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Photo-induced volume change of amorphous carbon nitride thin films

Research Project

Project/Area Number 26790054
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
Research Institution防衛大学校(総合教育学群、人文社会科学群、応用科学群、電気情報学群及びシステム工学群)

Principal Investigator

Aono Masami  防衛大学校(総合教育学群、人文社会科学群、応用科学群、電気情報学群及びシステム工学群), 電気情報学群, 准教授 (80531988)

Research Collaborator HARATA Tomo  防衛大学校, 大学院理工学研究科, 学生
TAMURA Naoyuki  防衛大学校, 大学院理工学研究科, 学生
MIYAZAKI Hisashi  防衛大学校, 電気情報学群, 助教 (30531991)
KISHIMURA Hiroaki  防衛大学校, 電気情報学群, 講師 (40535332)
ABE Hiroshi  防衛大学校, 電気情報学群, 教授 (60535300)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Keywords窒化炭素 / アモルファス / 光 / エネルギー変換 / マイクロマシーン / 光誘起体積変化 / 光電効果 / 時間依存性 / 光駆動 / 光熱効果 / 分光分析
Outline of Final Research Achievements

Photoinduced volume change, which is a deformation induced by irradiation of visible light, is revealed in amorphous carbon nitride thin films prepared by reactive sputtering. The aim of this study is elucidation of the origin of the deformation. As a result of spectroscopic measurement, an existence of C=N bonding structure is the most important for the deformaion. In addition, the deformation of amorphous carbon nitride films primarily induced by photon energy directly. Macroscopic deformation was observed in carbon nitride deposited on polymer films. Finally, we prototyped a light-driven pump with a diaphragm of amorphous carbon nitride film on quartz and polymer films. Pumping motion according to on/off of the visible light was observed.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (29 results)

All 2017 2016 2015 2014 Other

All Journal Article (9 results) (of which Acknowledgement Compliant: 9 results,  Peer Reviewed: 7 results,  Open Access: 1 results) Presentation (19 results) (of which Int'l Joint Research: 3 results,  Invited: 3 results) Remarks (1 results)

  • [Journal Article] アモルファス窒化炭素薄膜の光誘起変形2017

    • Author(s)
      青野祐美、原田人萌
    • Journal Title

      ニューダイヤモンド

      Volume: 33 Pages: 32-33

    • Related Report
      2016 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] Contribution of nitrogen to the photo-induced deformation in amorphous carbon nitride2016

    • Author(s)
      Tomo Harata, Masami Aono, Nobuaki Kitazawa, Yoshihisa Watanabe
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 1S Pages: 01AA01-01AA01

    • DOI

      10.7567/jjap.55.01aa01

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Response to visible light in amorphous carbon nitride films prepared by reactive sputtering2016

    • Author(s)
      Masami Aono, Tomo Harata, Nobuaki Kitazawa, Yoshihisa Watanabe
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 1S Pages: 01AA03-01AA03

    • DOI

      10.7567/jjap.55.01aa03

    • NAID

      210000145919

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Long-term irradiation effects of visible light on amorphous carbon nitride films2016

    • Author(s)
      Tomo Harata, Masami Aono, Nobuaki Kitazawa, Yoshihisa Watanabe
    • Journal Title

      Diamond and Related Materials

      Volume: 63 Pages: 132-135

    • DOI

      10.1016/j.diamond.2015.09.011

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Photomechanical response of amorphous carbon nitride thin films on SIO2 substrate2015

    • Author(s)
      Tomo Harata, Masami Aono, Nobuaki Kitazawa, Yoshihisa Watanabe
    • Journal Title

      e-Journal of Molecular Liquids

      Volume: 13 Issue: 0 Pages: 352-356

    • DOI

      10.1380/ejssnt.2015.352

    • NAID

      130005085428

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Spectroscopic analysis of photo-induced deformation of amorphous carbon nitride films2015

    • Author(s)
      Tomo Harata, Masami Aono, Naoyuki Tamura, Nobuaki Kitazawa, Yoshihisa Watanabe
    • Journal Title

      Journal of Physics: Conference Series

      Volume: 619 Pages: 012007-012007

    • DOI

      10.1088/1742-6596/619/1/012007

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Electrical resistivity response of amorphous carbon nitride thin films in various gas atmospheres2015

    • Author(s)
      Naoyuki Tamura, Masami Aono, Hiroshi Abe, Nbuaki Kitazawa, Yoshihisa Watanabe
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 4 Pages: 041401-041401

    • DOI

      10.7567/jjap.54.041401

    • NAID

      210000144906

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] スパッタ法で作製したアモルファス窒化炭素薄膜の光誘起体積変化2015

    • Author(s)
      青野祐美
    • Journal Title

      Sputtering and Plasma Processes

      Volume: 30 Pages: 1-10

    • Related Report
      2014 Research-status Report
    • Acknowledgement Compliant
  • [Journal Article] Correlation of photo thermal conversion on the photo-induced deformation of amorphous carbon nitride films prepared by reactive sputtering2014

    • Author(s)
      T. Harata, M. Aono, N. Kitazawa, Y. Watanabe
    • Journal Title

      Applied Physics Letters

      Volume: 105 Issue: 5 Pages: 051905-051905

    • DOI

      10.1063/1.4892475

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] アモルファス窒化炭素薄膜の光誘起変形と光駆動ポンプへの応用2017

    • Author(s)
      青野祐美、原田人萌、北沢信章、渡邉芳久
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県横浜市
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Deposition of amorphous carbon nitride films on flexible substrates by reactive sputtering2017

    • Author(s)
      M. Aono, T. Harata, D. Orihara, H. Miyazaki, M. Nogi
    • Organizer
      9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      愛知県春日井市
    • Year and Date
      2017-03-01
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ポリマーフィルム上に体積したアモルファス窒化炭素薄膜の光誘起変形2016

    • Author(s)
      原田人萌、青野祐美、北沢信章、渡邉芳久
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      新潟県新潟市
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 反応性スパッタ法で作製したアモルファス窒化炭素薄膜の化学結合状態と光エネルギー変換2016

    • Author(s)
      青野祐美、原田人萌、宮崎尚、阿部洋、石井信伍、佐藤庸平、寺内正己
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      新潟県新潟市
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] アモルファス窒化炭素の光学応答2016

    • Author(s)
      青野祐美
    • Organizer
      液体の不規則性・不均一性・階層性に関する研究会
    • Place of Presentation
      東京都文京区
    • Year and Date
      2016-04-16
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] スパッタ法により作製したアモルファス窒化炭素薄膜における投入電力の影響とその光誘起体積変形2016

    • Author(s)
      原田人萌, 青野祐美, 北沢信章, 渡邉芳久
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京都目黒区
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] セルロースナノペーパー上に堆積したアモルファス窒化炭素薄膜の光誘起変形2016

    • Author(s)
      青野祐美, 浅井慎之介, 小田原啄, 原田人萌, 能木雅也
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京都目黒区
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] Visible-light-driven oscillation behavior of amorphous carbon nitride for microactuators2015

    • Author(s)
      Masami Aono, Tomo Harata, Nobuaki Kitazawa, Yoshihisa Watanabe
    • Organizer
      25th Annual Meeting of MES-Japan 2015
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2015-12-08
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] アモルファス窒化炭素薄膜におよぼす成膜圧力の影響とその光誘起体積変形2015

    • Author(s)
      原田人萌, 青野祐美, 北沢信章, 渡邉芳久
    • Organizer
      第28回ダイヤモンドシンポジウム
    • Place of Presentation
      東京都葛飾区
    • Year and Date
      2015-11-17
    • Related Report
      2015 Research-status Report
  • [Presentation] アモルファス窒化炭素薄膜を用いた光駆動ダイヤフラムの試作2015

    • Author(s)
      原田人萌, 青野祐美, 北沢信章, 渡邉芳久
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      愛知県名古屋市
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] Long-term irradiation effects of visible light on amorphous carbon nitride films2015

    • Author(s)
      Tomo Harata, Masami Aono, Hisahi Miyazaki, Nobuaki Kitazawa, Yoshihisa Watanabe
    • Organizer
      9th International Conference on New Diamond and Nano Carbons
    • Place of Presentation
      Shizuoka, Japan
    • Year and Date
      2015-05-24
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Contribution of Nitrogen to the Photo-induced Deformation in Amorphous Carbon Nitride FIlms2015

    • Author(s)
      Tomo Harata, Masami Aono, Nobuaki Kitazawa, Yoshihisa Watanabe
    • Organizer
      7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2015-03-26 – 2015-03-31
    • Related Report
      2014 Research-status Report
  • [Presentation] Response to Visible Light in Amorphous Carbon Nitride Films Prepared by Reactive Sputtering2015

    • Author(s)
      Masami Aono, Tomo Harata, Nobuaki Kitazawa, Yoshihisa Watanabe
    • Organizer
      7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2015-03-26 – 2015-03-31
    • Related Report
      2014 Research-status Report
  • [Presentation] アモルファス窒化炭素薄膜の光誘起体積変化における長時間光照射の影響2015

    • Author(s)
      原田人萌, 青野祐美, 北沢信章, 渡邉芳久
    • Organizer
      第62回応用物理学会春期学術講演会
    • Place of Presentation
      神奈川県平塚市
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Research-status Report
  • [Presentation] スパッタ法で作製したアモルファス窒化炭素薄膜の光誘起体積変化2015

    • Author(s)
      青野祐美
    • Organizer
      日本真空学会スパッタリングおよびプラズマプロセス技術部会
    • Place of Presentation
      東京都港区
    • Year and Date
      2015-03-09
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] アモルファス窒化炭素薄膜の光誘起体積変化に及ぼす光熱効果2014

    • Author(s)
      原田人萌, 青野祐美, 北沢信章, 渡邉芳久
    • Organizer
      第28回ダイヤモンドシンポジウム
    • Place of Presentation
      東京都足立区
    • Year and Date
      2014-11-19 – 2014-11-21
    • Related Report
      2014 Research-status Report
  • [Presentation] Photomechanical response of amorphous carbon nitride thin films on SiO2 substrate2014

    • Author(s)
      Masami Aono, Tomo Harata, Nobuaki Kitazawa, Yoshihisa Watanabe
    • Organizer
      The 7th International Symposium on Surface Science
    • Place of Presentation
      Matsue, Japan
    • Year and Date
      2014-11-02 – 2014-11-06
    • Related Report
      2014 Research-status Report
  • [Presentation] ACベンディング法を用いたアモルファス窒化炭素薄膜の可逆性光誘起現象の評価2014

    • Author(s)
      原田人萌, 青野祐美, 北沢信章, 渡邉芳久
    • Organizer
      第75回応用物理学会秋期学術講演会
    • Place of Presentation
      北海道札幌市
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] Spectroscopic analysis of photo-induced deformation of amorphous carbon nitride films2014

    • Author(s)
      Tomo Harata, Masami Aono, Naoyuki Tamura, Nobuaki Kitazawa, Yoshihisa Watanabe
    • Organizer
      Sixth International COnference on Optical, Optoelectronic and Photonic Materials and Applications
    • Place of Presentation
      Leeds, UK
    • Year and Date
      2014-07-27 – 2014-08-01
    • Related Report
      2014 Research-status Report
  • [Remarks] アモルファス窒化炭素薄膜の光誘起変形と光駆動デバイスへの応用

    • URL

      http://www.nda.ac.jp/cc/mse/_system/Research.pdf

    • Related Report
      2016 Annual Research Report

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Published: 2014-04-04   Modified: 2019-02-04  

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