• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

A study for sub-nanometer ultra-high precision measurement method of micro cutting edge of diamond tool

Research Project

Project/Area Number 26630015
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Production engineering/Processing studies
Research InstitutionTohoku University

Principal Investigator

Gao Wei  東北大学, 工学(系)研究科(研究院), 教授 (70270816)

Co-Investigator(Kenkyū-buntansha) SHIMIZU YUKI  東北大学, 大学院・工学研究科, 准教授 (70606384)
Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2015: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Keywordsナノ計測 / マイクロエッジ / AFM / 反転エッジ / MDシミュレーション / アクチュエータ / 圧力センサ / FTS / ダイヤモンド工具
Outline of Final Research Achievements

In this research, an ultra-precision form measurement has been verified for three dimensional measurement of micro-cutting edge of the diamond cutting tools. A reversal edge of the cutting edge, which is made by the indentation of the diamond cutting edge on the soft material, is created for the canceling of the measurement errors due to the AFM probe scanning. A force-sensor integrated fast tool servo (FS-FTS) was constructed for single point diamond micro-cutting and in-process measurement of both of the cutting force and tool displacement. By using the FS-FTS, the micrometric reversal edge of the cutting tool can be created during the measurement of the cutting force. Molecular dynamics (MD) simulations were introduced for the investigation and optimization of the creation of the reversal edge on the soft materials. The results of MD simulation indicated that 3D surface form of the diamond micro cutting edge could be obtained with sub-nanometric accuracy by using the reversal edge.

Report

(3 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • Research Products

    (15 results)

All 2015 2014 Other

All Journal Article (3 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 3 results,  Acknowledgement Compliant: 3 results) Presentation (10 results) (of which Int'l Joint Research: 5 results) Remarks (2 results)

  • [Journal Article] Self-evaluation of the cutting edge contour of a micro diamond tool with a force sensor integrated fast tool servo on an ultra-precision lathe. International2015

    • Author(s)
      Y.L. Chen, S. Wang, Y. Shimizu, S. Ito, W. Gao, B.F. Ju
    • Journal Title

      Journal of Advanced Manufacturing Technology

      Volume: 77 Issue: 9-12 Pages: 2257-2267

    • DOI

      10.1007/s00170-014-6580-2

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor2015

    • Author(s)
      Yuan-Liu Chen, Shu Wang, Yuki Shimizu, So Ito, Wei Gao, Bing-Feng Jub
    • Journal Title

      Precision Engineering

      Volume: 39 Pages: 134-142

    • DOI

      10.1016/j.precisioneng.2014.08.001

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] A measurement method of cutting tool position for relay fabrication of microstructured surface2014

    • Author(s)
      Yuan-Liu Chen, Wei Gao, Bing-Feng Ju, Yuki Shimizu, So Ito
    • Journal Title

      Measurement Science and Technology

      Volume: 25 Issue: 6 Pages: 064018-064018

    • DOI

      10.1088/0957-0233/25/6/064018

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] A New Fast Tool Servo with Integrated Functions for In-process Measurement and Fabrication of Microstructured Surfaces2015

    • Author(s)
      Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      The 11th China-Japan International Conference on Ultra-Precision Machining Process
    • Place of Presentation
      板橋区立グリーンホール,東京都板橋区
    • Year and Date
      2015-11-25
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Investigation of the deformation mechanism of a copper workpiece during nanoindentation by using molecular dynamics2015

    • Author(s)
      Yindi Cai, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      The 11st Chain-Japan International Conference on Ultra-Precision machining process
    • Place of Presentation
      板橋区立グリーンホール,東京都板橋区
    • Year and Date
      2015-11-25
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ductile cutting of a microstructure array on silicon surface by using a diamond tool with a negative rake angle2015

    • Author(s)
      Yuan-Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      The 8th International Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      京都リサーチパーク,京都府京都市
    • Year and Date
      2015-10-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Molecular dynamics simulation on nano-contact between a diamond cutting tool and a copper surface2015

    • Author(s)
      Yindi Cai, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao, Ying Chen
    • Organizer
      The 8th International Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      京都リサーチパーク,京都府京都市
    • Year and Date
      2015-10-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] On-machine edge contour measurement of a micro cutting tool by using a diamond edge artifact2015

    • Author(s)
      YuanLiu Chen, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      12th International Symposium on Measurement Technology and Intelligent Instruments
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2015-09-22 – 2015-09-25
    • Related Report
      2014 Research-status Report
  • [Presentation] On-machine edge contour measurement of a micro cutting tool by using a diamond edge artifact2015

    • Author(s)
      Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      The 12th International Symposium on Measurement Technology and Intelligent Instruments
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2015-09-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Detection and repair of micro defects in the process of diamond cutting of a microstructure array2015

    • Author(s)
      陳遠流,清水裕樹,伊東聡,高偉
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学,宮城県仙台市
    • Year and Date
      2015-09-04
    • Related Report
      2015 Annual Research Report
  • [Presentation] Molecular dynamics simulation on nanoindentation response of a copper workpiece2015

    • Author(s)
      蔡引テイ,陳遠流,清水裕樹,伊東聡,高偉
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学,宮城県仙台市
    • Year and Date
      2015-09-04
    • Related Report
      2015 Annual Research Report
  • [Presentation] Investigation of surface damages in contact and form measurement with a force sensor-integrated fast tool servo2015

    • Author(s)
      Y.D Cai, Y.L. Chen, S. Ito, Y. Shimizu, W. Gao
    • Organizer
      38th International MATADOR Conference
    • Place of Presentation
      Huwei, Taiwan
    • Year and Date
      2015-03-28 – 2015-03-30
    • Related Report
      2014 Research-status Report
  • [Presentation] Cutting tool positioning by utilizing a force sensor-integrated fast tool servo2014

    • Author(s)
      Shu Wang, Yuan-Liu Chen, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      International Conference on Positioning Technology
    • Place of Presentation
      北九州国際会議場,福岡県
    • Year and Date
      2014-11-18 – 2014-11-21
    • Related Report
      2014 Research-status Report
  • [Remarks] 東北大学大学院工学研究科ファインメカニクス専攻高・清水・伊東研究室

    • URL

      http://www.nano.mech.tohoku.ac.jp/

    • Related Report
      2015 Annual Research Report
  • [Remarks] 東北大学大学院工学研究科ナノメカニクス専攻 高・清水・伊東研究室

    • URL

      http://www.nano.mech.tohoku.ac.jp/index.html

    • Related Report
      2014 Research-status Report

URL: 

Published: 2014-04-04   Modified: 2017-05-10  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi