| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2016: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2015: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2014: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
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| Outline of Final Research Achievements |
Calibration lines for the surface potential measurements using amplitude-modulated-atomic-force microscopy (AM-AFM) are made in the first step of this study. An Au-coated-AFM probe oscillating at the resonance frequency is approached toward flat Pt surface. Variations in amplitude and phase of the oscillations are measured to analyze interaction force profiles under bias voltage between probe and Pt sample. The measurement results exhibit expected trends supporting the theory, and the calibration lines show correlation coefficients larger than 0.95. Subsequently, thin Al2O3 and LiPON films are deposited on interdigitated-Pt electrodes to measure surface potential distributions between the electrodes. Eventually, the surface potential linearly changes on the Al2O3 surface. On the other hand, the potential rapidly changes near the electrode on LiPON surface. It is considered that the space charge layer causes non-linear variation in surface potential near the Pt electrodes.
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