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Creation of Nanofabrication process for extreme quantum beam using organic-inorganice hybrid nanoparticles

Research Project

Project/Area Number 26706027
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypePartial Multi-year Fund
Research Field Quantum beam science
Research InstitutionOsaka University

Principal Investigator

YAMAMOTO HIROKI  大阪大学, 産業科学研究所, 助教 (00516958)

Research Collaborator Belloni J.  , Prof.
Robinson A. P. G.  , Prof.
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥24,310,000 (Direct Cost: ¥18,700,000、Indirect Cost: ¥5,610,000)
Fiscal Year 2016: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2015: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2014: ¥15,730,000 (Direct Cost: ¥12,100,000、Indirect Cost: ¥3,630,000)
Keywords量子ビーム / 極端紫外光リソグラフィ / 電子線リソグラフィ / 半導体微細化 / リソグラフィ / ナノ材料 / 半導体超微細化 / 放射線 / 材料加工・処理
Outline of Final Research Achievements

By taking advantage of the radiolytic method to reduce metal ions into particles embedded in a polymer and to cross-link the polymer, we made nanofabrication process for extreme quantum beam using organic-inorganice hybrid nanoparticle. This made it insoluble and fixed on the support, both nanoparticles and cross-linked polymer being generated without additives via a one-step exposure.
Moreover, Conditions have been found for radiolytically synthesizing stable metal nanoparticles of silver or gold embedded in polymeric films by using an electron beam. The process will permit, with a high spatial resolution, the production of metal nanoparticles and of the cross-linked polymer such as polystyrene (PS) exclusively in the irradiated parts of the polymer films, which can then be revealed from the unexposed precursor film by dissolution. The mechanisms of this direct-writing process, the properties of the loaded films and the possible patterning were explored.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (19 results)

All 2017 2016 2015 2014 Other

All Int'l Joint Research (1 results) Journal Article (5 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 5 results,  Acknowledgement Compliant: 3 results) Presentation (13 results) (of which Int'l Joint Research: 9 results)

  • [Int'l Joint Research] Université Paris-Sud(France)

    • Related Report
      2016 Annual Research Report
  • [Journal Article] Synthesis of Metal Nanoparticles and Patterning in Polymeric Films Induced by Electron Nanobeam2017

    • Author(s)
      Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa, Muneyuki Naito, Jean-Louis. Marignier, Mehran Mostafavi, and Jacqueline Belloni
    • Journal Title

      J. Phys. Chem. C

      Volume: 121 Issue: 9 Pages: 5335-5340

    • DOI

      10.1021/acs.jpcc.6b12543

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Controlled Array of Gold Nanoparticles by Combination of Nano Imprint and Self-assembly2016

    • Author(s)
      Hiroki Yamamoto, Akira Ohnuma, Bunsho Ohtani, Takahiro Kozawa
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 29 Issue: 5 Pages: 765-768

    • DOI

      10.2494/photopolymer.29.765

    • NAID

      130005261829

    • ISSN
      0914-9244, 1349-6336
    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Chemically amplified molecular resists based on noria derivatives containing adamantyl ester groups for electron beam lithography2016

    • Author(s)
      H. Yamamoto, S. Tagawa, T. Kozawa, H. Kudo, and K. Okamoto
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 34 Issue: 4 Pages: 041606-041606

    • DOI

      10.1116/1.4953068

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on Dissolution Behavior of Poly(4-hydroxystyrene) as Model Polymer of Chemically Amplified Resists for Extreme Ultraviolet Lithography2015

    • Author(s)
      Masaki Mitsuyasu, Hiroki Yamamoto, Takahiro Kozawa
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 28 Issue: 1 Pages: 119-124

    • DOI

      10.2494/photopolymer.28.119

    • NAID

      130005090251

    • ISSN
      0914-9244, 1349-6336
    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-aspect-ratio patterning by ClF3-Ar neutral cluster etching2015

    • Author(s)
      Hiroki Yamamoto, Toshio Sekib, Jiro Matsuoc, Kunihiko Koiked, Takahiro Kozawa
    • Journal Title

      Microelectronic Engineering

      Volume: 141 Pages: 145-149

    • DOI

      10.1016/j.mee.2015.03.006

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Lamellar orientation of block copolymer using polarity switch of Nitrophenyl self-assembled monolayer (SAM) induced by electron beam2017

    • Author(s)
      Hiroki Yamamoto, Guy Dawson, Takahiro Kozawa, Alex P. G. Robinson
    • Organizer
      SPIE Advanced Lithography 2017
    • Place of Presentation
      California, USA
    • Year and Date
      2017-02-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on Resist Performance of Noria Derivatives Modified with Various Protection Ratios of Acetal Moieties for EUV lithography with Various2016

    • Author(s)
      Hiroki Yamamoto, Hiroto Kudo, Takahiro Kozawa
    • Organizer
      2016 International Symposium on Extreme Ultraviolet Lithography
    • Place of Presentation
      Hiroshima, Japan
    • Year and Date
      2016-10-24
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Selective Immobilization of Metal Nanoparticles Using Self-assembly Techniques2016

    • Author(s)
      Hiroki Yamamoto, Akira Ohnuma, Bunsho Ohtani, Takahiro Kozawa
    • Organizer
      42nd Micro and Nano Engineering
    • Place of Presentation
      Vienna, Austria
    • Year and Date
      2016-09-19
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] アセタール基で保護したノーリア誘導体に基づいたレジスト材料の電子線照射に対する応答性の系統的な研究2016

    • Author(s)
      山本洋揮, 工藤宏人, 古澤孝弘
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      新潟県新潟市
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Controlled Array of Gold Nanoparticles by Combination of Nano Imprint and Self-assembly2016

    • Author(s)
      Hiroki Yamamoto, Akira Ohnuma, Bunsho Ohtani, Takahiro Kozawa
    • Organizer
      The 33th International Conference of Photopolymer Science and Technology
    • Place of Presentation
      Chiba, Japan
    • Year and Date
      2016-06-22
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Molecular Resist Materials for Extreme Ultraviolet Lithography2016

    • Author(s)
      Hiroki Yamamoto, Hiroto Kudo, and Takahiro Kozawa
    • Organizer
      2016 International Workshop on EUV Lithography
    • Place of Presentation
      California, USA
    • Year and Date
      2016-06-13
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Radiation-induced synthesis of metal nanoparticles in ethers THF and PGMEA2015

    • Author(s)
      Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa,Jean-Louis Marignier,Mehran Mostafavi,Jacqueline Belloni
    • Organizer
      Pacifichem 2015
    • Place of Presentation
      ハワイ (アメリカ)
    • Year and Date
      2015-12-15
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on Resist Performance of Chemically Amplified Molecular Resist based on Noria Derivative and Calixarene Derivative for EUV lithography2015

    • Author(s)
      Hiroki Yamamoto, Hiroto Kudo, Takahiro Kozawa
    • Organizer
      2015 International EUVL Symposium
    • Place of Presentation
      マーストリヒト (オランダ)
    • Year and Date
      2015-10-05
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 微細加工技術による金属ナノ粒子の位置制御2015

    • Author(s)
      山本洋揮
    • Organizer
      先端放射線化学シンポジウム
    • Place of Presentation
      浜名湖 かんざんじ荘 (静岡県 浜松市)
    • Year and Date
      2015-09-29
    • Related Report
      2015 Annual Research Report
  • [Presentation] Study on Dissolution Behavior of Poly(4-hydroxystyrene) as model Polymer of Chemically Amplified Resists for Extreme Ultraviolet Lithography2015

    • Author(s)
      Masaki Mitsuyasu, Hiroki Yamamoto, Takahiro Kozawa
    • Organizer
      The 32nd International Conference of Photopolymer Science and Technology
    • Place of Presentation
      幕張メッセ (千葉県 千葉市)
    • Year and Date
      2015-06-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on Fusion between Electron Beam Lithography and Self-assembly for Advanced Patterning2015

    • Author(s)
      Hiroki Yamamoto, Takahiro Kozawa
    • Organizer
      15th International Congress of Radiation Research
    • Place of Presentation
      国立京都国際会館 (京都府 京都市)
    • Year and Date
      2015-05-25
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 環状オリゴマーに基づいた化学増幅型分子レジストのレジスト性能評価に関する研究2014

    • Author(s)
      山本 洋揮
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Radiation-induced Synthesis of Metal Nanoparticles in Ethers THF and PGMEA2014

    • Author(s)
      山本 洋揮
    • Organizer
      The 5th Asia Pacific Symposium on Radiation Chemistry
    • Place of Presentation
      東京大学弥生講堂
    • Year and Date
      2014-09-08 – 2014-09-11
    • Related Report
      2014 Annual Research Report

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Published: 2014-04-04   Modified: 2018-03-22  

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