温度振動法によるシリコン気相成長の研究

• Project/Area Number: 56460100
• Research Category: Grant-in-Aid for General Scientific Research (B)
• Allocation Type: Single-year Grants
• Research Field: 電子材料工学
• Research Institution: Tohoku University
• Principal Investigator: 大見 忠弘 東北大学, 電気通信研究所, 助教授
• Project Period (FY): 1981 – 1982
• Project Status: Completed (Fiscal Year 1982)
• Budget Amount: ¥9,100,000 (Direct Cost: ¥9,100,000); Fiscal Year 1982: ¥1,400,000 (Direct Cost: ¥1,400,000); Fiscal Year 1981: ¥7,700,000 (Direct Cost: ¥7,700,000)