| Project/Area Number |
26800143
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Particle/Nuclear/Cosmic ray/Astro physics
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| Research Institution | Nagoya University |
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Principal Investigator |
Mitsuishi Ikuyuki 名古屋大学, 理学(系)研究科(研究院), 助教 (90725863)
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| Project Period (FY) |
2014-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2015: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2014: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
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| Keywords | GCIB / X 線 / 光学系 / MEMS / X 線望遠鏡 |
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| Outline of Final Research Achievements |
We aim at improving the angular resolution of ultra-lightweight MEMS-processed X-ray optics by introducing GCIB (Gas Cluster Ion Beam) techniques. After GCIB processes, we confirmed that the process worked well at least on the front side of the optics. On the other hand, a significant change was not found on the back side, suggesting that the beam could not penetrate 20 um line and space Si pores or more power in the etching process is needed.
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