原子層エピタキシャル法による酸化物単結晶薄膜育成のための制御装置の試作

• Project/Area Number: 58850073
• Research Category: Grant-in-Aid for Developmental Scientific Research
• Allocation Type: Single-year Grants
• Research Field: 電子機器工学
• Research Institution: Tohoku University
• Principal Investigator: 大矢 銀一郎 東北大学, 電気通信研究所, 助教授
• Project Period (FY): 1983 – 1984
• Project Status: Completed (Fiscal Year 1984)
• Budget Amount: ¥3,200,000 (Direct Cost: ¥3,200,000); Fiscal Year 1984: ¥400,000 (Direct Cost: ¥400,000); Fiscal Year 1983: ¥2,800,000 (Direct Cost: ¥2,800,000)