Development of nano-porous SiO2 electret and its application to vibration energy Hervester

• Project/Area Number: 26870728
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Nano/Microsystems; Nanomaterials engineering
• Research Institution: Kansai University
• Principal Investigator: SUZUKI Masato 関西大学, システム理工学部, 准教授 (70467786)
• Project Period (FY): 2014-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2016: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2015: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2014: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
• Keywords: マイクロマシン / ナノテクノロジー / エナジーハーベスティング / エレクトレット / マイクロマシン／MEMS / エナジーハーヴェスティン グ / 振動発電 / 微細構造作製 / 表面科学 / 多孔体 / エナジーハーヴェスティング / 微細構造作成 / 表面化学 / エナジーハーべスティング / ナノポーラス

Outline of Final Research Achievements

We have successfully developed some kinds of electrets made of nano-porous SiO2 or mixture of a fluoropolymer and nano-particles. Density of electrical charges trapped in the developed electret is higher than that of electret made of normal SiO2 or fluoropolymer.
We have also developed electrets with nano/micro scaled texture. Stiction force between the electret and a movable electrode becomes smaller by forming the texture on the surface of the electret.
By using the above-mentioned high performance electret, the efficiency of the vibration energy harvester was improved.

Research Products

• [Journal Article] Fabrication and Characterization of Nano/Micro Textured Electret to Avoid Electrostatic Stiction and Enhance Its Surface Potential (2015)
  • Author(s): Masato Suzuki, Makoto Shimokisaki, Tomokazu Takahashi, Yashuhiko Yoshikawa, Seiji Aoyagi
  • Journal Title: Journal of Physics Volume: Conference Series 660 Pages: 012042-012042
  • DOI: 10.1088/1742-6596/660/1/012042
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Characterization of Electret Based on Inorganic-organic Nanocomposite Using Fluoropolymer and Silica Nanoparticles (2015)
  • Author(s): Masato Suzuki, Makoto Shimokisaki, Tomokazu Takahashi, Yashuhiko Yoshikawa, Seiji Aoyagi
  • Journal Title: Journal of Physics Volume: Conference Series 660 Pages: 012077-012077
  • DOI: 10.1088/1742-6596/660/1/012077
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Development of Nano-porous SiO₂ Electret with High Thermal Resistance and Its Application to Vibration Energy Harvester (2015)
  • Author(s): 鈴木 昌人, 高橋 智一, 青柳 誠司
  • Journal Title: IEEJ Transactions on Sensors and Micromachines Volume: 135 Issue: 5 Pages: 171-177
  • DOI: 10.1541/ieejsmas.135.171
  • NAID: 130005067824
  • ISSN: 1341-8939, 1347-5525
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] Fabrication and Characterization of Nano/Micro Textured Electret to Avoid Electrostatic Stiction and Enhance Its Surface Potential (2015)
  • Author(s): Masato Suzuki, Makoto Shimokisaki, Tomokazu Takahashi, Yashuhiko Yoshikawa, Seiji Aoyagi
  • Organizer: The 15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
  • Place of Presentation: Boston, USA
  • Year and Date: 2015-12-01
  • Int'l Joint Research
• [Presentation] Characterization of Electret Based on Inorganic-organic Nanocomposite Using Fluoropolymer and Silica Nanoparticles (2015)
  • Author(s): Masato Suzuki, Makoto Shimokisaki, Tomokazu Takahashi, Yashuhiko Yoshikawa, Seiji Aoyagi
  • Organizer: The 15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
  • Place of Presentation: Boston, USA
  • Year and Date: 2015-12-01
  • Int'l Joint Research
• [Presentation] CYTOP／パリレン積層エレクトレットの性能評価 (2015)
  • Author(s): 鈴木昌人, 下木崎誠, 高橋智一, 青柳誠司
  • Organizer: H27年度 電気学会E部門総合研究会
  • Place of Presentation: 九州大学医学部百年講堂（福岡市）
  • Year and Date: 2015-07-02
• [Presentation] Development of a High-performance Fluorpolymer Electret Mixed with Nano-particles and Its Application to Vibration Energy Harvesting (2014)
  • Author(s): Masato Suzuki, Tomokazu Takahashi, Seiji Aoyagi
  • Organizer: The 14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
  • Place of Presentation: Awaji, Japan
  • Year and Date: 2014-11-18 – 2014-11-21
• [Presentation] ナノ粒子を混合した高性能フッ素樹脂製エレクトレットの開発 およびその振動発電への応用題 (2014)
  • Author(s): 鈴木昌人, 抽冬実里, 高橋智一, 青柳誠司
  • Organizer: 第31回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 島根県立産業交流会館（島根県）
  • Year and Date: 2014-10-20 – 2014-10-22
• [Presentation] ナノポーラスSiO2を用いた高機能エレクトレットの開発 および振動発電デバイスへの応用 (2014)
  • Author(s): 鈴木昌人, 抽冬実里, 高橋智一, 青柳誠司
  • Organizer: 電気学会E部門総合研究会
  • Place of Presentation: 東京大学駒場キャンパス
  • Year and Date: 2014-05-27 – 2014-05-28