A STUDY OF TUNNEL ELECTRON INJECTION LIGHT-EMITTING DEVICES WITH A TWO-DIMENSIONAL QUANTUM STRUCTURE OF ULTRATHIN SILICON/SILICON DIOXIDE

• Project/Area Number: 26630130
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Electronic materials/Electric materials
• Research Institution: Osaka University
• Principal Investigator: MORITA Mizuho 大阪大学, 工学研究科, 教授 (50157905)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
• Keywords: シリコン / シリコン酸化膜 / 発光デバイス / 量子井戸 / トンネル効果

Outline of Final Research Achievements

An electroluminescence peak at the increasing energy with decreasing silicon layer thickness has been observed in indium tin oxide/ultrathin silicon dioxide film/ultrathin silicon layer/buried silicon dioxide devices. This indicates that the peak is due to quantum confinement effects in a two-dimensional structure. A thinning method to improve the thickness uniformity of an ultrathin silicon layer in a defined area by photoetching with N-fluoropyridinium salts using a system with a projector and reduction optics has been developed.

Research Products

• [Journal Article] Electroluminescence in metal-oxide-semiconductor tunnel diodes with a crystalline silicon/silicon dioxide quantum well (2022)
  • Author(s): Yuki Miyata, Yasunori Nakamukai, Cassia Tiemi Azevedo, Ayano Tsuchida, Miho Morita, Yasushi Oshikane, Junichi Uchikoshi, Kentaro Kawai, Kenta Arima, Mizuho Morita
  • Journal Title: Micro and Nanostructures Volume: 166 Pages: 207228-207228
  • DOI: 10.1016/j.micrna.2022.207228
  • Peer Reviewed
• [Journal Article] Photoetching method that provides improved silicon-on-insulator layer thickness uniformity in a defined area (2017)
  • Author(s): Yuki Miyata, Yasunori Nakamukai, Cassia Tiemi Azevedo, Miho Morita, Junichi Uchikoshi, Kentaro Kawai, Kenta Arima, Mizuho Morita
  • Journal Title: Microelectronic Engineering Volume: 印刷中
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Presentation] Photoluminescence in Si/SO2 Single Quantum Wells (2015)
  • Author(s): Cassia Azevedo, Yuki Miyata, Yasunori Nakamukai, Yasushi Oshikane, Kentaro Kawai, Kenta Arima, Mizuho Morita
  • Organizer: 応用物理学会
  • Place of Presentation: 名古屋国際会議場（愛知県名古屋市）
  • Year and Date: 2015-09-13
• [Presentation] 光エッチングによる均一層厚を有する極薄SOIの形成 (2015)
  • Author(s): 宮田 優希、中向 保徳、Cassia Tiemi Azevedo、押鐘 寧、川合 健太郎、有馬 健太、森田 瑞穂
  • Organizer: 応用物理学会
  • Place of Presentation: 東海大学 湘南キャンパス（神奈川県平塚市）
  • Year and Date: 2015-03-14
• [Remarks] 大阪大学工学研究科先端機器システム領域ホームページ
  • URL: http://www-pm.prec.eng.osaka-u.ac.jp