Project/Area Number |
26630341
|
Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
Allocation Type | Multi-year Fund |
Research Field |
Structural/Functional materials
|
Research Institution | Tohoku University |
Principal Investigator |
KATO Hidemi 東北大学, 金属材料研究所, 教授 (80323096)
|
Co-Investigator(Kenkyū-buntansha) |
YASHIRO Wataru 東北大学, 多元物質科学研究所, 准教授 (10401233)
WADA Takeshi 東北大学, 金属材料研究所, 助教 (10431602)
|
Project Period (FY) |
2014-04-01 – 2016-03-31
|
Project Status |
Completed (Fiscal Year 2015)
|
Budget Amount *help |
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2014: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
|
Keywords | 金属ガラス / インプリント加工 / 位相イメージング / 回折格子 / インプリント成型 |
Outline of Final Research Achievements |
Imprinting method for fabricating large-area and high aspect ratio pattern was established for Pd-based metallic glass (MG) with high formability and for Gd-based MG with low formability. Sufficient depth of imprinting can be obtained even under the isothermal heating condition at supercooled liquid region for Pd-based MG, while the high-rate isochronal heating condition above crystallization temperature was needed for Gd-based MG. By using imprinting with optimized conditions, we have successfully prepared gratings which are applicable for X-ray and neutron Talbot-Lau interferometer.
|