Development of anisotropy-control-technique of amorphous carbon by plasma CVD under atmospheric pressure
| Project/Area Number |
26790065
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Plasma electronics
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| Research Institution | Kushiro National College of Technology |
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Principal Investigator |
Saito Seiki 釧路工業高等専門学校, 創造工学科, 准教授 (40725024)
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| Research Collaborator |
TAKAMURA Shuichi
OHNO Noriyasu
YAMADA Hideaki
NAKAMURA Hiroaki
TAMURA Yuichi
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| Project Period (FY) |
2014-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2017: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2016: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
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| Keywords | アモルファス炭素 / 大気圧 / マイクロ波 / プラズマ / 堆積 / 炭素 / 大気圧プラズマ / 分子シミュレーション / プラズマCVD / タングステン / 繊維状ナノ構造 |
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| Outline of Final Research Achievements |
Plasma jet was successfully generated in atmospheric pressure by microwave excitation. A chamber was also installed surrounding the jet plasma to cut off the oxygen in surrounding atmosphere by filling nitrogen gas in the chamber. Oxidized carbon deposits are obtained by methane plasma irradiation in the air. However, carbon deposits which does not bond to oxygen atom are observed when methane plasma is irradiated in a chamber with no oxygen. In addition, it was confirmed that fibrous nanostructures were generated on the tungsten surface as a result of helium plasma irradiation to tungsten substrate by the same device.
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Report
(5 results)
Research Products
(48 results)
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[Journal Article] Hybrid simulation research on formation mechanism of tungsten nanostructure induced by helium plasma irradiation2015
Author(s)
A. M. Ito, A. Takayama, Y. Oda, T. Tamura, R. Kobayashi, T. Hattori, S. Ogata, N. Ohno, S. Kajita, M. Yajima, Y. Noiri, Y. Yoshimoto, S. Saito, S. Takamura, T. Murashima, M. Miyamoto, and H. Nakamura
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Journal Title
Journal of Nuclear Material
Volume: 印刷中
Pages: 109-115
DOI
Related Report
Peer Reviewed / Acknowledgement Compliant
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[Journal Article] Molecular dynamics and Monte-Carlo hybrid simulation for fuzzy tungsten nanostructure formation2015
Author(s)
Ito, Atsushi; Takayama, Arimichi; Oda, Yasuhiro; Tamura, Tomoyuki; Kobayashi, Ryo; Hattori, Tatsunori; Ogata, Shuji; Ohno, Noriyasu; Kajita, Shin; Yajima, Miyuki; Noiri, Yasuyuki; Yoshimoto, Yoshihide; Saito, Seiki; Takamura, Shuichi; Murashima, Takahiro; Miyamoto, M; Nakamura, Hiroaki
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Journal Title
Related Report
Peer Reviewed
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