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High-speed roller nanoreplication using laser surface heating

Research Project

Project/Area Number 26709004
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypePartial Multi-year Fund
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

NAGATO Keisuke  東京大学, 工学(系)研究科(研究院), 准教授 (50546231)

Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥24,440,000 (Direct Cost: ¥18,800,000、Indirect Cost: ¥5,640,000)
Fiscal Year 2015: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2014: ¥13,520,000 (Direct Cost: ¥10,400,000、Indirect Cost: ¥3,120,000)
Keywords超精密金型転写 / 高速組立成型 / マイクロ・ナノデバイス / トライボロジ― / ナノ材料
Outline of Final Research Achievements

This project developed a method of replication of nanostructures by direct heating surface of roller mold. We designed and assembled a roller replication system, in which 100-mm-wide mold is setup and 100W laser is focused and irradiated on the surfaces of the optical polymer film. The system successfully replicated submicron - 10 micron patterns. The phenomena of laser heating and cooling of the polymer surface by finite element method. It is clarified that high power density and short irradiation time resulted in high replication speed. Furthermore, an antireflection structure and light extraction structures were replicated and their optical properties were investigated.

Report

(3 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • Research Products

    (24 results)

All 2016 2015 2014

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Acknowledgement Compliant: 5 results,  Open Access: 1 results) Presentation (19 results) (of which Int'l Joint Research: 10 results,  Invited: 3 results)

  • [Journal Article] Real-time measurement of replication degree in thermal roller nanoimprinting2016

    • Author(s)
      Kenta Hishiki, Keisuke Nagato, Ken Takahashi, T. Hamaguchi, M. Nakao
    • Journal Title

      Microelectronic Engineering

      Volume: 153 Pages: 117-120

    • DOI

      10.1016/j.mee.2016.03.053

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] High-Speed Replication of Light-Extraction Structure with Thermal roller Nanoimprinting2015

    • Author(s)
      K. Takahashi, K. Nagato, T. Hamaguchi, M. Nakao
    • Journal Title

      Microelectron. Eng.

      Volume: 印刷中 Pages: 285-288

    • DOI

      10.1016/j.mee.2015.03.069

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Fabrication of through-hole membrane with anodic-alumina nanohole array2015

    • Author(s)
      L. Wang, K. Nagato, S. Iwasaki, T. Hamaguchi, M. Nakao
    • Journal Title

      Microelectron. Eng.

      Volume: 141 Pages: 62-67

    • DOI

      10.1016/j.mee.2015.01.037

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Injection compression molding of replica molds for nanoimprint lithography2014

    • Author(s)
      K. Nagato
    • Journal Title

      Polymers

      Volume: 6 Issue: 3 Pages: 604-612

    • DOI

      10.3390/polym6030604

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Laser-assisted replication of large-area nanostructures2014

    • Author(s)
      K. Nagato, K. Takahashi, T. Sato, J. Choi, T. Hamaguchi, M. Nakao
    • Journal Title

      J. Mater. Proc. Technol.

      Volume: 214 Issue: 11 Pages: 2444-2449

    • DOI

      10.1016/j.jmatprotec.2014.05.025

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Replication of Nanostructures on Polyethylene Terephthalate with Laser-Assisted Roller Nanoimprinting2016

    • Author(s)
      Y. Yajima, K. Nagato, M. Nakao
    • Organizer
      The 60th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
    • Place of Presentation
      Pittsburgh, USA
    • Year and Date
      2016-06-02
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Laser-Assisted Replication of Microstructured Film2016

    • Author(s)
      K. Nagato
    • Organizer
      EMN Meeting on Polymer
    • Place of Presentation
      Hong Kong, China
    • Year and Date
      2016-01-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Laser-Assisted Imprinting of Microstructured Polymer Films2015

    • Author(s)
      K. Nagato
    • Organizer
      World Expo on Materials Science & Polymer Engineering
    • Place of Presentation
      Dubai, UAE
    • Year and Date
      2015-11-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Effect of Pressing Pressure on Filling Ratio of Microstructures by Laser-Assisted Imprinting2015

    • Author(s)
      Y. Yajima, K. Nagato, K. Takahashi, T. Hamaguchi, M. Nakao
    • Organizer
      Micro Nano Engineering (MNE)
    • Place of Presentation
      Hague, Holland
    • Year and Date
      2015-09-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Real-Time measurement of replication degree in thermal roller nanoimprinting2015

    • Author(s)
      K. Hishiki, K. Nagato, K. Takahashi, T. Hamaguchi, M. Nakao
    • Organizer
      Micro Nano Engineering (MNE)
    • Place of Presentation
      Hague, Holland
    • Year and Date
      2015-09-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Momentary Local Laser Heating in Thermal Roll-to-Plate Nanoimprinting; Node Decoupling with Axiomatic Design2015

    • Author(s)
      M. Nakao, K. Takahashi, K. Nagato, K. Iino
    • Organizer
      9th International Conference on Axiomatic Design (ICAD2015)
    • Place of Presentation
      Florence, Italy
    • Year and Date
      2015-09-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Replication of antireflection structure for solar cells by laser-assisted imprinting2015

    • Author(s)
      K. Nagato, Y. Yajima, K. Takahashi, T. Hamaguchi, M. Nakao
    • Organizer
      Asian Symposium on Materials and Processing (ASMP)
    • Place of Presentation
      Lombok, Indonesia
    • Year and Date
      2015-08-11
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Replication of large-area nanostructures for optical devices2015

    • Author(s)
      Keisuke Nagato
    • Organizer
      EMN Cancun Meeting (Energy Materials Nanotechnology)
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2015-06-10
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Damascene of metallic wires on imprinted flexible substrate2015

    • Author(s)
      J. Wang, K. Nagato, K. Takahashi, T. Hamaguchi, M. Nakao
    • Organizer
      The 59th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
    • Place of Presentation
      San Diego, USA
    • Year and Date
      2015-05-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Injection-Compression Molding of Nanostructures for Three-Dimensional Cell-Culturing2015

    • Author(s)
      K. Nagato, M. Oike, Y. Kimura, T. Kakinuma, M. Nakao
    • Organizer
      The 59th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
    • Place of Presentation
      San Diego, USA
    • Year and Date
      2015-05-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ロール熱ナノインプリントにおける成形状態のリアルタイム測定―第2報:回折格子形状の成形2015

    • Author(s)
      日紫喜賢太,長藤圭介,高橋賢,濱口哲也,中尾政之
    • Organizer
      精密工学会春季大会
    • Place of Presentation
      東洋大学、東京都
    • Year and Date
      2015-03-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Laser-Assisted Replication of Large-Area Nanostructures and Antireflection Structure2014

    • Author(s)
      K. Nagato, K. Takahashi, M. Nakao
    • Organizer
      Asian Workshop on Polymer Processing (AWPP)
    • Place of Presentation
      Kenting, Taiwan
    • Year and Date
      2014-11-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] レーザアシストロールナノインプリントを用いた光取出しフィルムの製造2014

    • Author(s)
      長藤圭介,高橋賢,中尾政之
    • Organizer
      日本機械学会第10回生産加工・工作機械部門講演会
    • Place of Presentation
      徳島大学、徳島県
    • Year and Date
      2014-11-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] Thermal Roller Nanoimprinting -Multilayered Structures, Laser-Assisted Replication-2014

    • Author(s)
      K. Nagato, K. Takahashi, M. Nakao
    • Organizer
      14th International Conference on Nanoimprint and Nanoprint Technology (NNT)
    • Place of Presentation
      Kyoto, Japan (ANA Crown Praza Kyoto)
    • Year and Date
      2014-10-23
    • Related Report
      2014 Annual Research Report
  • [Presentation] High-Speed Replication of Light-Extraction Structure with Thermal Roller Nanoimprinting2014

    • Author(s)
      K. Takahashi, K. Nagato, T. Hamaguchi, M. Nakao
    • Organizer
      40th Micro and Nano Engineering MNE
    • Place of Presentation
      Lausanne, Switzerland
    • Year and Date
      2014-09-23
    • Related Report
      2014 Annual Research Report
  • [Presentation] レーザアシストロールナノインプリントを用いた反射防止構造の製作2014

    • Author(s)
      長藤圭介,高橋賢,中尾政之
    • Organizer
      精密工学会秋季大会学術講演会
    • Place of Presentation
      鳥取大学、鳥取県
    • Year and Date
      2014-09-16
    • Related Report
      2014 Annual Research Report
  • [Presentation] Real-Time Observation of Paste during Mico-Via Filling in Screen Printing2014

    • Author(s)
      K. Nagato, K. Mitamura, S. Shinagawa, and M. Nakao
    • Organizer
      The 5th International Conference on Nanomanufacturing (nanoMan2014)
    • Place of Presentation
      Bremen, Germany
    • Year and Date
      2014-07-08
    • Related Report
      2014 Annual Research Report
  • [Presentation] High-Speed and Low-Energy-Consumption Replication of Nanostructures with Laser-Assisted Roller Nanoimprinting2014

    • Author(s)
      K. Takahashi, K Nagato, J. Wang, T. Hamaguchi, and M. Nakao
    • Organizer
      58th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
    • Place of Presentation
      Washington DC, USA
    • Year and Date
      2014-05-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] Morphology Control of Anodic Porous Alumina Using Nanoimprinting2014

    • Author(s)
      S. Iwasaki, K. Nagato, L. Wang, Y. Li, J.-J. Delaunay, and M. Nakao
    • Organizer
      58th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
    • Place of Presentation
      Washington DC, USA
    • Year and Date
      2014-05-28
    • Related Report
      2014 Annual Research Report

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Published: 2014-04-04   Modified: 2017-05-10  

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