| Budget Amount *help |
¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2016: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2015: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2014: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
|
|---|
| Outline of Final Research Achievements |
The nonspherical multiple-bubble behavior in a megasonic field is analyzed using computational fluid dynamics to establish megasonic cleanig which is a physical cleaning method for semiconductor device. In the study of translational motion of multiple-bubble, two bubbles behavior are clasified according to the equilibrium radius and the useful characteristics for the megasonic cleaning without pattern damage. In the study of the oscillating behavior, when the number of bubbles increases, bubbles with a smaller equilibrium radius can induce high impulsive pressure. The result indicates that bubbles with a smaller equilibrium radius predicted by single bubble analysis contribute to the cleaning and pattern damage in the typical megasonic field including many bubbles.
|
