Creation of Nanofabrication process for extreme quantum beam using organic-inorganice hybrid nanoparticles
| Project/Area Number |
26706027
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Partial Multi-year Fund |
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| Research Field |
Quantum beam science
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| Research Institution | Osaka University |
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Principal Investigator |
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| Research Collaborator |
Belloni J. , Prof.
Robinson A. P. G. , Prof.
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥24,310,000 (Direct Cost: ¥18,700,000、Indirect Cost: ¥5,610,000)
Fiscal Year 2016: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2015: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2014: ¥15,730,000 (Direct Cost: ¥12,100,000、Indirect Cost: ¥3,630,000)
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| Keywords | 量子ビーム / 極端紫外光リソグラフィ / 電子線リソグラフィ / 半導体微細化 / リソグラフィ / ナノ材料 / 半導体超微細化 / 放射線 / 材料加工・処理 |
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| Outline of Final Research Achievements |
By taking advantage of the radiolytic method to reduce metal ions into particles embedded in a polymer and to cross-link the polymer, we made nanofabrication process for extreme quantum beam using organic-inorganice hybrid nanoparticle. This made it insoluble and fixed on the support, both nanoparticles and cross-linked polymer being generated without additives via a one-step exposure.
Moreover, Conditions have been found for radiolytically synthesizing stable metal nanoparticles of silver or gold embedded in polymeric films by using an electron beam. The process will permit, with a high spatial resolution, the production of metal nanoparticles and of the cross-linked polymer such as polystyrene (PS) exclusively in the irradiated parts of the polymer films, which can then be revealed from the unexposed precursor film by dissolution. The mechanisms of this direct-writing process, the properties of the loaded films and the possible patterning were explored.
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Report
(4 results)
Research Products
(19 results)
