Challenging exploratory research on super resolution measurement of nano defects for next-generation functional fine structures by controlling dynamic localized light distribution
| Project/Area Number |
26630018
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The University of Tokyo |
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Principal Investigator |
TAKAHASHI Satoru 東京大学, 先端科学技術研究センター, 教授 (30283724)
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| Co-Investigator(Kenkyū-buntansha) |
TAKAMASU Kiyoshi 東京大学, 大学院工学系研究科, 教授 (70154896)
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| Project Period (FY) |
2014-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2014: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
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| Keywords | 欠陥計測 / ナノ欠陥 / 光計測 / 超解像計測 / 加工計測 / 局在光 / 超解像 |
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| Outline of Final Research Achievements |
We proposed the novel high resolution optical measurement, which can be applied to the inspection for nano-scale functional structures such as semiconductor patterns, micro mechanical functional devices. With the proposed method, super optical resolution beyond the diffraction limit can be expected by analyzing the multiple far-field optical images detected by scanning the Gaussian beam spot with a nano-scale shift. Both theoretical and experimental analyses verified the validity of the fundamental core concept that the proposed method can perform a super resolution inspection for fine structures beyond the diffraction limit.
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Report
(2 results)
Research Products
(11 results)
