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Growth of high quality SiC crystal based on in-situ observation of growth interface and theoretical study

Research Project

Project/Area Number 26820334
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Metal making/Resorce production engineering
Research InstitutionTohoku University (2015)
The University of Tokyo (2014)

Principal Investigator

Kawanishi Sakiko  東北大学, 多元物質科学研究所, 助教 (80726985)

Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywordsシリコンカーバイド / 溶液成長 / In-situ観察 / 第一原理計算
Outline of Final Research Achievements

Growth interface during solution growth of 4H-SiC from Fe-Si or Si-Cr solvent was investigated at 1673 - 1880 K by the in-situ observation. Formation of 3C-SiC, the different polytype from 4H-SiC, significantly decreased by increasing growth temperature, suggesting the importance of the control of temperature during continuous growth of 4H-SiC. In addition, the height measurement during competition between the steps and the spiral growth of 4H-SiC revealed that the step height at the coverage of the spiral center is the key factor to decide the growth mode.
The polytype stability was also evaluated by the first principles calculation. 3C-SiC was estimated to be the most stable polytype with the consideration of van der Waals interaction, which agreed with the tendency of the stability of the polytypes in experiments at low temperature.

Report

(3 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • Research Products

    (5 results)

All 2016 2014

All Presentation (5 results) (of which Int'l Joint Research: 1 results,  Invited: 2 results)

  • [Presentation] SiC溶液成長時のスパイラル成長とステップの競合過程のその場観察2016

    • Author(s)
      川西咲子, 吉川健
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学(目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] In-situ observation of solution growth interface of SiC from Fe-Si solvent2016

    • Author(s)
      Sakiko Kawanishi and Takeshi Yoshikawa
    • Organizer
      40th International Conference and Expo on Advanced Ceramics and Composites
    • Place of Presentation
      Florida (USA)
    • Year and Date
      2016-01-26
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Interfacial behavior at the initial stage of solution growth of SiC investigated by real-time observation of the growth interface2014

    • Author(s)
      Sakiko Kawanishi and Takeshi Yoshikawa
    • Organizer
      The 10th European Conference on Silicon Carbide & Related Materials
    • Place of Presentation
      Grenoble(France)
    • Year and Date
      2014-09-23
    • Related Report
      2014 Research-status Report
  • [Presentation] SiC溶液成長界面のIn-situ観察2014

    • Author(s)
      川西 咲子, 吉川 健
    • Organizer
      第24回格子欠陥フォーラム「パワーデバイス開発のための格子欠陥評価・制御」
    • Place of Presentation
      恵那市(岐阜県)
    • Year and Date
      2014-09-11
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] In-situ Observation of SiC from Fe-Si-C Solution2014

    • Author(s)
      Sakiko Kawanishi and Takeshi Yoshikawa
    • Organizer
      IUMRS-ICA2014
    • Place of Presentation
      Fukuoka University
    • Year and Date
      2014-08-29
    • Related Report
      2014 Research-status Report

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Published: 2014-04-04   Modified: 2017-05-10  

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