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Challenging exploratory research on super resolution measurement of nano defects for next-generation functional fine structures by controlling dynamic localized light distribution

Research Project

Project/Area Number 26630018
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

TAKAHASHI Satoru  東京大学, 先端科学技術研究センター, 教授 (30283724)

Co-Investigator(Kenkyū-buntansha) TAKAMASU Kiyoshi  東京大学, 大学院工学系研究科, 教授 (70154896)
Project Period (FY) 2014-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2014: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Keywords欠陥計測 / ナノ欠陥 / 光計測 / 超解像計測 / 加工計測 / 局在光 / 超解像
Outline of Final Research Achievements

We proposed the novel high resolution optical measurement, which can be applied to the inspection for nano-scale functional structures such as semiconductor patterns, micro mechanical functional devices. With the proposed method, super optical resolution beyond the diffraction limit can be expected by analyzing the multiple far-field optical images detected by scanning the Gaussian beam spot with a nano-scale shift. Both theoretical and experimental analyses verified the validity of the fundamental core concept that the proposed method can perform a super resolution inspection for fine structures beyond the diffraction limit.

Report

(2 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • Research Products

    (11 results)

All 2015 2014 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 2 results,  Acknowledgement Compliant: 2 results) Presentation (8 results) (of which Invited: 2 results) Remarks (1 results)

  • [Journal Article] A novel dark field in-process optical inspection method for micro-openings on mirrored surfaces beyond the diffraction limit using active phase control2014

    • Author(s)
      S. Takahashi, H. Yokozeki, D. Fujii, R. Kudo, K. Takamasu
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: 63 Issue: 1 Pages: 465-468

    • DOI

      10.1016/j.cirp.2014.03.035

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Lateral resolution improvement of laser-scanning imaging for nano defects detection2014

    • Author(s)
      Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
    • Journal Title

      Advanced Optical Technologies

      Volume: 3(4) Issue: 4 Pages: 425-433

    • DOI

      10.1515/aot-2014-0030

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] Challenge of Spatial Resolution Improvement of Optical Measurement Method Based on Localized Light Energy2015

    • Author(s)
      S. Takahashi
    • Organizer
      12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2015-09-22 – 2015-09-25
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] スポット重複移動情報を用いた光学式超解像検査法の開発2015

    • Author(s)
      金成碩,久米大将,横関宏樹,高橋哲,高増潔
    • Organizer
      日本機械学会2015年度年次大会
    • Place of Presentation
      北海道
    • Year and Date
      2015-09-13 – 2015-09-16
    • Related Report
      2014 Annual Research Report
  • [Presentation] スポット照明の重複シフトによる光学式超解像検査法(第5報) -離散的サンプルを用いた提案超解像原理の実験的検証-2015

    • Author(s)
      横関宏樹,久米大将,高橋哲,高増潔
    • Organizer
      2015年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2015-03-17 – 2015-03-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第19 報) -3 光束干渉定在波照明の自動生成法の検討-2015

    • Author(s)
      久米大将,横関宏樹,高橋哲,高増潔
    • Organizer
      2015年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2015-03-17 – 2015-03-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] 蛍光修飾を要さない回折限界超越観察技術の開発2015

    • Author(s)
      高橋哲
    • Organizer
      応用物理学会/第135回微小光学研究会
    • Place of Presentation
      東京
    • Year and Date
      2015-03-05
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 微細加工構造の超回折限界光学式計測法の開発2014

    • Author(s)
      久米大将,横関宏樹,工藤良太,高橋哲,高増潔
    • Organizer
      日本機械学会 第10回生産加工・工作機械部門講演会
    • Place of Presentation
      徳島
    • Year and Date
      2014-11-15 – 2014-11-16
    • Related Report
      2014 Annual Research Report
  • [Presentation] スポット照明の重複シフトによる光学式超解像検査法(第4報)-スポット照明超解像型基礎実験装置の基本的機能検証-2014

    • Author(s)
      横関宏樹,工藤良太,高橋哲,高増潔
    • Organizer
      2014年度精密工学会秋季大会学術講演会
    • Place of Presentation
      鳥取
    • Year and Date
      2014-09-16 – 2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査(第18報)-コヒーレント結像逐次再構成型超解像による二次元超解像法のシミュレーションによる検討-2014

    • Author(s)
      工藤良太,高橋哲,高増潔
    • Organizer
      2014年度精密工学会秋季大会学術講演会
    • Place of Presentation
      鳥取
    • Year and Date
      2014-09-16 – 2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Remarks] 東京大学 先端科学技術研究センター 高橋研究室

    • URL

      http://www.photon.rcast.u-tokyo.ac.jp/

    • Related Report
      2014 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2016-06-03  

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