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Fabrication of nanosystem for wavelength detection

Research Project

Project/Area Number 26709005
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypePartial Multi-year Fund
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

Kometani Reo  東京大学, 工学(系)研究科(研究院), 講師 (90466780)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥20,540,000 (Direct Cost: ¥15,800,000、Indirect Cost: ¥4,740,000)
Fiscal Year 2016: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2015: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000)
Fiscal Year 2014: ¥8,320,000 (Direct Cost: ¥6,400,000、Indirect Cost: ¥1,920,000)
Keywords波長計測 / プラズモニクス / ナノメカニクス / ナノメカニカル振動子 / 機械要素 / 機械材料・材料力学 / フォトニック結晶 / 光物性 / マイクロ・ナノデバイス
Outline of Final Research Achievements

Wavelength measurement device was researched in order to apply the stabilizer for light source on the optical communication technology. Wavemeasurement device was achieved by using nanomechanial structure and plasmonic structure. Nanomechanical device is a sensitive sensing device for various small physical quantities. And, plasmonic structure is a superior structure for controlling the light adsorption. As a result, we found that the sandwich-type hole array structure made of SiO2/Au/SiO2 multi-layer was suitable for controlling the wavelength dependency of adsorption on a mechanical resonator. Then optomechanical resonator was fabricated for wavelength detection, and resolution of 0.92 pm at wavelength region of 1550-1562 nm. The optomechniccal resonator is a very powerful device for wavelength detection, and it is useful in various fields such as the optical communication and the fundamental scientific researches.

Report

(4 results)
  • 2017 Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (20 results)

All 2016 2015 2014 Other

All Journal Article (3 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 3 results,  Acknowledgement Compliant: 1 results) Presentation (13 results) (of which Int'l Joint Research: 6 results,  Invited: 2 results) Remarks (3 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] グラフェンメカニカル構造の機能化2016

    • Author(s)
      米谷 玲皇
    • Journal Title

      炭素

      Volume: 275 Issue: 275 Pages: 191-198

    • DOI

      10.7209/tanso.2016.191

    • NAID

      130005250239

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Triple-walled gold surfaces with small-gaps for nonresonance surface enhanced Raman scattering of rhodamine 6G molecules2016

    • Author(s)
      Tatsuya Baba, Yaerim Lee, Ai Ueno, Ryo Takigawa, Reo Kometani, Etsuo Maeda
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 34 Issue: 1 Pages: 011802-011802

    • DOI

      10.1116/1.4938483

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Mechanical characteristics of ultra-long horizontal nanocantilevers grown by real-time feedback control on focused-ion-beam chemical vapour deposition2015

    • Author(s)
      D. Guo, S. Warisawa, S. Ishihara, R. Kometani
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 25 Issue: 12 Pages: 125028-125028

    • DOI

      10.1088/0960-1317/25/12/125028

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] Aluminium-assisted anisotropic chemical vapor etching of silicon dioxide2016

    • Author(s)
      R. Kometani, T. Murakami, E. Maeda
    • Organizer
      42nd Micro and Nano Engineering 2016 (MNE2016)
    • Place of Presentation
      Congress Center of Reed Messe Vienna, Vienna, Austria
    • Year and Date
      2016-09-22
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SiO2膜のAl触媒化学蒸気エッチングとその特性評価2016

    • Author(s)
      米谷 玲皇、村上 剛浩、前田 悦男
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      新潟県 新潟市 朱鷺メッセ
    • Year and Date
      2016-09-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Fabrication of an optomechanical resonator with a two-interface surface plasmonic structure for the wavelength detection2016

    • Author(s)
      R. Kometani, M. Goto, E. Maeda
    • Organizer
      The 60th International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication (EIPBN2016)
    • Place of Presentation
      Wyndham Grand Hotel, Pittsburgh, US
    • Year and Date
      2016-06-03
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Photonic Absorber with Nano-Fins for Wavelength Detection with Mechanical Resonator in Near-infrared Region2015

    • Author(s)
      E. Maeda and R. Kometani
    • Organizer
      28th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      富山県 富山市 富山国際会議場
    • Year and Date
      2015-11-12
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 光機械振動子を用いた波長測定のための金ナノフィン配列に関する研究2015

    • Author(s)
      前田悦男,米谷玲皇
    • Organizer
      第7回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      新潟県 新潟市 朱鷺メッセ
    • Year and Date
      2015-10-30
    • Related Report
      2015 Annual Research Report
  • [Presentation] Effect of fluorine surface modification on resonance of a carbon nanoresonator fabricated by FIB/EB dual-beam lithography2015

    • Author(s)
      R. Kometani, T. Miyakoshi, E. Maeda
    • Organizer
      41th International Conference on Micro and Nano Engineering
    • Place of Presentation
      World Forum, The Hauge, The Netherlands
    • Year and Date
      2015-09-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A minimal optical Yagi-uda nanoantenna array for wavelength detection with optmechanical resonator2015

    • Author(s)
      J. Oishi, M. Goto, H. Yamaguchi, E. Maeda, R. Kometani
    • Organizer
      41th International Conference on Micro and Nano Engineering
    • Place of Presentation
      World Forum, The Hauge, The Netherlands
    • Year and Date
      2015-09-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of mechanical properties of the carbon mechanical nanostructure fabricated from SU-8 resist by FIB/EB dual-beam lithography2015

    • Author(s)
      R. Kometnai, Y. Miyata, E. Maeda
    • Organizer
      The 59th International Conference on Electron, Ion and Photon Beam Techonology & Nanofabrication
    • Place of Presentation
      Manchester Grand Hyatt, San Diego, US
    • Year and Date
      2015-05-26
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 集束イオンビーム立体ナノ構造形成技術とその高精度化2015

    • Author(s)
      米谷 玲皇
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県, 東海大学
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] 荷電粒子ビーム技術のナノメカニクス研究応用2015

    • Author(s)
      米谷 玲皇
    • Organizer
      エレクトロニクス・表面技術フォーラム
    • Place of Presentation
      神奈川県, 神奈川県産業技術センター
    • Year and Date
      2015-02-19
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Homogeneous Ultra-Long Overhang Nanostructure Fabrication by Feedback Control of Blanking Time on Focused-Ion-Beam Chemical Vapor Deposition2014

    • Author(s)
      R. Kometani and T. Aonuma
    • Organizer
      27th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      福岡県, ヒルトン福岡シーホーク
    • Year and Date
      2014-11-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] 集束イオンビーム化学気相成長法を用いた長尺オーバーハングナノ構造形成における材料組成の均質化2014

    • Author(s)
      米谷 玲皇,青沼 正
    • Organizer
      75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道, 北海道大学
    • Year and Date
      2014-09-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] 集束イオンビーム立体ナノ構造作製技術とナノメカニクス研究2014

    • Author(s)
      米谷 玲皇
    • Organizer
      JAISTグリーンデバイス研究センターシンポジウム
    • Place of Presentation
      石川県, 北陸先端科学技術大学院大学
    • Year and Date
      2014-06-25
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Remarks] 東京大学大学院工学系研究科 機械工学専攻 米谷研究室

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/

    • Related Report
      2016 Annual Research Report
  • [Remarks] 東京大学大学院工学系研究科 米谷研究室

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/

    • Related Report
      2015 Annual Research Report
  • [Remarks] 東京大学大学院工学系研究科 米谷研究室ホームページ

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/

    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] 微小機械振動構造の作製方法2014

    • Inventor(s)
      米谷玲皇,山口浩司
    • Industrial Property Rights Holder
      米谷玲皇,山口浩司
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-187324
    • Filing Date
      2014-09-16
    • Related Report
      2014 Annual Research Report

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Published: 2014-04-04   Modified: 2019-03-29  

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