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Development for High-Performance Tunnel Transistors with Direct-Transition Band Structure of Ge

Research Project

Project/Area Number 26630133
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Electronic materials/Electric materials
Research InstitutionKyushu University

Principal Investigator

SADOH Taizoh  九州大学, システム情報科学研究科(研究院, 准教授 (20274491)

Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2015: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2014: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywords電子・電気材料 / 半導体 / Si系ヘテロ材料 / 集積回路 / 結晶成長 / トランジスタ
Outline of Final Research Achievements

High-performance tunnel transistors are required to realize large-scale integrated circuits (LSIs) with low-power consumption. However, on-current of the conventional Si tunnel transistors is low, though off-current can be decreased. In the present study, to achieve high-performance tunnel transistors, techniques for strain-introduction have been developed to obtain direct-transition band structures of Ge. In addition, a technique for high-concentration doping into Ge has been investigated. These techniques will facilitate formation of high-performance tunnel transistors with high on-current.

Report

(3 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • Research Products

    (23 results)

All 2016 2015 2014

All Journal Article (10 results) (of which Peer Reviewed: 10 results,  Open Access: 2 results,  Acknowledgement Compliant: 10 results) Presentation (13 results) (of which Int'l Joint Research: 9 results,  Invited: 2 results)

  • [Journal Article] Quasi-single crystal SiGe on insulator by Au-induced crystallization for flexible electronics2016

    • Author(s)
      T. Sadoh, Jong-Hyeok Park, R. Aoki, and M. Miyao
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 3S1 Pages: 03CB01-03CB01

    • DOI

      10.7567/jjap.55.03cb01

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Low-Temperature Formation of Large-Grain (≧10μm) Ge at Controlled-Position on Insulator by Gold-Induced Crystallization Combined with Diffusion-Barrier Patterning2016

    • Author(s)
      R. Aoki, Jong-Hyeok Park, M. Miyao, and T. Sadoh
    • Journal Title

      ECS Journal of Solid State Science and Technology

      Volume: 5 Issue: 3 Pages: P179-P182

    • DOI

      10.1149/2.0161603jss

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Low-temperature (≦300℃) formation of orientation-controlled large-grain (≧10μm) Ge-rich SiGe on insulator by gold-induced crystallization2016

    • Author(s)
      T. Sadoh, J.-H. Park, R. Aoki, M.Miyao
    • Journal Title

      Thin Solid Films

      Volume: 602 Pages: 3-6

    • DOI

      10.1016/j.tsf.2015.10.057

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] High Sn-concentration (~8%) GeSn by low-temperature (~150 °C) solid-phase epitaxy of a-GeSn/c-Ge2016

    • Author(s)
      T. Sadoh , A. Ooato, J.-H. Parkb, M. Miyao
    • Journal Title

      Thin Solid Films

      Volume: 602 Pages: 20-23

    • DOI

      10.1016/j.tsf.2015.09.069

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] High quality, giant crystalline-Ge stripes on insulating substrate by rapid-thermal-annealing of Sn-doped amorphous-Ge in solid-liquid coexisting region2015

    • Author(s)
      R. Matsumura, Y. Kai, H. Chikita, T. Sadoh, and M. Miyao
    • Journal Title

      AIP Advances

      Volume: 5 Issue: 6

    • DOI

      10.1063/1.4922266

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Ultra-low temperature (≤300 °C) growth of Ge-rich SiGe by solid-liquid-coexisting annealing of -GeSn/c-Si structures2015

    • Author(s)
      T. Sadoh, H. Chikita, R. Matsumura and M. Miyao
    • Journal Title

      Journal of Applied Physics

      Volume: 118 Issue: 9

    • DOI

      10.1063/1.4929878

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Seeding Effects of Sn/a-Ge Island Structures for Low-Temperature Lateral-Growth of a-GeSn on Insulator2015

    • Author(s)
      Y. Kai, H. Chikita, R. Matsumura, T. Sadoh and M. Miyao
    • Journal Title

      ECS Journal of Solid State Science and Technology

      Volume: 5 Issue: 2 Pages: 76-79

    • DOI

      10.1149/2.0241602jss

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Low-temperature (~180 ℃) position-controlled lateral solid-phase crystallization of GeSn with laser-anneal seeding2015

    • Author(s)
      R. Matsumura, H. Chikita, Y. Kai, T. Sadoh, H. Ikenoue, and M. Miyao
    • Journal Title

      Applied Physics Letters

      Volume: 107 Issue: 26

    • DOI

      10.1063/1.4939109

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] High carrier mobility in orientation-controlled large-grain (~50 μm) Ge directly formed on flexible plastic by nucleation-controlled gold-induced-crystallization2014

    • Author(s)
      J.-H. Park, K. Kasahara, K. Hamaya, M. Miyao, and T. Sadoh
    • Journal Title

      Applied Physics Letters

      Volume: 104 Issue: 25

    • DOI

      10.1063/1.4885716

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Comprehensive study of Al-induced layer-exchange growth for orientation-controlled Si crystals on SiO2 substrates2014

    • Author(s)
      M. Kurosawa, T. Sadoh, and M. Miyao
    • Journal Title

      Journal of Applied Physics

      Volume: 116 Issue: 17

    • DOI

      10.1063/1.4901262

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Effects of Diffusion-Barrier-Patterning on Formation of Position-Controlled Ge-on- Insulator by Gold-Induced Crystallization at Low Temperatures (≦300℃)2015

    • Author(s)
      R. Aoki, J-H Park, M. Miyao, and T. Sadoh
    • Organizer
      2015 International Electron Devices and Materials Symposium
    • Place of Presentation
      Tainan
    • Year and Date
      2015-11-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Gold-induced low-temperature (≦300℃) growth of quasi-single crystal SiGe on insulator for advanced flexible electronics2015

    • Author(s)
      T. Sadoh, J.-H. Park, R. Aoki, M. Miyao
    • Organizer
      The 228th ECS Meeting
    • Place of Presentation
      Phoenix
    • Year and Date
      2015-10-11
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Low-Temperature (~150°C) Solid-Phase Epitaxy of a-GeSn/c-Ge for High Non-Equilibrium Substitutional Sn-Concentration GeSn2015

    • Author(s)
      T. Sadoh, A. Ooato, J.-H. Park, and M. Miyao
    • Organizer
      International Conference on Solid State Devices and Materials 2015
    • Place of Presentation
      Sapporo
    • Year and Date
      2015-09-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High Sn-Concentration (~8%) GeSn by Low-Temperature (~150°C) Solid-Phase Epitaxy of a-GeSn/c-Ge2015

    • Author(s)
      T. Sadoh, A. Ooato, J.-H. Park, and M. Miyao
    • Organizer
      the 9th International Conference on Silicon Epitaxy and Heterostructures
    • Place of Presentation
      Motreal
    • Year and Date
      2015-05-17
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Low-Temperature (≦300℃) Formation of Orientation-Controlled Large-Grain (≧10μm) Ge-Rich SiGe on Insulator by Gold-Induced Crystallization2015

    • Author(s)
      T. Sadoh, J.-H. Park, R. Aoki, and M. Miyao
    • Organizer
      the 9th International Conference on Silicon Epitaxy and Heterostructures
    • Place of Presentation
      Montreal
    • Year and Date
      2015-05-17
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Large Single-Crystal Ge-on-Insulator by Thermally-Assisted Si-Seeded-Pulse-Laser Annealing (≦400℃)2015

    • Author(s)
      T. Sadoh, M. Kurosawa, A. Heya, N. Matsuo, and M. Miyao
    • Organizer
      the 9th International Conference on Silicon Epitaxy and Heterostructures
    • Place of Presentation
      Montreal
    • Year and Date
      2015-05-17
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Quasi-Single Crystal SiGe on Insulator by Au-Induced Crystallization for Flexible Electronics2015

    • Author(s)
      T. Sadoh, J-H Park, R. Aoki, and M. Miyao
    • Organizer
      The 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices
    • Place of Presentation
      Kyoto
    • Year and Date
      2015-05-17
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sn-precipitation-suppressed solid-phase epitaxy of GeSn on Ge at low-temperatures (~150°C)2015

    • Author(s)
      T. Sadoh, A. Ooato, J. -H. ParkH. M. Miyao
    • Organizer
      The 11th International Nanotechnology Conference on Communication and Cooperation
    • Place of Presentation
      Fukuoka
    • Year and Date
      2015-05-12
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Orientation-controlled large-grain SiGe on insulator by gold-induced crystallization at low-temperature for flexible opto-electronics2015

    • Author(s)
      T. Sadoh, J.-H. Park R. Aoki, M. Miyao
    • Organizer
      The 11th International Nanotechnology Conference on Communication and Cooperation
    • Place of Presentation
      Fukuoka
    • Year and Date
      2015-05-12
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Low-Temperature Gold-Induced Crystallization of Orientation Controlled Sige on Plastic for Flexible Electronics2014

    • Author(s)
      T. Sadoh and M. Miyao
    • Organizer
      The International Conference on Thin Films
    • Place of Presentation
      Croatia
    • Year and Date
      2014-10-13 – 2014-10-16
    • Related Report
      2014 Research-status Report
  • [Presentation] Orientation-Controlled Large-Grain SiGe on Flexible Substrate by Nucleation-Controlled Gold-Induced Crystallization2014

    • Author(s)
      Jong-Hyeok Park, M. Miyao, and T. Sadoh
    • Organizer
      International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tsukuba
    • Year and Date
      2014-09-08 – 2014-09-11
    • Related Report
      2014 Research-status Report
  • [Presentation] Formation of Quasi-Single-Crystal Ge on Plastic by Nucleation-Controlled Au-Induced Layer-Exchange Growth for Flexible Electronics2014

    • Author(s)
      Jong-Hyeok Park, M. Miyao, and T. Sadoh
    • Organizer
      The 21th International Workshop on Active-Matrix Flatpanel Displays and Devices
    • Place of Presentation
      Kyoto
    • Year and Date
      2014-07-02 – 2014-07-04
    • Related Report
      2014 Research-status Report
  • [Presentation] Ultralow-Temperature Catalyst-Induced-Crystallization of SiGe on Plastic for Flexible Electronics2014

    • Author(s)
      T. Sadoh, J.-H. Park, M. Kurosawa, and M. Miyao
    • Organizer
      7th International Silicon-Germanium Technology and Device Meeting
    • Place of Presentation
      Singapore
    • Year and Date
      2014-06-02 – 2014-06-04
    • Related Report
      2014 Research-status Report
    • Invited

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Published: 2014-04-04   Modified: 2017-05-10  

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