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Fabrication of p-type thin film transistor by molecular precursor method

Research Project

Project/Area Number 26810130
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Device related chemistry
Research InstitutionKogakuin University

Principal Investigator

NAGAI HIROKI  工学院大学, 先進工学部, 助教 (20559942)

Co-Investigator(Renkei-kenkyūsha) WATANABE Yasuyuki  諏訪東京理科大学, 工学部, 教授 (10339129)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Keywords分子プレカーサー法 / 薄膜 / トランジスタ / p型半導体 / 金属酸化物 / 薄膜トランジスタ / 溶液 / p型 / TFT / 分子プレカーサー / 酸化銅 / 基板 / シリコン基板 / 銅
Outline of Final Research Achievements

Cuprous oxide is widely been researched and applied as p-type TFT, solar cell, photocatalyst and so on. Recently, the pure cuprous oxide thin-films were fabricated by heat treating of precursor films involving Cu(II) complexes, through the molecular precursor method developed by us. In this study, the precursor solution including Cu(II) complex with ligand of EDTA and propylamine were prepared. The precursor films were fabricated by spin-coating the precursor solution onto silicon substrate and pre-heating at 70°C in air for 10 min. The precursor films were heated at 450°C for 30 min in argon. The XRD pattern of the resultant thin film is assignable to cuprous oxide, including slight amounts of CuO and Cu. It showed a low on-off current rate, the current (ID) increases by the gate bias (VG) decreasing. Moreover, ID showed the region changing from linear to saturation while continuously increased the VDS. These results indicate that the devices work as a p-type TFT.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (25 results)

All 2017 2016 2015 2014 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results,  Acknowledgement Compliant: 3 results,  Open Access: 1 results) Presentation (15 results) (of which Int'l Joint Research: 8 results,  Invited: 8 results) Book (3 results) Remarks (2 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Journal Article] Embedding of copper into submicrometer trenches in a silicon substrate using the molecular precursor solutions with copper nano-powder2016

    • Author(s)
      Hiroki Nagai, Tatsuya Suzuki, Takayuki Nakano, Mitsunobu Sato
    • Journal Title

      Materials Letters

      Volume: 182 Pages: 206-209

    • DOI

      10.1016/j.matlet.2016.06.123

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Photovoltaic lithium-ion battery fabricated by molecular precursor method2016

    • Author(s)
      Hiroki Nagai, Tatsuya Suzuki, Yoshihisa Takahashi, Mitsunobu Sato
    • Journal Title

      Materials Letters

      Volume: 9 Issue: 03 Pages: 1650046-1650046

    • DOI

      10.1142/s1793604716500466

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Photovoltaic lithium-ion battery fabricated by molecular precursor method2016

    • Author(s)
      Hiroki Nagai, Tatsuya Suzuki, Yoshihisa Takahashi, Mitsunobu Sato
    • Journal Title

      Functional Materials Letters

      Volume: -

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Conductive and semi-transparent Cu thin film fabricated using molecular precursor solutions2015

    • Author(s)
      H. Nagai, S. Mita, I. Takano, T. Honda and M. Sato
    • Journal Title

      Materials Letters

      Volume: 141 Pages: 235-237

    • DOI

      10.1016/j.matlet.2014.11.056

    • Related Report
      2015 Research-status Report 2014 Research-status Report
    • Peer Reviewed
  • [Presentation] NOVEL ROUTE TO CUPROUS OXIDE THIN FILMS FABRICATION2016

    • Author(s)
      Hiroki Nagai, Hsiang-Jung Wu, and Mitsunobu Sato
    • Organizer
      2016 INTERNATIONAL SYMPOSIUM ON NOVEL AND SUSTAINABLE TECHNOLOGY
    • Place of Presentation
      southern taiwan university of science and technology
    • Year and Date
      2016-10-06
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Cu2O thin-film fabrication from Cu(II) complex having2016

    • Author(s)
      Hsiang-Jung Wu, Hiroki Nagai, and Mitsunobu Sato
    • Organizer
      錯体化学会第66回討論会
    • Place of Presentation
      福岡大学
    • Year and Date
      2016-09-10
    • Related Report
      2016 Annual Research Report
  • [Presentation] EMBEDDING OF COPPER INTO SUBMICROMETER TRENCHES USING THE MOLECULAR PRECURSOR METHOD2016

    • Author(s)
      Hiroki Nagai, Tatsuya Suzuki, Takayuki Nakano, Mitsunobu Sato
    • Organizer
      The 5th Advanced Functional Materials and Devices
    • Place of Presentation
      蘇州
    • Year and Date
      2016-08-12
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication of Photovoltaic lithium ion battery using the molecular precursor method2016

    • Author(s)
      Hiroki Nagai, Tatsuya Suzuki, Yoshihisa Takahashi, Mitsunobu Sato
    • Organizer
      Fifth International Symposium on Energy Challenges and Mechanics
    • Place of Presentation
      Inverness
    • Year and Date
      2016-07-10
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of active materials for the cathode of photovoltaic lithium-ion battery, Energy Materials and Natotechnology photocatalysis2015

    • Author(s)
      Hiroki Nagai, Yoshihisa Takahashi, Tatsuya Suzuki and Mitsunobu Sato
    • Organizer
      Energy Materials and Natotechnology photocatalysis
    • Place of Presentation
      Las Vegas
    • Year and Date
      2015-11-21
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fabrication of photovoltaic lithium-ion battery with various cathodes2015

    • Author(s)
      Yoshihisa Takahashi, Hiroki Nagai, Tatsuya Suzuki, Mitsunobu Sato
    • Organizer
      The 14th International Symposium on Advanced Technology
    • Place of Presentation
      Tokyo
    • Year and Date
      2015-10-31
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Embedding of Copper into Trench of Si substrate using Molecular Precursor Method2015

    • Author(s)
      H. Nagai, T. Suzuki, T. Nakano, M. Sato
    • Organizer
      2015 INTERNATIONAL SYMPOSIUM ON NANO SCIENCE AND TECHNOLOGY
    • Place of Presentation
      Tainan
    • Year and Date
      2015-10-28
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Copper Thin Films Using the Molecular Precursor Method2015

    • Author(s)
      H. Nagai, T. Yamaguchi, T. Onuma, I. Takano, T. Honda, M. Sato
    • Organizer
      The 22nd International SPACC Symposium (The Society of Pure and Applied Coordination Chemistry)
    • Place of Presentation
      Namibia
    • Year and Date
      2015-08-13
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Embedding of Copper into Trench of Si Substrate by Molecular Precursor Method2015

    • Author(s)
      Hiroki Nagai, Takayuki Nakano, Ichiro Takano, Tohru Honda, Mitsunobu Sato
    • Organizer
      ICMAT 2015 (8th International Conference on Materials for Advanced Technologies)
    • Place of Presentation
      Singapore
    • Year and Date
      2015-06-28
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Thin-film devices fabricated by the molecular precursor method2014

    • Author(s)
      Mitsunobu Sato and Hiroki Nagai
    • Organizer
      13th International Symposium on Advanced Technology
    • Place of Presentation
      Danang University of Science and Technology, Vietnam
    • Year and Date
      2014-11-13 – 2014-11-15
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] Fabrication of thin films for oxide electronics by molecular precursor method2014

    • Author(s)
      Hiroki Nagai and Mitsunobu Sato
    • Organizer
      13th International Symposium on Advanced Technology
    • Place of Presentation
      Danang University of Science and Technology, Vietnam
    • Year and Date
      2014-11-13 – 2014-11-15
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] Fabrication of p-type Cu2O thin films for electronic devices by molecular precursor method2014

    • Author(s)
      Hiroki Nagai and Mitsunobu Sato
    • Organizer
      21th The Society of Pure and Applied Coordination Chemistry-CSJ Symposium
    • Place of Presentation
      Kogakuin University, Japan
    • Year and Date
      2014-10-31 – 2014-11-03
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] Thin Film Fabrication of the Functional Materials by the Molecular Precursor Method utilizing the Metal Complexes2014

    • Author(s)
      Mitsunobu Sato and Hiroki Nagai
    • Organizer
      International Symposium on Nanoscience and Technology
    • Place of Presentation
      Tainan, Taiwan
    • Year and Date
      2014-10-17 – 2014-10-18
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] Fabrication of copper metal thin films by the molecular precursor solution2014

    • Author(s)
      Hiroki Nagai, Shohei Mita, Tohru Honda, Ichiro Takano and Mitsunobu
    • Organizer
      The 15th IUMRS-International Conference in Asia
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2014-08-24 – 2014-08-30
    • Related Report
      2014 Research-status Report
  • [Presentation] Fabrication of copper thin films using the solution based method2014

    • Author(s)
      Hiroki Nagai, Takayuki Nakano, Shohei Mita, Tomohiro Yamaguchi, Ichiro Takano, Tohru Honda, Mitsunobu Sato
    • Organizer
      Third International Conference on Materials, Energy and Environments
    • Place of Presentation
      Honolulu, Hawaii
    • Year and Date
      2014-07-01 – 2014-07-03
    • Related Report
      2014 Research-status Report
    • Invited
  • [Book] Modern Technologies for Creating the Thin-film Systems and Coatings2017

    • Author(s)
      Hiroki Nagai, Mitsunobu Sato
    • Total Pages
      18
    • Publisher
      Intech
    • Related Report
      2016 Annual Research Report
  • [Book] Highly Functionalized Lithium-Ion Battery2017

    • Author(s)
      Hiroki Nagai, Mitsunobu Sato
    • Total Pages
      14
    • Publisher
      Intech
    • Related Report
      2016 Annual Research Report
  • [Book] Alkali-ion Battery2016

    • Author(s)
      Hiroki Nagai
    • Publisher
      Intech
    • Related Report
      2015 Research-status Report
  • [Remarks] 教員プロフィール

    • URL

      http://er-web.sc.kogakuin.ac.jp/Profiles/13/0001264/profile.html

    • Related Report
      2016 Annual Research Report
  • [Remarks] 配位工学研究室

    • URL

      http://www.ns.kogakuin.ac.jp/~wwf1017/

    • Related Report
      2015 Research-status Report
  • [Patent(Industrial Property Rights)] 金属膜形成用組成物および金属膜形成方法2016

    • Inventor(s)
      永井裕己,佐藤光史
    • Industrial Property Rights Holder
      永井裕己,佐藤光史
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-03-02
    • Related Report
      2015 Research-status Report
    • Overseas

URL: 

Published: 2014-04-04   Modified: 2018-03-22  

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