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A label-free multi-modal biosensor using MEMS-CMOS image sensor technology

Research Project

Project/Area Number 26709025
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypePartial Multi-year Fund
Research Field Electron device/Electronic equipment
Research InstitutionToyohashi University of Technology

Principal Investigator

Takahashi Kazuhiro  豊橋技術科学大学, 工学(系)研究科(研究院), 講師 (90549346)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥23,140,000 (Direct Cost: ¥17,800,000、Indirect Cost: ¥5,340,000)
Fiscal Year 2016: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2015: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
Fiscal Year 2014: ¥12,090,000 (Direct Cost: ¥9,300,000、Indirect Cost: ¥2,790,000)
Keywordsバイオセンサ / MEMS / ファブリペロー干渉計 / CMOSイメージセンサ / 非標識 / タンパク質 / CMOS集積回路
Outline of Final Research Achievements

We developed a label-free multi-modal biosensor using a MEMS Fabry-Perot interferometer integrated with a CMOS image sensor, which can measure intermolecular force of adsorbed molecules as well as structural change of protein. As a result, we demonstrated 22 times higher stress sensitivity and 100 times higher mass sensitivity than that of conventional biosensors.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (51 results)

All 2017 2016 2015 2014 Other

All Journal Article (5 results) (of which Peer Reviewed: 3 results,  Acknowledgement Compliant: 5 results,  Open Access: 2 results) Presentation (38 results) (of which Int'l Joint Research: 12 results,  Invited: 5 results) Book (3 results) Remarks (2 results) Patent(Industrial Property Rights) (3 results) (of which Overseas: 1 results)

  • [Journal Article] Optomechanical characterization of freestanding stretchable nanosheet based on polystyrene-polybutadiene-polystyrene copolymer2017

    • Author(s)
      H. Kumagai, N. Sato, S. Takeoka, K. Sawada, T. Fujie, and K. Takahashi
    • Journal Title

      Applied Physics Express

      Volume: 10 Issue: 1 Pages: 011601-011601

    • DOI

      10.7567/apex.10.011601

    • NAID

      210000135711

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Development of graphene drum resonator with nanocavity by low-pressure dry transfer technique2017

    • Author(s)
      H. Ishida, T. Iwata, K. Sawada, K. Takahashi
    • Journal Title

      Proc. 30th IEEE Conference on Micro Electro Mechanical Systems

      Volume: 30 Pages: 928-931

    • DOI

      10.1109/memsys.2017.7863561

    • Related Report
      2016 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] An elastomer-based MEMS Fabry-Perot interferometer for physical and biological sensing by dry transfer technique2017

    • Author(s)
      K. Takahashi, T. Fujie, N, Sato, S. Takeoka, K. Sawada
    • Journal Title

      Proc. 30th IEEE Conference on Micro Electro Mechanical Systems

      Volume: 30 Pages: 704-707

    • DOI

      10.1109/memsys.2017.7863505

    • Related Report
      2016 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] Comparative study on the deposition of enzyme-entrappedmembranes with spatial homogeneity for bioimaging2017

    • Author(s)
      Tatsuya Iwata, Hideo Doi, Koichi Okumura, Tomoko Horio, Toshiaki Hattori, Kazuhiro Takahashi, Kazuaki Sawada
    • Journal Title

      Sensors and Actuators B: Chemical

      Volume: Vol.239 Pages: 800-806

    • DOI

      10.1016/j.snb.2016.08.065

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Development of an ATP and hydrogen ion image sensor using a patterned apyrase-immobilized membrane2016

    • Author(s)
      Y. N. Lee, K. Okumura, T. Iwata, K. Takahashi, T. Hattori, M. Ishida, K. Sawada
    • Journal Title

      Talanta

      Volume: Vol.161 Pages: 41-424

    • DOI

      10.1016/j.talanta.2016.08.070

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] An elastomer-based MEMS Fabry-Perot interferometric surface-stress sensor for biomarker detection2017

    • Author(s)
      R. Teramoto, S. Maruyama, T. Fujie, N. Sato, S. Takeoka, K. Sawada, and K. Takahashi
    • Organizer
      9th Int. Conf. on Molecular Electronics and Bioelectronics (M&BE9)
    • Place of Presentation
      Kanazawa, Japan
    • Year and Date
      2017-06-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabry-Perot interferometric surface-stress sensor with high wavelength selectivity for label-free biosensing2017

    • Author(s)
      T. Takahashi, T. Hizawa, N. Misawa, M. Taki, K. Sawada, and K. Takahashi
    • Organizer
      The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      2017-06-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 減圧ドライ転写技術により作製した大面積グラフェン共振器2017

    • Author(s)
      石田隼斗,岩田達哉,澤田和明,高橋一浩
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] LSI混載型ファブリペロー干渉計バイオ・ケミカルセンサ2017

    • Author(s)
      丸山智史,飛沢健,高橋一浩,澤田和明
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] エラストマーナノシートを利用した光干渉型表面応力バイオセンサ2017

    • Author(s)
      寺元玲奈,藤枝俊宣,佐藤信孝,武岡真司,澤田和明,高橋一浩
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] 非標識バイオセンシングに向けた高い波長選択性を持つMEMS光干渉型表面応力センサの製作2017

    • Author(s)
      高橋利昌,飛沢健,三澤宣雄,瀧美樹,澤田和明,高橋一浩
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] An elastomer-based MEMS Fabry-Perot interferometer for physical and biological sensing by dry transfer technique2017

    • Author(s)
      K. Takahashi, T. Fujie, N, Sato, S. Takeoka, K. Sawada
    • Organizer
      30th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2017)
    • Place of Presentation
      Las Vegas, NV, USA
    • Year and Date
      2017-01-22
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of graphene drum resonator with nanocavity by low-pressure dry transfer technique2017

    • Author(s)
      H. Ishida, T. Iwata, K. Sawada, K. Takahashi
    • Organizer
      30th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2017)
    • Place of Presentation
      Las Vegas, NV, USA
    • Year and Date
      2017-01-22
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface Stress Evaluation Induced by Biomolecular Adsorption on Freestanding Elastomer Nanosheet2016

    • Author(s)
      R. Teramoto, T. Fujie, N. Sato, S. Takeoka, K. Sawada and K. Takahashi
    • Organizer
      29th Int. Microprocesses and Nanotechnology Conf. (MNC 2016)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2016-11-08
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Microstructures on Dry-transferred Freestanding Graphene for Nanomechanical Resonator2016

    • Author(s)
      K. Go, H. Ishida, K. Sawada and K. Takahashi
    • Organizer
      29th Int. Microprocesses and Nanotechnology Conf. (MNC 2016)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2016-11-08
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MEMS optical interferometric surface-stress sensor for multi-biomarker detection2016

    • Author(s)
      K. Takahashi
    • Organizer
      The Irago Conference 2016
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2016-11-01
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] ドライ転写技術による自立単層グラフェン構造の製作2016

    • Author(s)
      石田隼斗,澤田和明,高橋一浩
    • Organizer
      第33回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      平戸文化センター
    • Year and Date
      2016-10-24
    • Related Report
      2016 Annual Research Report
  • [Presentation] 高分子膜を利用したMEMSセンサによるバイオマーカー検出2016

    • Author(s)
      高橋一浩
    • Organizer
      第218回有機エレクトロニクス材料研究会
    • Place of Presentation
      新宿NSビル
    • Year and Date
      2016-09-30
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 高分子膜を利用したMEMSセンサによるバイオマーカー検出2016

    • Author(s)
      高橋一浩
    • Organizer
      有機エレクトロニクス材料研究会
    • Place of Presentation
      東京
    • Year and Date
      2016-09-30
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] 光干渉型MEMSセンサによるバイオセンシング2016

    • Author(s)
      高橋一浩
    • Organizer
      第77回応用物理学会秋期学術講演会
    • Place of Presentation
      朱鷺メッセ,新潟
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] ドライ転写技術により印加した自立グラフェンのひずみ評価2016

    • Author(s)
      石田隼斗,澤田和明,高橋一浩
    • Organizer
      第77回応用物理学会秋期学術講演会
    • Place of Presentation
      朱鷺メッセ,新潟
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 高い波長選択性を持つMEMS Fabry-Perot干渉型表面応力センサの瀬一計・製作2016

    • Author(s)
      高橋利昌,桝屋善光,石田隼斗,飛沢健,澤田和明,髙橋一浩
    • Organizer
      第77回応用物理学会秋期学術講演会
    • Place of Presentation
      朱鷺メッセ,新潟
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 光干渉型MEMSセンサによるバイオセンシング2016

    • Author(s)
      高橋一浩
    • Organizer
      応用物理学会秋期学術講演大会
    • Place of Presentation
      新潟
    • Year and Date
      2016-09-13
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] 金ハーフミラーを用いたMEMS光干渉型バイオセンサの波長選択性向上2016

    • Author(s)
      高橋利昌,桝屋善光,石田隼斗,澤田和明,高橋一浩
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      機械振興会館,東京
    • Year and Date
      2016-08-09
    • Related Report
      2016 Annual Research Report
  • [Presentation] Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application2016

    • Author(s)
      H. Kumagai, N. Sato, S. Takeoka, K. Sawada, T. Fujie and K. Takahashi
    • Organizer
      IEEE 2016 Int. Conf. on Optical MEMS and Nanophotonics
    • Place of Presentation
      Singapore
    • Year and Date
      2016-07-31
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Edge-clamped graphene diaphragm with nano cavity using dry transfer technique2016

    • Author(s)
      H. Ishida, K. Sawada, M. Ishida, and K. Takahashi
    • Organizer
      Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT 2016)
    • Place of Presentation
      Kanazawa, Japan
    • Year and Date
      2016-06-26
    • Related Report
      2016 Annual Research Report 2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Estimation of strain in freestanding graphene developed by dry transfer technique2016

    • Author(s)
      H. Ishida, K. Sawada, M. Ishida, and K. Takahashi
    • Organizer
      7th International Symposium on Control of Semiconductor Interfaces /International SiGe Technology (ISCSI-VII/ISTDM2016)
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2016-06-07
    • Related Report
      2016 Annual Research Report 2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ドライ転写技術によるナノキャビティ上へのCVD単層グラフェンダイアフラムの製作2016

    • Author(s)
      石田隼斗,澤田和明,石田誠,高橋一浩
    • Organizer
      電子情報通信学会 シリコン材料・デバイス研究会
    • Place of Presentation
      静岡大学 浜松キャンパス
    • Year and Date
      2016-05-19
    • Related Report
      2016 Annual Research Report 2015 Annual Research Report
  • [Presentation] マイクロ流路を一体化した MEMS 光干渉型表面応力センサによる生体分子計測2015

    • Author(s)
      桝屋善光,小澤遼,石田誠,澤田和明,高橋一浩
    • Organizer
      第32回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      朱鷺メッセ,新潟
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] Fast mechanical biosensing in liquid using MEMS Fabry-Perot interferometric surface-stress sensor2015

    • Author(s)
      Y. Masuya, R. Ozawa, M. Ishida, K. Sawada, and K. Takahashi
    • Organizer
      18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers’15)
    • Place of Presentation
      Anchorage, Alaska, USA
    • Year and Date
      2015-06-21
    • Related Report
      2015 Annual Research Report 2014 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of nanocavity sealing process for MEMS optical interferometric biosensor2015

    • Author(s)
      K. Takahashi, Y. Masuya, R. Ozawa, M. Ishida, and K. Sawada
    • Organizer
      2015 Int. Conf. on Electronics Packaging & iMAPS All Asia Conf.
    • Place of Presentation
      kyoto
    • Year and Date
      2015-04-14 – 2015-04-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] Development of nanocavity sealing process for MEMS optical interferometric biosensor2015

    • Author(s)
      K. Takahashi, Y. Masuya, R. Ozawa, M. Ishida, and K. Sawada
    • Organizer
      2015 Int. Conf. on Electronics Packaging & iMAPS All Asia Conf.
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-04-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] マイクロ流路を一体化したMEMS Fabry-Perot干渉型表面応力センサの製作2015

    • Author(s)
      桝屋善光,小澤遼,石田誠,澤田和明,髙橋一浩
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] リング型PZT電極を用いたMEMS共振センサの製作2015

    • Author(s)
      髙橋一浩,石田誠,澤田和明
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] MEMS光干渉計を利用した表面応力センサにおける分子吸着に対するダイアフラムの変形評価2014

    • Author(s)
      髙橋一浩,小澤遼,石田誠,澤田和明
    • Organizer
      第31回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      くにびきメッセ、松江
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] Estimation of diaphragm deformation induced by molecular adsorption on MEMS optical interferometric biosensor2014

    • Author(s)
      K. Takahashi, R. Ozawa, M. Ishida, and K. Sawada
    • Organizer
      Int. Conf. on Optical MEMS & Nanophotonics 2014
    • Place of Presentation
      Glasgow, Scotland
    • Year and Date
      2014-08-17 – 2014-08-21
    • Related Report
      2014 Annual Research Report
  • [Presentation] 多層グラフェンブリッジを用いたMEMS共振型質量センサ2014

    • Author(s)
      石田隼斗,髙橋一浩,大橋亮太,石田誠,澤田和明
    • Organizer
      第5回集積化MEMS技術研究ワークショップ
    • Place of Presentation
      豊橋技術科学大学VBL
    • Year and Date
      2014-07-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Fabry-Perot干渉型バイオセンサにおける生体分子吸着に対するParylene-Cダイアフラム変形評価2014

    • Author(s)
      桝屋善光,高橋一浩,小澤遼,石田誠,澤田和明
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      豊橋技術科学大学VBL
    • Year and Date
      2014-07-10 – 2014-07-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Highly sensitive MEMS Fabry-Perot interferometric biosensor with Ag half-mirror and responsivity photodiode2014

    • Author(s)
      Y. Masuya, K. Takahashi, R. Ozawa, T. Hizawa, M. Ishida, and K. Sawada
    • Organizer
      7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies
    • Place of Presentation
      Daegu, Korea
    • Year and Date
      2014-06-29 – 2014-07-02
    • Related Report
      2014 Annual Research Report
  • [Presentation] Fabrication of large area graphene resonator for capacitive mass sensing2014

    • Author(s)
      R. Ohashi, K. Takahashi, M. Ishida, and K. Sawada
    • Organizer
      7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies
    • Place of Presentation
      Daegu, Korea
    • Year and Date
      2014-06-29 – 2014-07-02
    • Related Report
      2014 Annual Research Report
  • [Presentation] Piezoelectric MEMS resonator based on PZT thin films for chemical and biological sensing2014

    • Author(s)
      K. Takahashi, C. Sasaki, M. Tani, T. Koyama, M. Akamatsu, Y. Yasuda, M. Ishida, and K. Sawada
    • Organizer
      7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies
    • Place of Presentation
      Daegu, Korea
    • Year and Date
      2014-06-29 – 2014-07-02
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高い波長選択性を持つMEMS Fabry-Perot干渉計を用いた表面応力セン2014

    • Author(s)
      桝屋善光,高橋一浩,小澤遼,飛沢健,石田誠,澤田和明
    • Organizer
      平成26年度電気学会センサ・マイクロマシン部門総合研究会
    • Place of Presentation
      東京大学生産技術研究所
    • Year and Date
      2014-05-27 – 2014-05-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] 多層グラフェンを用いたMEMS共振器の作製と質量計測2014

    • Author(s)
      髙橋一浩,大橋亮太,石田誠,澤田和明
    • Organizer
      平成26年度電気学会センサ・マイクロマシン部門総合研究会
    • Place of Presentation
      東京大学生産技術研究所
    • Year and Date
      2014-05-27 – 2014-05-28
    • Related Report
      2014 Annual Research Report
  • [Book] IoT/CPS/M2M応用市場とデバイス・材料技術 第6章 第4節「スマートセンサの開発と応用展望」2015

    • Author(s)
      高橋一浩,澤田和明 (監修 櫻井貴康)
    • Total Pages
      10
    • Publisher
      S&T出版
    • Related Report
      2015 Annual Research Report
  • [Book] 今後の超高齢化社会に求められる生活支援(医療・福祉・介護・リハビリ)ロボット技術 第4章第2節第8項「集積回路技術とセンサ技術を融合した種々のスマートセンサ」2015

    • Author(s)
      高橋一浩,澤田和明 (監修 寺嶋一彦)
    • Total Pages
      5
    • Publisher
      情報機構
    • Related Report
      2015 Annual Research Report
  • [Book] IoT/CPS/M2M応用市場とデバイス・材料技術(第6章、第4節 スマートセンサの開発と応用展望)2015

    • Author(s)
      高橋一浩,澤田和明
    • Total Pages
      10
    • Publisher
      S&T出版
    • Related Report
      2014 Annual Research Report
  • [Remarks]

    • URL

      http://int.ee.tut.ac.jp/icg/wp/

    • Related Report
      2016 Annual Research Report
  • [Remarks]

    • URL

      http://int.ee.tut.ac.jp/icg/wp/

    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] 物理・化学センサ、物理・化学センサアレイおよび物理・化学センシングデバイス2016

    • Inventor(s)
      高橋一浩
    • Industrial Property Rights Holder
      豊橋技術科学大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-03-04
    • Related Report
      2015 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 物理・化学センサアレイおよび物理・化学センシングデバイス2015

    • Inventor(s)
      高橋一浩
    • Industrial Property Rights Holder
      国立大学法人豊橋技術科学大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-050715
    • Filing Date
      2015-03-13
    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] 物理・化学センサおよび物理・化学現象センシングデバイスならびにこれらの製造方法2014

    • Inventor(s)
      高橋一浩,小澤遼,澤田和明
    • Industrial Property Rights Holder
      国立大学法人豊橋技術科学大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-085931
    • Filing Date
      2014-04-17
    • Related Report
      2014 Annual Research Report

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Published: 2014-04-04   Modified: 2018-03-22  

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