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Investigation of Sr-silicate layer as field effect passivation film for Si solar cell

Research Project

Project/Area Number 26820116
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Electronic materials/Electric materials
Research InstitutionUniversity of Hyogo

Principal Investigator

Hotta Yasushi  兵庫県立大学, 工学研究科, 准教授 (30418652)

Research Collaborator TANIWAKI Shota  兵庫県立大学, 工学研究科
YOSHIDA Haruhiko  兵庫県立大学, 工学研究科, 准教授
ARAFUNE Koji  兵庫県立大学, 工学研究科, 准教授
SATOH Shin-ichi  兵庫県立大学, 工学研究科, 特任教授
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2015: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2014: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
KeywordsSrシリケイト / シリコン / 固定電荷 / 電界効果パッシベーション / 太陽電池 / ストロンチウムシリケイト / 固定電荷密度 / ストロンチウム / シリケイト / 化学結合状態 / 実効固定電荷密度 / シリコン太陽電池 / 表面パッシベーション
Outline of Final Research Achievements

We studied strontium silicate (SrxSiOx+2, x = 1, 2, 3) films as field effect passivation layer for c-Si solar cells from the viewpoint of effective net charge density (Qeff). The Qeff values of the SrxSiOx+2/Si (100) samples were obtained from the shift in voltage of the flat band state in their capacitance - voltage curves. The Sr2SiO4/Si (100) (x=2) samples with a thickness of 15 nm annealed at 400 °C showed the maximum Qeff value of 1.03×10^13 Ccm^-2, which is enough positive charge to work as the field effect passivation layer. With increasing annealing temperature, the SrxSiOx+2 layer penetrated into the Si (100) substrate. This penetration may degrade the interfacial properties and decrease the Qeff value of the layers. For all the samples, the charges concentrated near the Sr2SiO4/Si (100) interface. It suggests that anion and cation migration play important roles in charge generation at the SrxSiOx+2/Si (100) interface.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (18 results)

All 2017 2016 2015 2014 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Open Access: 1 results,  Acknowledgement Compliant: 3 results) Presentation (13 results) (of which Int'l Joint Research: 3 results,  Invited: 1 results) Remarks (2 results)

  • [Journal Article] Investigation of the static electric field effect of strontium silicate layers on silicon substrates2017

    • Author(s)
      S. Taniwaki, K. Imanishi, M. Umano, H. Yoshida, K. Arafune, A. Ogura, S. Satoh, Y. Hotta
    • Journal Title

      Journal of Applied Physics

      Volume: -

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Room temperature formation of Hf-silicate layer by pulsed laser deposition with Hf-Si-O ternary reaction control2016

    • Author(s)
      Y. Hotta, S. Ueoka, H. Yoshida, K. Arafune, A. Ogura, S. Satoh
    • Journal Title

      AIP Advances

      Volume: 6 Issue: 10

    • DOI

      10.1063/1.4964932

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Correlation between chemical-bonding states and fixed-charge states of Sr-silicate film on Si(100) substrate2016

    • Author(s)
      S. Taniwaki, H. Yoshida, K. Arafune, A. Ogura, S. Satoh, Y. Hotta
    • Journal Title

      Journal of Vacuum Science & Technology A

      Volume: 34 Issue: 6

    • DOI

      10.1116/1.4966904

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] フーリエ変換赤外分光法によるSi(100)基板上のSr2SiO4薄膜の評価2017

    • Author(s)
      谷脇将太、馬野光博、新船幸二、吉田晴彦、佐藤真一、堀田育志
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Metal-silicon-oxygen ternary reaction control at oxide/silicon interface by pulsed laser deposition2017

    • Author(s)
      Y. Hotta
    • Organizer
      25th Symposium on Surface Science & Nanotechnology
    • Place of Presentation
      京都国際交流会館
    • Year and Date
      2017-01-24
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Influence of Post Annealing Treatment on Fixed Charge State and Chemical Bonding State of Sr-silicate Film2016

    • Author(s)
      S. Taniwaki, Mitsuhiro Umano, H. Yoshida, K. Arafune, S. Satoh, Y. Hotta
    • Organizer
      2016 Solid State Devices and Materials
    • Place of Presentation
      つくば国際会議場
    • Year and Date
      2016-09-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] HfO2/SiOx/Si 構造におけるC-V 特性のアニール温度依存性2016

    • Author(s)
      上岡 聡史, 三宅 省三, 吉田 晴彦, 新船 幸二, 佐藤 真一, 堀田 育志
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学 大岡山キャンパス、東京都・目黒区
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] PLD法によりSr2SiO4ターゲットから作製したSr2SiO4 薄膜の膜中固定電荷のアニール時間依存性2016

    • Author(s)
      谷脇将太、今西啓司、馬野光博、吉田晴彦、 新船幸二、佐藤真一、堀田育志
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学 大岡山キャンパス、東京都・目黒区
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] Investigation of interface state density and fixed charge density of SrxSiOx+2 on the 2×1 Sr-reconstructed Si substrate2015

    • Author(s)
      ○S. Taniwaki, Y. Hotta, H. Yoshida, K. Arafune, A. Ogura, and S. Satoh
    • Organizer
      2015 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Sapporo Convention Center, Sapporo, Japan
    • Year and Date
      2015-09-27
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] PLD法によりSr2SiO4ターゲットから作製したSr2SiO4薄膜の膜中固定電荷のアニール温度依存性2015

    • Author(s)
      今西啓司, 谷脇将太,馬野光博, 吉田晴彦, 新船幸二,佐藤真一, 堀田育志
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場、愛知県・名古屋市
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] HfO2成膜におけるPLD レーザー強度がSi 基板の表面酸化に与える影響2015

    • Author(s)
      上岡 聡史, 三宅 省三, 吉田 晴彦, 新船 幸二, 佐藤 真一, 堀田 育志
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場、愛知県・名古屋市
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] Sr2SiO4ターゲットで作製したSr2SiO4膜組成のアニール温度依存性2015

    • Author(s)
      今西啓司,谷脇将太,馬野光博,堀田育志,吉田晴彦, 新船幸二,小椋厚志,佐藤真一
    • Organizer
      2015年第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Research-status Report
  • [Presentation] Investigation of the correlation between chemical bonding states and fixed charge states for Sr-silicate passivation films on Si(100) substrates2014

    • Author(s)
      S. Taniwaki , Y. Hotta, H. Yoshida, K. Arafune, A. Ogura, and S. Satoh
    • Organizer
      6th World Conference on Photovoltaic Energy Conversion
    • Place of Presentation
      京都国際会館
    • Year and Date
      2014-11-23 – 2014-11-27
    • Related Report
      2014 Research-status Report
  • [Presentation] PLD法によるSr2SiO4多結晶体ターゲットを用いたSr2SiO4薄膜のSi基板上への作製2014

    • Author(s)
      今西啓司,谷脇将太,堀田育志,吉田晴彦, 新船幸二,小椋厚志,佐藤真一
    • Organizer
      2014年第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] SrO終端のSi(100)2×1再構成基板上に成長したSrxSiOx+2薄膜の電気特性2014

    • Author(s)
      谷脇将太,今西啓司,堀田育志,吉田晴彦, 新船幸二,小椋厚志,佐藤真一
    • Organizer
      2014年第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report
  • [Presentation] Investigation of chemical-bonding state and fixed charge state of Sr2SiO4 film on Si(100) substrate2014

    • Author(s)
      S. Taniwaki , Y. Hotta, H. Yoshida, K. Arafune, A. Ogura, and S. Satoh
    • Organizer
      2014 International Conference on Solid State Devices and Materials
    • Place of Presentation
      つくば国際会議場
    • Year and Date
      2014-09-08 – 2014-09-11
    • Related Report
      2014 Research-status Report
  • [Remarks] 研究グループHP

    • URL

      http://www.eng.u-hyogo.ac.jp/eecs/hotta/index.html

    • Related Report
      2016 Annual Research Report 2015 Research-status Report
  • [Remarks] 学会発表情報

    • URL

      http://www.eng.u-hyogo.ac.jp/eecs/hotta/announcements.html

    • Related Report
      2014 Research-status Report

URL: 

Published: 2014-04-04   Modified: 2018-03-22  

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