| Project/Area Number |
26630018
|
|---|
| Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Production engineering/Processing studies
|
|---|
| Research Institution | The University of Tokyo |
|---|
Principal Investigator |
TAKAHASHI Satoru 東京大学, 先端科学技術研究センター, 教授 (30283724)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
TAKAMASU Kiyoshi 東京大学, 大学院工学系研究科, 教授 (70154896)
|
|---|
| Project Period (FY) |
2014-04-01 – 2015-03-31
|
| Project Status |
Completed (Fiscal Year 2014)
|
| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2014: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
|
|---|
| Keywords | 欠陥計測 / ナノ欠陥 / 光計測 / 超解像計測 / 加工計測 / 局在光 / 超解像 |
|---|
| Outline of Final Research Achievements |
We proposed the novel high resolution optical measurement, which can be applied to the inspection for nano-scale functional structures such as semiconductor patterns, micro mechanical functional devices. With the proposed method, super optical resolution beyond the diffraction limit can be expected by analyzing the multiple far-field optical images detected by scanning the Gaussian beam spot with a nano-scale shift. Both theoretical and experimental analyses verified the validity of the fundamental core concept that the proposed method can perform a super resolution inspection for fine structures beyond the diffraction limit.
|
