Regrowth of carbon nanotubes from zigzag carbon nanotube forest on silicon carbide
Project/Area Number |
26630136
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Research Category |
Grant-in-Aid for Challenging Exploratory Research
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Allocation Type | Multi-year Fund |
Research Field |
Electronic materials/Electric materials
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Research Institution | Waseda University |
Principal Investigator |
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Co-Investigator(Kenkyū-buntansha) |
INABA Masafumi 早稲田大学, 電子物理システム学科, 助手 (20732407)
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Project Period (FY) |
2014-04-01 – 2016-03-31
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Project Status |
Completed (Fiscal Year 2015)
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Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2015: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2014: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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Keywords | カーボンナノチューブ / シリコンカーバイド |
Outline of Final Research Achievements |
Carbon nanotube (CNT) forest was regrown by CVD method from densely packed CNT forest on Silicon carbide (SiC), which has zigzag chiralities. The patterning growth of base CNT forest on SiC was performed by ZnO/C double-layer mask. To obtain the CNT edges, we used hydrogen peroxide treatment. The regrowth of CNT forest was succeeded in CH4/H2 system at over 900 oC. This result is useful for the application of ohmic electrode of SiC power devices, where high current durability is required.
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Report
(3 results)
Research Products
(25 results)
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[Journal Article] Very low Schottky barrier height at carbon nanotube and silicon carbide interface2015
Author(s)
M. Inaba, K. Suzuki, M. Shibuya, C.-Yu Lee, Y., Masuda, N. Tomatsu, W. Norimatsu, A. Hiraiwa, M. Kusunoki, H. Kawarada
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Journal Title
Applied Physics Letters
Volume: 106(12)
Issue: 12
DOI
Related Report
Peer Reviewed
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[Presentation] カーボンナノチューブ間の接触抵抗2015
Author(s)
稲葉 優文, 李 智宇, 鈴木 和真, 平野 優, 費 文茜, 乗松 航, 楠 美智子, 川原田 洋
Organizer
第76回応用物理学会秋季学術講演会
Place of Presentation
名古屋国際会議場(愛知)
Year and Date
2015-09-13
Related Report
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[Presentation] Low Schottky barrier height at carbon nanotube and silicon carbide interface for power electronic devices2015
Author(s)
M. Inaba, K. Suzuki, M. Shibuya, C.-Y. Lee, Y. Masuda, N. Tomatsu, A.Hiraiwa, M. Kusunoki, H. Kawarada
Organizer
NT15: The Sixteenth International Conference on the Science and Application of Nanotubes
Place of Presentation
Nagoya University, Nagoya, Japan
Year and Date
2015-06-29
Related Report
Int'l Joint Research
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[Presentation] Carbon nanotube synthesis by non-catalytic CVC from dense carbon nanotube forest2015
Author(s)
M. Inaba, Y. Hirano, M. Shibata, K. Suzuki, C. Lee, M. Myodo, A. Hiraiwa, W. Norimatsu, M. Kusunoki, H. Kawarada
Organizer
9th International Conference on New Diamond and Nano Carbons
Place of Presentation
Shizuoka, Japan
Year and Date
2015-05-24
Related Report
Int'l Joint Research
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[Presentation] Schottky Barrier Height of Carbon Nanotubes to n-Type 4H-SiC for High Power Device Electrodes2014
Author(s)
K. Suzuki, M. Inaba, M. Shibuya, C.-Y. Lee, M. Myodo, Y. Hirano, A. Hiraiwa, W. Norimatsu, M. Kusunoki, H. Kawarada
Organizer
2014 MRS Fall Meeting & Exhibit
Place of Presentation
Boston, USA
Year and Date
2014-11-30 – 2014-12-05
Related Report
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[Presentation] In-plane Conduction of Dense Carbon Nanotube Forest Formed on Silicon Carbide2014
Author(s)
M. Inaba, C.-Y. Lee, K. Suzuki, M. Shibuya, M. Myodo, A. Hiraiwa, W. Norimatsu, M. Kusunoki, H. Kawarada
Organizer
NT14: The Fifteenth International Conference on the Science and Application of Nanotubes
Place of Presentation
Los Angeles, CA, USA
Year and Date
2014-06-02 – 2014-06-06
Related Report
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