| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2014: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
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| Outline of Final Research Achievements |
In this study, back surface roughness evaluation method using ultrasonic techniques were suggested.
For the non-periodic random rough back surface, the root-mean-square roughness evaluation equation was established by forward analysis using Kirchhoff approximation. The effectiveness of this roughness evaluation equation was investigated by both numerical simulation and experiment. The evaluation errors were investigated by changing incident angle. As a result, the error was smallest at the incident angle was set at 0-degree.
For the periodic rough surface, it was found that the amplitude of the first peak frequency at 60-degree incident angle normalized by same frequency at 0-degree incident angle is increased monotonically if the surface height increases. The height evaluation equation was suggested using this relationship. The effectiveness of this height evaluation equation was investigated by experiment. The height of back-surface profile could be measured within 7 % error.
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