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Dielectric Breakdown of Hexagonal Boron Nitride Film for Gate Insulator

Research Project

Project/Area Number 26886003
Research Category

Grant-in-Aid for Research Activity Start-up

Allocation TypeSingle-year Grants
Research Field Nanostructural physics
Research InstitutionThe University of Tokyo

Principal Investigator

Hattori Yoshiaki  東京大学, 工学(系)研究科(研究院), 研究員 (90736654)

Project Period (FY) 2014-08-29 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Keywordsh-BN / 絶縁破壊
Outline of Final Research Achievements

Hexagonal boron nitride (h-BN) is considered as ideal substrate for 2D material devises. However, the reliability of insulating properties of h-BN itself has not been clarified yet. The anisotropic dielectric breakdown of h-BN has been studied. We have found that the dielectric breakdown in c axis direction using a conductive atomic force microscope proceeded in the layer-by-layer manner. The obtained dielectric field strength was ~12 MV/cm, which is comparable to the conventional SiO2. On the other hand, metal electrodes were fabricated on the h-BN surface to measure the dielectric field strength in a direction perpendicular to c axis. The dielectric field strength was estimated to be 3 MV/cm, which is the smaller than that in c axis direction.

Report

(3 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • Research Products

    (9 results)

All 2016 2015 2014

All Journal Article (1 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 1 results,  Acknowledgement Compliant: 1 results) Presentation (8 results) (of which Int'l Joint Research: 3 results)

  • [Journal Article] Layer-by-layer dielectric breakdown of hexagonal boron nitride2015

    • Author(s)
      Y. Hattori, K. Watanabe, T. Taniguchi, and K. Nagashio
    • Journal Title

      ACS nano

      Volume: 9 Issue: 1 Pages: 916-921

    • DOI

      10.1021/nn506645q

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] 単結晶六方晶ボロンナイトライドの絶縁破壊強度の異方性2016

    • Author(s)
      服部吉晃, 谷口尚, 渡邊賢司, 長汐晃輔
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] Anisotropic Dielectric Breakdown of Hexagonal Boron Nitride Film2016

    • Author(s)
      Y. Hattori, T. Taniguchi, K. Watanabe, and K. Nagashio
    • Organizer
      APS March meeting 2016
    • Place of Presentation
      Baltimore (USA)
    • Year and Date
      2016-03-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 層状絶縁体h-BNの電気的絶縁破壊特性2016

    • Author(s)
      服部吉晃, 谷口尚, 渡邊賢司, 長汐晃輔
    • Organizer
      第21回電子デバイス界面テクノロジー研究会
    • Place of Presentation
      東レ研修センター(静岡県三島市)
    • Year and Date
      2016-01-22
    • Related Report
      2015 Annual Research Report
  • [Presentation] 六方晶ボロンナイトライドの絶縁破壊プロセス2015

    • Author(s)
      服部吉晃, 谷口尚, 渡邊賢司, 長汐晃輔
    • Organizer
      第34回電子材料シンポジウム
    • Place of Presentation
      ラフォーレ琵琶湖(滋賀県守山市)
    • Year and Date
      2015-07-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] Anisotropic Dielectric Breakdown of Hexagonal Boron Nitride Film2015

    • Author(s)
      Y. Hattori, T. Taniguchi, K. Watanabe, and K. Nagashio
    • Organizer
      International Conference on the Science and Application of Nanotubes(NT15)
    • Place of Presentation
      Nagoya (Japan) (愛知県名古屋市)
    • Year and Date
      2015-06-29
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] h-BNのLayer-by-Layer絶縁破壊2015

    • Author(s)
      服部吉晃, 谷口尚, 渡邊賢司, 長汐晃輔
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス(神奈川平塚市)
    • Year and Date
      2015-03-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] Layer-by-layer Dielectric Breakdown of Hexagonal Boron Nitride Film in Conductive AFM Measurement2015

    • Author(s)
      Y. Hattori, T. Taniguchi, K. Watanabe, & K. Nagashio
    • Organizer
      APS March meeting 2015
    • Place of Presentation
      SanAntonio (USA)
    • Year and Date
      2015-03-04
    • Related Report
      2014 Annual Research Report
    • Int'l Joint Research
  • [Presentation] h-BN 層状絶縁物質における電気的絶縁破壊挙動2014

    • Author(s)
      服部吉晃, 谷口尚, 渡邊賢司, 長汐晃輔
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学札幌キャンパス(北海道札幌市)
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report

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Published: 2014-09-09   Modified: 2017-05-10  

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