2014-04-04   Modified: 2017-05-10  

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