Carrier density estimation for semiconductors by using Kelvin force microscopy

• Project/Area Number: 26630297
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Physical properties of metals/Metal-base materials
• Research Institution: Kyushu University
• Principal Investigator: Arita Makoto 九州大学, 工学研究院, 助教 (30284540)
• Co-Investigator(Renkei-kenkyūsha): MOTOOKA Teruaki 九州大学, 工学研究院, 教授 (50219979) ; YAMAUCHI Takashi 九州大学, 工学研究院, 学術研究員 (70419620) ; HATANO Mutsuko 東京工業大学, 理工学研究科, 教授 (00417007)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000); Fiscal Year 2016: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2015: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
• Keywords: 走査プローブ顕微鏡 / ケルビンフォース顕微鏡 / 半導体 / キャリア密度 / 仕事関数 / KFM / キャリア濃度

Outline of Final Research Achievements

The workfunction change in doped Si and Si-doped Ga2O3 was examined using Kelvin force microscopy (KFM). Experimental data can be reproduced by model calculations using an appropriate surface-state density composed of the donor- and acceptor-like gap states. These results indicate that no appreciable surface-band bending occurs for relatively low doping concentrations while the bending becomes prominent and the surface Fermi-level is eventually pinned in the midgap region as the concentration increases.
It is suggested that carrier density analysis using KFM may be a powerful tool for evaluating device structure having different carrier density areas on the surface.

Research Products

• [Journal Article] Toward controlling the carrier density of Si doped Ga2O3 films by pulsed laser deposition (2016)
  • Author(s): Fabi Zhang, Makoto Arita, Xu Wang, Zhengwei Chen, Katsuhiko Saito, Tooru Tanaka, Mitsuhiro Nishio, Teruaki Motooka, and Qixin Guo
  • Journal Title: Applied Physics Letters Volume: 109 Issue: 10
  • DOI: 10.1063/1.4962463
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Presentation] Surface potential measurement and carrier density estimation for semiconductors by using Kelvin force microscopy (2017)
  • Author(s): Makoto ARITA
  • Organizer: 2017 International Symposium on Advanced Materials and Optoelectronics
  • Place of Presentation: Saga University
  • Int'l Joint Research / Invited
• [Presentation] ケルビンフォース顕微鏡（KFM）による半導体および酸化物の表面電位観察 (2017)
  • Author(s): 有田 誠
  • Organizer: 応用物理学会関西支部セミナー「表面・界面の顕微分析セミナー」
  • Place of Presentation: 大阪大学
  • Invited
• [Presentation] 九州大学「クリーン実験ステーション」 (2016)
  • Author(s): 有田 誠, 山内貴志, 鳥越和尚, 土渕香織, 桒野由紀子, 本岡輝昭, 池田 晃裕, 浅野 種正, 高橋和敏, 郭其新
  • Organizer: 第10回九州シンクロトロン光研究センター研究成果報告会
  • Place of Presentation: 九州シンクロトロン光研究センター
• [Presentation] ZnS/ZnMgO構造の作製とKFM測定による界面バンド構造解析 (2015)
  • Author(s): 安徳 新之介, 長岡 孝, 有田 誠, 堀田 善治, 山内 貴志, 本岡 輝昭
  • Organizer: 2015年日本金属学会秋期（第157回）講演大会
  • Place of Presentation: 九州大学
  • Year and Date: 2015-09-16
• [Presentation] Photoinduced surface potential change of TiO2 thin films observed by Kelvin force microscopy (2015)
  • Author(s): Makoto ARITA
  • Organizer: 2015 International Symposium on Advanced Materials and Optoelectronics
  • Place of Presentation: Saga University
  • Year and Date: 2015-01-27
  • Invited
• [Presentation] 走査型プローブ顕微鏡（SPM）による材料評価例(文部科学省先端研究基盤共用事業の紹介と利用例) (2014)
  • Author(s): 有田 誠, 山内貴志
  • Organizer: 26th Tungsten Molybdenum Seminar of JTMIA
  • Place of Presentation: 笹川記念会館
  • Year and Date: 2014-11-14
  • Invited
• [Presentation] ケルビンプローブフォース顕微鏡を用いた酸化チタン系光触媒薄膜の光応答その場観察 (2014)
  • Author(s): 金子 雅英, 有田 誠, 堀田 善治, 山内 貴志, 本岡 輝昭, 齊藤 勝彦, 郭 其新
  • Organizer: 日本金属学会2014年秋期講演大会
  • Place of Presentation: 名古屋大学
  • Year and Date: 2014-09-24
• [Presentation] ケルビンフォース顕微鏡を用いた材料評価～新機能デバイス創出を目指して～ (2014)
  • Author(s): 有田 誠, 山内貴志, 本岡輝昭, 齊藤勝彦, 郭其新
  • Organizer: 九州シンクロトロン光研究センター合同シンポジウム
  • Place of Presentation: 九州シンクロトロン光研究センター
  • Year and Date: 2014-08-05