| Project/Area Number |
59420029
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| Research Category |
Grant-in-Aid for General Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
電子材料工学
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| Research Institution | Tohoku University |
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Principal Investigator |
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| Project Period (FY) |
1984 – 1985
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| Project Status |
Completed (Fiscal Year 1985)
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| Budget Amount *help |
¥32,900,000 (Direct Cost: ¥32,900,000)
Fiscal Year 1985: ¥12,500,000 (Direct Cost: ¥12,500,000)
Fiscal Year 1984: ¥20,400,000 (Direct Cost: ¥20,400,000)
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| Keywords | PERPENDICULAR MAGNETIC RECORDING / PERPENDICULAR MAGNETIC RECORDING MEDIUM / DOUBLE LAYER MEDIUM / Co-Cr PERPENDICULAR ANISOTROPY FILM / MAGNETRON SPPUTERING METHOD / 高速・連続スパッタ法 |
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| Research Abstract |
With respect to high-speed fabrication of perpendicular recording media, the design criterion on the double layer media, the high speed and continuous sputtering method of the media, and the properties and performances of the prepared media were studied.
1. Both the recording layer of the Co-Cr perpendicular anisotropy film and the soft magnetic back layer were designed experimentally so as to show high sensitibities of both recording and reproducing and high density response. The design concepts has been clarified theoretically by analyzing the main-pole head field distribution and spacing effect between the main-pole and the back layer.
2. A new continuous roll coater system of the perpendicular media by magnetron sputtering was constructed. The deposition rate of 1 <micro> m/min. and the through-put of 6m/hr. were accomplished by the system. The fabrication speed of 5 inches flexible disk is 100 times as high as that of the conventional batch system.
3. Sputtering conditions such as impurity gases during sputtering and surface conditions of the organic base films were studied with respect to the medium quality. Finally, high quality media with large anisotropy and smooth surface could be realized even for the roll coater system. The fabricated double layer disk media showed 30dB overwrite and 45dB S/N ratio at 100kBPI, where the head medium spacing has been reduced below 500 <゜]A> .
Finally, we can conclude that the initial research purposes are successfully completed, and fandamentals of massproduction of the perpendicular medium are established.
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