Basic research of nanoimprint graphoepitaxy

• Project/Area Number: 26870505
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Nanomaterials engineering; Structural/Functional materials
• Research Institution: University of Hyogo
• Principal Investigator: Okada Makoto 兵庫県立大学, 高度産業科学技術研究所, 助教 (60637065)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2015: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
• Keywords: ナノインプリント / 分子配向 / ナノインプリントグラフォエピタキシー / 高分子液晶

Outline of Final Research Achievements

Nanoimprint technology is a simple nanofabrication process that can be used to fabricate a variety of nanostructures. In addition, molecular orientation can be also induced by nanoimprinting. I have previously found that a photo-cross-linkable liquid crystalline polymer (PLCP) is reoriented by thermal nanoimprinting. I refer to the nanoimprint process that induces molecular orientation as nanoimprint graphoepitaxy. I evaluated the molecular orientation phenomena of P6CAM molecules which is a PLCP material induced by nanoimprint graphoepitaxy. Additionally, I performed double nanoimprint graphoepitaxy on P6CAM and observe the resulting molecular orientation pattern.

Research Products

• [Journal Article] Depth analysis of molecular orientation induced by nanoimprint graphoepitaxy (2017)
  • Author(s): Makoto Okada, Ryosuke Fujii, Yuichi Haruyama, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Journal Title: Jpn. J. Appl. Phys. Volume: 56 Issue: 4 Pages: 1-4
  • DOI: 10.7567/jjap.56.040302
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] Nanoimprint graphoepitaxy for molecularly oriented nanofabrication (2017)
  • Author(s): Makoto Okada, Yuichi Haruyama, Hiroshi Ono, and Nobuhiro Kawatsuki
  • Organizer: The 34th International Conference of Photopolymer Science and Technology
  • Place of Presentation: 幕張メッセ(千葉県千葉市)
  • Year and Date: 2017-06-27
  • Int'l Joint Research / Invited
• [Presentation] ナノインプリントグラフォエピタキシー分子配向の深さ方向分析 (2017)
  • Author(s): 岡田真、藤井 良輔、春山 雄一、小野 浩司、川月 喜弘
  • Organizer: 2017年第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜(神奈川県横浜市)
  • Year and Date: 2017-03-15
• [Presentation] Simplified double nanoimprint-graphoepitaxy using L&S and flat pattern molds (2016)
  • Author(s): Makoto Okada, Ryosuke Fujii, Yuichi Haruyama, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: The 15th International Conference on Nanoimprint and Nanoprint Technology 2016
  • Place of Presentation: ブラガ(ポルトガル)
  • Year and Date: 2016-09-27
  • Int'l Joint Research / Invited
• [Presentation] Examination of depth profile of molecular orientation in L&S pattern fabricated by nanoimprint-graphoepitaxy (2016)
  • Author(s): Makoto Okada, Ryosuke Fujii, Yuichi Haruyama, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: The 15th International Conference on Nanoimprint and Nanoprint Technology 2016
  • Place of Presentation: ブラガ(ポルトガル)
  • Year and Date: 2016-09-27
  • Int'l Joint Research
• [Presentation] Evaluation of molecular orientation induced by simplified double nanoimprint-graphoepitaxy (2016)
  • Author(s): Makoto Okada, Ryosuke Fujii, Yuichi Haruyama, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: The 42nd International Conference on Micro and Nano Engineering 2016
  • Place of Presentation: ウィーン(オーストリア)
  • Year and Date: 2016-09-21
  • Int'l Joint Research
• [Presentation] Depth analysis of molecular orientation induced by nanoimprint-graphoepitaxy (2016)
  • Author(s): Makoto Okada, Ryosuke Fujii, Yuichi Haruyama, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: The 42nd International Conference on Micro and Nano Engineering 2016
  • Place of Presentation: ウィーン(オーストリア)
  • Year and Date: 2016-09-21
  • Int'l Joint Research
• [Presentation] ダブルナノインプリントグラフォエピタキシーによる分子配向現象 (2016)
  • Author(s): 岡田 真、谷口 雄亮、春山 雄一、小野 浩司、川月 喜弘、松井 真二
  • Organizer: 応用物理学会 次世代リソグラフィ技術研究会ワークショップ 2016
  • Place of Presentation: 東京工業大学 蔵前会館(東京都目黒区)
  • Year and Date: 2016-07-07
  • Invited
• [Presentation] Molecular orientation evaluation of negative-tone and positive-tone photo-cross-linkable liquid crystalline polymer pattern fabricated by nanoimprint-graphoepitaxy (2016)
  • Author(s): Makoto Okada, Yusuke Taniguchi, Yuichi Haruyama, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: The 60th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication 2016
  • Place of Presentation: ピッツバーグ（アメリカ）
  • Year and Date: 2016-06-01
  • Int'l Joint Research
• [Presentation] ダブルナノインプリントグラフォエピタキシーによって作製した液晶高分子パターンの分子配向評価 (2016)
  • Author(s): 岡田真、谷口 雄亮、春山 雄一、小野 浩司、川月 喜弘、松井真二
  • Organizer: 2016年第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学（東京都目黒区）
  • Year and Date: 2016-03-19
• [Presentation] ナノインプリントグラフォエピタキシーによって作製した液晶高分子ネガ型及びポジ型パターンの分子配向観察 (2016)
  • Author(s): 岡田真、谷口 雄亮、春山 雄一、小野 浩司、川月 喜弘、松井真二
  • Organizer: 2016年第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学（東京都目黒区）
  • Year and Date: 2016-03-19
• [Presentation] Evaluation of Molecular Orientation of Photo-Cross-Linkable Liquid Crystalline Polymer in 200 nm-Line and Space Pattern by Measuring Diffraction Efficiency (2015)
  • Author(s): Makoto Okada, Yusuke Taniguchi, Yuichi Haruyama, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: 28th International Microprocesses and Nanotechnology Conference 2015
  • Place of Presentation: 富山国際会議場（富山県富山市）
  • Year and Date: 2015-11-13
  • Int'l Joint Research
• [Presentation] 'Double nanoimprint-graphoepitaxy for localized liquid crystalline molecular orientation in imprinted pattern (2015)
  • Author(s): Makoto Okada, Yusuke Taniguchi, Yuichi Haruyama, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: The 14th International Conference on Nanoimprint and Nanoprint Technology 2015
  • Place of Presentation: Napa, USA
  • Year and Date: 2015-10-23
  • Int'l Joint Research
• [Presentation] Localized liquid crystalline molecular orientation in line and space pattern fabricated by double nanoimprint-graphoepitaxy (2015)
  • Author(s): Makoto Okada, Yusuke Taniguchi, Yuichi Haruyama, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: The 41st International Conference on Micro and Nano Engineering 2015
  • Place of Presentation: The Hague, The Netherlands
  • Year and Date: 2015-09-23
  • Int'l Joint Research
• [Presentation] ダブルナノインプリントグラフォエピタキシーによる液晶分子の局所配向 (2015)
  • Author(s): 岡田真、谷口 雄亮、春山 雄一、小野 浩司、川月 喜弘、松井真二
  • Organizer: 2015年 第76回 応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場（愛知県名古屋市）
  • Year and Date: 2015-09-16
• [Presentation] Temperature dependence of molecular orientation of liquid crystalline polymer induced by nanoimprint-graphoepitaxy (2015)
  • Author(s): Makoto Okada, Risa Hosoda, Yusuke Taniguchi, Yuichi Haruyama, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: The 59th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication 2015
  • Place of Presentation: San Diego, USA
  • Year and Date: 2015-05-27
  • Int'l Joint Research
• [Presentation] 液晶高分子へのナノインプリントグラフォエピタキシー (2015)
  • Author(s): 岡田 真，細田 理沙，谷口 雄亮，春山 雄一，小野 浩司，川月 喜弘，松井 真二
  • Organizer: 2015年 第62回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学（神奈川県平塚市）
  • Year and Date: 2015-03-11
• [Presentation] Evaluation of molecular orientation in liquid crystalline polymer structure fabricated by nanoimprinting (2014)
  • Author(s): Makoto Okada, Risa Hosoda, Mizuho Kondo, Yuichi Haruyama, Tomoyuki Sasaki, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: The 13th International Conference on Nanoimprint and Nanoprint Technology 2014
  • Place of Presentation: ANAクラウンプラザホテル京都（京都府京都市）
  • Year and Date: 2014-10-23
• [Presentation] Material dependency of liquid crystalline polymer's molecular orientation by nanoimprint-graphoepitaxy (2014)
  • Author(s): Makoto Okada, Risa Hosoda, Mizuho Kondo, Yuichi Haruyama, Tomoyuki Sasaki, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: The 40th International Conference on Micro and Nano Engineering 2014
  • Place of Presentation: Lausanne, Switzerland
  • Year and Date: 2014-09-24
• [Presentation] 回折効率測定による光反応性高分子液晶微細パターンの分子配向評価 (2014)
  • Author(s): 岡田真，細田理沙，近藤瑞穂，佐々木友之，春山雄一，小野浩司，川月喜弘，松井真二
  • Organizer: 2014年 第75回 応用物理学会秋季学術講演会
  • Place of Presentation: 北海道大学（北海道札幌市）
  • Year and Date: 2014-09-20
• [Presentation] Molecular orientation of imprinted nm-order pattern of photo-cross-linkable liquid crystalline polymer (2014)
  • Author(s): Makoto Okada, Risa Hosoda, Mizuho Kondo, Yuichi Haruyama, Tomoyuki Sasaki, Hiroshi Ono, Nobuhiro Kawatsuki, and Shinji Matsui
  • Organizer: The 58th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication 2014
  • Place of Presentation: Washington DC, USA
  • Year and Date: 2014-05-28