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Raman spectrum analysis for measuring temperature and material property on the nano-machined surface by short pulse laser

Research Project

Project/Area Number 26630027
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Production engineering/Processing studies
Research InstitutionOsaka University

Principal Investigator

Takaya Yasuhiro  大阪大学, 工学(系)研究科(研究院), 教授 (70243178)

Co-Investigator(Kenkyū-buntansha) Michihata Masaki  大阪大学, 大学院工学研究科, 助教 (70588855)
Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords超短パルスレーザー加工 / ラマン散乱計測 / ナノ微細加工 / ナノ粒子 / ナノ局所界面 / 局在型表面プラズモン / 伝搬型表面プラズモン / 超微細レーザー加工計測 / レーザーアブレーション / 電子増強ラマン散乱効果
Outline of Final Research Achievements

As a basis of the Raman analysis in the nano-interfacial area based on Electron Enhanced Raman Scattering (EERS) for in-situ analysis of the material removal mechanism by ultra-short pulse laser light, the measurement technique of localized and propagating surface plasmon enhanced Raman scattering (SERS) in chemical interaction between copper and fullerenol that is used as nano-particles for inducing EERS were investigated. The SERS analysis of copper-bypyridine-fullerenol reaction system was conducted to check the feasibility of time series measurements of both forward and back Raman scattering using the constructed measurement system. The propagating and localized SERS changing with the copper surface condition in the progress of chemical process could be detected simultaneously. The measuring results suggest the possibility to establish the in-situ surface analysis method in the nano-interfacial area based on the simultaneous measurement of the forward and back Raman scattering.

Report

(3 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • Research Products

    (3 results)

All 2016 2015

All Presentation (3 results) (of which Int'l Joint Research: 1 results)

  • [Presentation] 表面増強ラマン分光法による反応性ナノ粒子を用いたCu-CMPの化学的研磨作用分析2016

    • Author(s)
      旭真史,高谷裕浩,水谷康弘
    • Organizer
      2016年度精密工学会学術講演会春季大会
    • Place of Presentation
      東京理科大学 野田キャンパス(千葉県・野田市)
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] Analysis of chemical reaction in Cu-CMP with reactive nanoparticles based on Raman spectra enhanced by surface plasmon2015

    • Author(s)
      Masafumi ASAHI, Yasuhiro TAKAYA, Masaki MICHIHATA
    • Organizer
      Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      京都リサーチパーク (京都府・京都市)
    • Year and Date
      2015-10-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 表面増強ラマン分光法による水酸化フラーレンを用いたCu-CMPの化学反応プロセス解析―表面増強ラマン分光装置の検証―2015

    • Author(s)
      旭真史,高谷裕浩,水谷康弘
    • Organizer
      2015年度砥粒加工学会学術講演会
    • Place of Presentation
      慶応大学(神奈川県・横浜市)
    • Year and Date
      2015-09-09
    • Related Report
      2015 Annual Research Report

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Published: 2014-04-04   Modified: 2017-05-10  

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