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Development of anisotropy-control-technique of amorphous carbon by plasma CVD under atmospheric pressure

Research Project

Project/Area Number 26790065
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Plasma electronics
Research InstitutionKushiro National College of Technology

Principal Investigator

Saito Seiki  釧路工業高等専門学校, 創造工学科, 准教授 (40725024)

Research Collaborator TAKAMURA Shuichi  
OHNO Noriyasu  
YAMADA Hideaki  
NAKAMURA Hiroaki  
TAMURA Yuichi  
Project Period (FY) 2014-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2017: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2016: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywordsアモルファス炭素 / 大気圧 / マイクロ波 / プラズマ / 堆積 / 炭素 / 大気圧プラズマ / 分子シミュレーション / プラズマCVD / タングステン / 繊維状ナノ構造
Outline of Final Research Achievements

Plasma jet was successfully generated in atmospheric pressure by microwave excitation. A chamber was also installed surrounding the jet plasma to cut off the oxygen in surrounding atmosphere by filling nitrogen gas in the chamber. Oxidized carbon deposits are obtained by methane plasma irradiation in the air. However, carbon deposits which does not bond to oxygen atom are observed when methane plasma is irradiated in a chamber with no oxygen. In addition, it was confirmed that fibrous nanostructures were generated on the tungsten surface as a result of helium plasma irradiation to tungsten substrate by the same device.

Report

(5 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (48 results)

All 2018 2017 2016 2015 2014

All Journal Article (17 results) (of which Peer Reviewed: 17 results,  Open Access: 2 results,  Acknowledgement Compliant: 6 results) Presentation (31 results) (of which Int'l Joint Research: 14 results,  Invited: 1 results)

  • [Journal Article] Energy absorption on the surface of bubble formed tungsten materials under plasma irradiation2017

    • Author(s)
      S. Saito, H. Nakamura
    • Journal Title

      Proc. 36th JSST Annual International Conference

      Volume: -

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Education for Nuclear Fusion Technology through Collaborative Research with NIFS and Nuclear Human Resource Development Program by NIT2017

    • Author(s)
      S. Saito
    • Journal Title

      Proc. 2017 International Symposium on Advances in Technology Education

      Volume: -

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of polycrystralline structure on helium plasma irradiation to tungsten materials」、『Japanese Journal of Applied Physics2017

    • Author(s)
      S. Saito, H. Nakamura, S. Yooyen, N. Ashikawa, K. Katayama
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Comparison of induced damage, range, reflection, and sputtering yield between amorphous, bcc crystalline, and bubble-containing tungsten materials under hydrogen isotope and noble gas plasma irradiations2017

    • Author(s)
      Seiki Saito, Hiroaki Nakamura, and Masayuki Tokitani
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 1S Pages: 01AF04-01AF04

    • DOI

      10.7567/jjap.56.01af04

    • NAID

      210000147395

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Determination of dynamical changes in sputtering and retention on bubble-growing tungsten under helium plasma irradiation by binary-collision-approximation-based simulation2016

    • Author(s)
      S. Saito, H. Nakamura, M. Tokitani, R. Sakaue, and K. Yoshida
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 1S Pages: 01AH07-01AH07

    • DOI

      10.7567/jjap.55.01ah07

    • NAID

      210000146004

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Hybrid simulation research on formation mechanism of tungsten nanostructure induced by helium plasma irradiation2015

    • Author(s)
      A. M. Ito, A. Takayama, Y. Oda, T. Tamura, R. Kobayashi, T. Hattori, S. Ogata, N. Ohno, S. Kajita, M. Yajima, Y. Noiri, Y. Yoshimoto, S. Saito, S. Takamura, T. Murashima, M. Miyamoto, and H. Nakamura
    • Journal Title

      Journal of Nuclear Material

      Volume: 印刷中 Pages: 109-115

    • DOI

      10.1016/j.jnucmat.2015.01.018

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Bubble formation in tungsten material under energetic helium ion injection2015

    • Author(s)
      S. Saito, M. Tokitani, and H. Nakamura
    • Journal Title

      Proceedings of 34th JSST Annual Conference

      Volume: - Pages: 26-29

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Molecular Simulation of Hydrogen Plasma Irradiation into Bubble Formed Tungsten Material2015

    • Author(s)
      S. Saito, H. Nakamura, and M. Tokitani
    • Journal Title

      Proceedings of ICAEE2015

      Volume: -

    • Related Report
      2015 Research-status Report
    • Peer Reviewed
  • [Journal Article] Sputtering yield of argon irradiation onto tungsten nano-structure2015

    • Author(s)
      H. Nakamura, S. Saito, A. M. Ito, and A. Takayama
    • Journal Title

      Proceedings of 34th JSST Annual Conference

      Volume: - Pages: 18-21

    • Related Report
      2015 Research-status Report
    • Peer Reviewed
  • [Journal Article] Dependence of Noble Gas Absorption upon Crystal Orientation of Tungsten2015

    • Author(s)
      H. Nakamura, S. Saito, and A. M. Ito
    • Journal Title

      Proceedings of NOLTA2015

      Volume: -

    • Related Report
      2015 Research-status Report
    • Peer Reviewed
  • [Journal Article] Nuclear Human research development in National Institutes of Technology2015

    • Author(s)
      Seiji Kino, Eiji Takada, Hideki Tenzou, Fumito Sakamoto, Atsushi Minoda, Shigekazu Suzuki, Seiki Saito, Itaru Nakamura, Chisato Mouri, Yasuo Ohta
    • Journal Title

      Proceedings of 7th ICEED

      Volume: - Pages: 16-19

    • DOI

      10.1109/iceed.2015.7451484

    • Related Report
      2015 Research-status Report
    • Peer Reviewed
  • [Journal Article] Material Temperature Dependence of Retention and Sputtering Yield of Single Crystalline Graphite under Hydrogen Plasma Irradiation2015

    • Author(s)
      Seiki Saito, Masayuki Tokitani, Hiroaki Nakamura
    • Journal Title

      Plasma and Fusion Resarch

      Volume: -

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Molecular dynamics and Monte-Carlo hybrid simulation for fuzzy tungsten nanostructure formation2015

    • Author(s)
      Ito, Atsushi; Takayama, Arimichi; Oda, Yasuhiro; Tamura, Tomoyuki; Kobayashi, Ryo; Hattori, Tatsunori; Ogata, Shuji; Ohno, Noriyasu; Kajita, Shin; Yajima, Miyuki; Noiri, Yasuyuki; Yoshimoto, Yoshihide; Saito, Seiki; Takamura, Shuichi; Murashima, Takahiro; Miyamoto, M; Nakamura, Hiroaki
    • Journal Title

      Nuclear Fusion

      Volume: -

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Molecular Dynamics Simulation of Helium Bubble Bursting on Tungsten Surfaces2014

    • Author(s)
      A. M. Ito, Y. Yoshimoto, S. Saito, A. Takayama, H. Nakamura
    • Journal Title

      Physica Scripta

      Volume: T159 Pages: 14062-14062

    • DOI

      10.1088/0031-8949/2014/t159/014062

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Binary-collision-approximation simulation for noble gas irradiation onto plasma facing materials2014

    • Author(s)
      Seiki Saito, Hiroaki Nakamura, Arimichi Takayama and Atsushi M. Ito
    • Journal Title

      Journal of Physics: Conference Series

      Volume: 490 Pages: 012169-012169

    • DOI

      10.1088/1742-6596/490/1/012169

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Journal Article] Progress of Binary-Collision-Approximation-Based Simulation for Surface Erosion by Plasma Irradiation2014

    • Author(s)
      Seiki Saito, Masayuki Tokitani, Hiroaki Nakamura
    • Journal Title

      Springer CCIS

      Volume: 474 Pages: 176-186

    • DOI

      10.1007/978-3-662-45289-9_16

    • ISBN
      9783662452882, 9783662452899
    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Binary-Collision-Approximation- Based Simulation of Plasma Irradiation to Tungsten Material2014

    • Author(s)
      Shuto INABE, Kenta YOSHIDA, Ryota SAKAUE, Takahiro SASAMOTO, Hiroaki NAKAMURA, Seiki SAITO
    • Journal Title

      Proceedings of ISTS 2014

      Volume: -

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Finite Temperature Effect on Helium Plasma Irradiation to Bubble-formed Tungsten Material2018

    • Author(s)
      S. Saito, M. Tokitani, H. Nakamura
    • Organizer
      Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials 2018
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Molecular simulation for the investigation of helium bubble effects on plasma irradiation to tungsten material2017

    • Author(s)
      S. Saito, H. Nakamura, M. Tokitani, N. Ashikawa, K. Katayama
    • Organizer
      A3 Foresight Program Workshop
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Energy absorption on the surface of bubble formed tungsten materials under plasma irradiation2017

    • Author(s)
      S. Saito, H. Nakamura
    • Organizer
      36th JSST Annual International Conference on Simulation Technology
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Education for Nuclear Fusion Technology through Collaborative Research with NIFS and Nuclear Human Resource Development Program by NIT2017

    • Author(s)
      S. Saito
    • Organizer
      International Symposium on Advances in Technology Education
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of a Model for Hydrogen Recycling on Carbon Divertor by Molecular Dynamics Simulation2017

    • Author(s)
      S. Saito, H. Nakamura, K. Sawada, M. Hasuo, M. Kobayashi, G. Kawamura
    • Organizer
      16th International Conference on Plasma-Facing Materials and Components for Fusion Applications
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Molecular Simulation of Plasma-Material Interaction for Nuclear Fusion Device2016

    • Author(s)
      S. Saito, H. Nakamura, and M. Tokitani
    • Organizer
      the 1st Japan-Thailand Workshop on Numerical and Experimental Approaches to Nonlinear Problems
    • Place of Presentation
      Bangkok (Thai)
    • Year and Date
      2016-12-06
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] 大気圧プラズマを利用したタングステン繊維状ナノ構造生成可能性の検討2016

    • Author(s)
      佐藤功明, 古仲美緒, 中村浩章, 時谷政行, 矢嶋美幸, 菊池崇志, 斎藤誠紀
    • Organizer
      核融合エネルギー連合講演会
    • Place of Presentation
      九州大学(福岡県春日市)
    • Year and Date
      2016-07-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Effect of Helium Bubbles in Tungsten in Plasma-Material Interaction2016

    • Author(s)
      S. Saito, H. Nakamura, and M. Tokitani
    • Organizer
      18th International Congress on Plasma Physics
    • Place of Presentation
      Kaohsiung (Taiwan)
    • Year and Date
      2016-06-27
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Simulation Study of Hydrogen Retention on Bubble-formed Tungsten Material2016

    • Author(s)
      S. Saito, H. Nakamura, M. Tokitani
    • Organizer
      22nd International Conference on Plasma Surface Interaction
    • Place of Presentation
      Rome (Italy)
    • Year and Date
      2016-05-30
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] ヘリウムバブル構造の発生に伴うリテンション特性の変化2016

    • Author(s)
      斎藤誠紀, 中村浩章, 時谷政行
    • Organizer
      日本物理学会 第71回年次大会
    • Place of Presentation
      仙台
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] Retention on Bubble Formed Tungsten under Plasma Irradiation2016

    • Author(s)
      S. Saito, M. Tokitani, and H. Nakamura
    • Organizer
      8th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2016-03-06
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] ヘリウムバブルが形成されたタングステン材のプラズマ-材料相互作用2016

    • Author(s)
      斎藤誠紀, 中村浩章, 時谷政行
    • Organizer
      日本原子力学会北海道支部第33回研究発表会 プラズマ・核融合学会北海道地区研究連絡会第19回研究会
    • Place of Presentation
      札幌
    • Year and Date
      2016-02-16
    • Related Report
      2015 Research-status Report
  • [Presentation] Molecular Simulation of Hydrogen Plasma Irradiation into Bubble Formed Tungsten Material2015

    • Author(s)
      S. Saito, H. Nakamura, and M. Tokitani
    • Organizer
      3rd International Conference on Advances in Electrical Engineering
    • Place of Presentation
      Dhaka, Bangladesh
    • Year and Date
      2015-12-17
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Penetration of Helium Ions into Tungsten Material with Nanoporous Structure2015

    • Author(s)
      S. Saito, K. Yoshida, and H. Nakamura
    • Organizer
      2015 International Symposium on Nonlinear Theory and its Applications
    • Place of Presentation
      Hong Kong, China
    • Year and Date
      2015-12-01
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] ヘリウムバブル形成にともなうタングステン材のスパッタリング特性およびヘリウムリテンション特性の動的変化2015

    • Author(s)
      斎藤誠紀, 時谷政行, 中村浩章
    • Organizer
      第32回プラズマ・核融合学会 年会
    • Place of Presentation
      名古屋
    • Year and Date
      2015-11-24
    • Related Report
      2015 Research-status Report
  • [Presentation] Erosion of bubble formed tungsten materials2015

    • Author(s)
      S. Saito, M. Tokitani, and H. Nakamura
    • Organizer
      25th International Toki Conference
    • Place of Presentation
      Toki, Japan
    • Year and Date
      2015-11-03
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Bubble formation in tungsten material under energetic helium ion injection2015

    • Author(s)
      S. Saito, M. Tokitani, and H. Nakamura
    • Organizer
      34th JSST Annual Conference
    • Place of Presentation
      Toyama, Japan
    • Year and Date
      2015-10-12
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] ヘリウムバブル形成下におけるタングステン材のプラズマ‐材料相互作用2015

    • Author(s)
      斎藤誠紀, 時谷政行, 中村浩章
    • Organizer
      プラズマ壁相互作用における非線形現象の理論モデル構築と画像・動画解析手法開発に関する研究会
    • Place of Presentation
      土岐
    • Year and Date
      2015-09-28
    • Related Report
      2015 Research-status Report
  • [Presentation] ヘリウムバブル形成下におけるタングステン材のプラズマ‐材料相互作用特性2015

    • Author(s)
      斎藤誠紀, 時谷政行, 中村浩章
    • Organizer
      プラズマシミュレータシンポジウム2015
    • Place of Presentation
      土岐
    • Year and Date
      2015-09-03
    • Related Report
      2015 Research-status Report
  • [Presentation] 二体衝突近似法を用いたタングステン材への希ガス照射シミュレーション2015

    • Author(s)
      斎藤誠紀, 時谷政行, 中村浩章
    • Organizer
      核融合炉工学・炉材料モデリング研究作業会
    • Place of Presentation
      京都
    • Year and Date
      2015-08-31
    • Related Report
      2015 Research-status Report
  • [Presentation] 希ガスプラズマ-タングステン相互作用系の二体衝突近似計算2015

    • Author(s)
      斎藤誠紀, 時谷政行, 中村浩章
    • Organizer
      釧路高専第5回若手理・工学セミナー
    • Place of Presentation
      釧路
    • Year and Date
      2015-08-12
    • Related Report
      2015 Research-status Report
  • [Presentation] Sputtering Process of Tungsten Material under Noble Gas Irradiation by Binary- Collision-Approximation-Based Simulation2015

    • Author(s)
      S. Saito, M. Tokitani, and H. Nakamura
    • Organizer
      The 13th International Symposium on Sputtering & Plasma Processes
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-07-08
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Erosion of tungsten material under hydrogen plasma irradiation by binary-collision-approximation-based simulation2015

    • Author(s)
      SEIKI SAITO, HIROAKI NAKAMURA AND MASAYUKI TOKITANI
    • Organizer
      7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      名古屋大学
    • Year and Date
      2015-03-30
    • Related Report
      2014 Research-status Report
  • [Presentation] 拡散過程および構造緩和過程を考慮した二体衝突近似シミュレーション2015

    • Author(s)
      斎藤誠紀、時谷政行、中村浩章
    • Organizer
      プラズマ壁相互作用に関する新規シミュレーション手法開発に関する研究会
    • Place of Presentation
      土岐
    • Year and Date
      2015-01-26
    • Related Report
      2014 Research-status Report
  • [Presentation] 粒子拡散および構造緩和過程を考慮した二体衝突近計算コードの開発2015

    • Author(s)
      齋藤誠紀,稻邊秀斗,時谷政行,中村浩章
    • Organizer
      自然科学における階層と全体
    • Place of Presentation
      名古屋
    • Year and Date
      2015-01-19
    • Related Report
      2014 Research-status Report
  • [Presentation] 4th International Symposium on Technology for Sustainability2014

    • Author(s)
      Shuto INABE, Kenta YOSHIDA, Ryota SAKAUE, Takahiro SASAMOTO, Hiroaki NAKAMURA, Seiki SAITO
    • Organizer
      Binary-Collision-Approximation-Based Simulation of Plasma Irradiation to Tungsten Material
    • Place of Presentation
      台湾
    • Year and Date
      2014-11-20
    • Related Report
      2014 Research-status Report
  • [Presentation] Retention and Erosion Processes of Graphite under Hydrogen Plasma Irradiation2014

    • Author(s)
      Seiki Saito, Masayuki Tokitani, Atsushi M. Ito, Arimichi Takayama, Hiroaki Nakamura
    • Organizer
      23rd International Toki Conference
    • Place of Presentation
      Toki (Japan)
    • Year and Date
      2014-11-04
    • Related Report
      2014 Research-status Report
  • [Presentation] 照射損傷の動的過程解明のためのAC∀Tコードの改良2014

    • Author(s)
      斎藤誠紀、時谷政行、中村浩章
    • Organizer
      プラズマシミュレータシンポジウム
    • Place of Presentation
      土岐
    • Year and Date
      2014-09-11
    • Related Report
      2014 Research-status Report
  • [Presentation] SUS316L へのヘリウムプラズマ照射の二体衝突近似シミュレーション2014

    • Author(s)
      斎藤誠紀, 時谷政行, 中村浩章
    • Organizer
      日本物理学会2014年秋季大会
    • Place of Presentation
      中部大学
    • Year and Date
      2014-09-08
    • Related Report
      2014 Research-status Report
  • [Presentation] Study on Hydrogen Plasma - Carbon Material Interaction by Molecular Simulation in Submicron Scale2014

    • Author(s)
      SEIKI SAITO, ATSUSHI M. ITO, TAKAYAMA ARIMICHI AND HIROAKI NAKAMURA
    • Organizer
      XXVI IUPAP Conference on Computational Physics
    • Place of Presentation
      Boston (USA)
    • Year and Date
      2014-08-11
    • Related Report
      2014 Research-status Report
  • [Presentation] プラズマ照射に伴う金属材損耗およびプラズマ粒子蓄積の動的過程解明に向けた二体衝突近似コードの改良2014

    • Author(s)
      斎藤誠紀、時谷政行、中村浩章
    • Organizer
      第10回 核融合エネルギー連合講演会
    • Place of Presentation
      つく ば
    • Year and Date
      2014-06-19
    • Related Report
      2014 Research-status Report

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Published: 2014-04-04   Modified: 2019-03-29  

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