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Research on Resist for X-ray and E-B Total Dry Vacuum Lithography

Research Project

Project/Area Number 59420030
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 電子材料工学
Research InstitutionNagoya University

Principal Investigator

HATTORI Shuzo  Dept. of Engineering, Nagoya University, Professor, 工学部, 教授 (10023003)

Co-Investigator(Kenkyū-buntansha) UCHIKAWA Yoshiki  Dept. of Engineering, Nagoya University, Professor, 工学部, 教授 (20023260)
MARUSE Susumu  Dept. of Engineering, Nagoya University, Professor, 工学部, 教授 (20022981)
IEDA Masayuki  Dept. of Engineering, Nagoya University, Professor, 工学部, 教授 (50022984)
UCHIDA Yoshiyuki  Dept. of Engineering, Aichi Institute of Technology, Professor, 工学部, 教授 (20023187)
MORITA Shinzo  Dept. of Engineering, Nagoya University, Associate Professor, 工学部, 助教授 (00076548)
Project Period (FY) 1984 – 1986
Project Status Completed (Fiscal Year 1988)
Budget Amount *help
¥36,700,000 (Direct Cost: ¥36,700,000)
Fiscal Year 1986: ¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 1985: ¥19,000,000 (Direct Cost: ¥19,000,000)
Fiscal Year 1984: ¥14,700,000 (Direct Cost: ¥14,700,000)
KeywordsX-ray lithography / X-ray resist / Plasma polymerization / Dry process / X-ray source / Laser interferometer / アラインメント / 自己現像 / 二重双光路レーザ干渉膜厚計 G値 / プラズマ重合装置
Research Abstract

It was demonstrated that the vacuum lithography process will be applied for submicron LSI devices and X-ray mask fabrications.
Enhancement of X-ray sensitivity was easily attained by forming Sn containing plasma polymerized MMA. Submicron pattern was formed on Sn containing plasma polymerized MMa. It was also found that the resistance of oxygen reactive ion etching could be obtained by incorporating a few % metals such as Sn or Si atoms into plasma polymerized resists. By inducing the selective incorporation of metals into resist under X-ray exposure, it was found to be clear that the formation of fine pattern could be realized by single layer resist process under oxygen reactive ion etching. Gold-carbon mixture film (Au-C) was deposited simultaneouslly by using plasma polymerization of hydrocarbon monomer and evaporation of gold as an X-ray absorber. Submicron line and space pattern was successfully fabricated on gold-carbon mixture film. As an X-ray membrane, the high transparent B-C-N film was formed by plasma CVD with the tensile stress of 0.8-6.5x10^9 dyn/cm^2.
Scanning electron microscope with a function of electron beam delineation was developed and installed in one of four separate vacuum chambers with a rotation mechanical equipment for electron beam vacuum lithography processes. X-ray source with a cone type Mo target was developed. The large X-ray flux was easily obtained for the target cooled by evaporation heat of alcohol for target cooling. Film thickness meter using double twin path laser interference was developed. The resolution of 1nm was realized. Plasma etching under VUV exposure was developed for a dry development of resist. mask alignment technology using moire diffraction was developed and the resolution of 10nm was realized.

Report

(3 results)
  • 1988 Final Research Report Summary
  • 1986 Annual Research Report
  • 1985 Annual Research Report
  • Research Products

    (115 results)

All Other

All Publications (115 results)

  • [Publications] 服部秀三: 表面科学. 5. 445-454 (1984)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Chun-Lin Shao: Japanese Journal of Applied Physics. 24. L82-L84 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 邵春林: レーザー研究. 13. 408-415 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 玉野順次: 真空. 28. 357-360 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 玉野順次: 真空. 28. 361-363 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shinzo Morita: Proceedings of The 9th Symposium on lon Sources and lon Assisted Technology. 405-412 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kadry Montasser: Proceedings of The 9th Symposium on Ion Sources and Ion Assisted Technology. 417-420 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Takashi Yoneda: Proceedings of the 9th Symposium on Ion Sources and Ion Assisted Technology. 441-444 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kadry Montasser: Proeedings of The 7th International Symposium on Plasma Chemistry. 106-111 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shashikara Gangal: Proceedings of The 7th International Symposium on Plasma Chemistry. 1256-1260 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Takashi Yoneda: Proeedings of The 7th International Symposium on Plasma Chemistry. 1272-1277 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Masaru Hori: Proceedings of The 7te International Symposium on Plasma Chemistry. 1278-1283 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shinzo Morita: Proceedings of The 7th International Symposium on Plasma Chemistry. 1289-1294 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Chun-Lin Shao: 核融合研究. 54. 104-109 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 服部秀三: 精密機械. 51. 1795-1800 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shinzo Morita: Pure & Applied Chemistry. 57. 1277-1286 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Masaru Hori: Proceedings of 1985 Dry Process Symposium. 81-86 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kadry Montasser: Journal of Applied Physics. 58. 3185-3198 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Chun-Lin Shao: Japanese Journal of Applied Physics. 25. 64-67 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 服部秀三: Semiconductor World. 1986ー1. 74-81 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Masaru Hori: Journal of Vacuum Science & Technology. B4. 500-504 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 内田悦行: 真空. 29. 424-428 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shuzo Hattori: Bulletin of the Japan Society of Precision Engineering. 20. 73-78 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: Proceedings of The 10th Symposium on Ion Sources and Ion Assisted Technology. 453-456 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kadry Montasser: Proceedings of The 10th Symposium on Ion Sources and Ion Assisted Technology. 467-470 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Vijay Trimbak Chitnis: Japanese Journal of Applied Physics. 25. 1078-1083 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shinzo Morita: Proceedings of the 1986 China-Japan Symposium on Thin Films. 23-26 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Yoshiyuki Uchida: Proceedings of SPIE-The International Society for Optical Engineering. 661. 95-101 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Yoshiyuki Uchida: Proceedings of SPIE-The International Society for Optical Engineering. 661. 102-109 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: Proceedings of 1986 Dry Process Symposium. 104-109 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Yoshiyuki Uchida: Journal of Vacuum Science and Technology. B5. 244-247 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Masaru Hori: Plasma Chemistry and Plasma Processing. 7. 155-167 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Masaru Hori: Journal of The Electrochemical Society. 134. 707-711 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 内田悦行: 愛知工業大学研究報告. 22B. 11-18 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kadry Montasser: Japanese Journal of Applied Physics. 26. L237-L239 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: Proceedings of the ACS Division of Polymeric Materials. 56. 424-428 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 内田悦行: 真空. 30. 391-394 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Chun-Lin Shao: Japanese Journal of Applied Physics. 26. 924-926 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shashikara Gangal: Thin Solid Films. 149. 341-350 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: Proceedings of The 8th International Symposium on Plasma Chemistry. 1035-1039 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Satoshi Itoh: Proceedings of The 8th International Symposium on Plasma Chemistry. 1353-1357 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Takao Sato: Proceedings of The 8th International Symposium on Plasma Chemistry. 1595-1600 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: Journal of Applied Polymer Science.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: Journal of The Electrochemical Society.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 森田慎三: "電子線真空リソグラフィ技術" ソフト技研出版部, 412 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 明石和夫: "光・プラズマプロセシング" 日刊工業新聞社, 370 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 難波進: "極微構造エレクトロニクス" オーム社, 522 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shuzo Hattori: "A Review of Total Dry Resist Process" Hyomen Kagaku. 5. 445-454 (1984)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Chun-Lin Shao: "Vacuum Ultraviolet Detector" Japanese Journal of Applied Physics. 24. 82-84 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Chun-Lin Shao: "Laser-induced Chemical Etching" The Review of Laser Engineering. 13. 408-415 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Junji Tamano: "Graft Polymerized Film Formed by in a Revolving Substrate Reactor and Its Characteristic" Journal of The Vacuum Society of Japan. 28. 357-360 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Junji Tamano: "Characteristic of Multiple and Cyclic Layer E.B. Resist" Journal of The Vacuum Society of Japan. 28. 361-363 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shinzo Morita: "Formation of Amorphous Carbon Film on Si Wefa by Plasma CVD" Proceedings of The 9th Symposium on Ion Sources and Ion Assisted Technology. 405-412 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kadry Montasser: "A Low Temperature Plasma CVD Film Formed by a Gas Mixture of Diluted Diborane and Methane" Proceedings of The 9th Symposium on Ion Sources and Ion Assisted Technology. 417-420 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Takashi Yoneda: "Au Containing Plasma Polymerized Styrene Film" Proceedings of The 9th Symposium on Ion Sources and Ion Assisted Technology. 441-444 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kadry Montasser: "Transparent B-C-N Thin Film Formed By Plasma CVD and Its Etching Characteristics" Proceedings of The 7th International Symposium on Plasma Chemistry. 106-111 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shashikara Gangal: "The Polymerization Mechanism of Plasma Polymerized Methyl Methacrylate" Proceedings of The 7th International Symposium on Plasma Chemistry. 1256-1260 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Takashi Yoneda: "Au Containing Plasma Polymerized Styrene and Its Etching Characteristics" Proceedings of The 7th International Symposium on Plasma Chemistry. 1272-1277 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Masaru Hori: "Synchrotron Radiation Vacuum Lithography Using a Plasma Polymerized Resist" Proceedings of The 7th International Symposium on Plasma Chemistry. 1278-1283 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shinzo Morita: "Deposition and Ablation of Organic Film in Low Temperature Plasma" Proceedings of The 7th International Symposium on Plasma Chemistry. 1289-1294 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Chun-Lin Shao: "A New Type VUV Detector with Plane Electrodes Deposited on a Crystalline Quartz" Kakuyugo-Kenkyu. 54. 104-109 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shuzo Hattori: "An Automatic Super Precision Positioning Technique Using Moire Interference" Journal of The Japan Society of Precision Engineering. 51. 1795-1800 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shinzo Morita: "Applications of plasma polymerization" Pure & Applied Chemistry. 57. 1277-1286 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Masaru Hori: "Dry Development on Plasma Polymerized Resist by Synchrotron Radiation" Proceedings of 1985 Dry Process Symposium. 81-86 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kadry Montasser: "Characterization of hard transparent B-C-N-H thin films formed by plasma chemical-vapor deposition at room temperature" Journal of Applied Physics. 58. 3185-3198 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Chun-Lin Shao: "Vacuum Ultraviolet Light Source Using Electrodeless Discharge" Japanese Journal of Applied Physics. 25. 64-67 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shuzo Hattori: "X-ray Mask" Semiconductor World. 1986-1. 74-81 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Masaru Hori: "Effect of Sn in plasma copolymerized methylmethacrylate and tetramethyltin (MMA-TMT) resist on plasm development for X-ray irradiation" Journal of Vacuum Science & Technology. B4. 500-504 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Yoshiyuki Uchida: "Total Dry Electron-Beam Vacuum Lithography System Using 4 Rotary Chambers" Journal of The Vacuum Society of Japan. 29. 424-428 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shuzo Hattori: "An Automatic Super-Accurate Positioning Technique Using Moire Interference" Bulletin of the Japan Society of Precision Engineering. 20. 73-78 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: "Plasma Chemicl Processes for High Sensitivity Dry Developable X-ray Resist" Proceedings of The 10th Symposium on Ion Sources and Ion Assisted Technology. 453-456 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kadry Montasser: "The Effect of Raising the Substrate Temperature on B-C-N Molecular Structure" Proceedings of The 10th Symposium on Ion Sources and Ion Assisted Technology. 467-470 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Vijay Trimbak Chitnis: "Double Twin Path Interferometer for Thin Film Thickness Measurement" Japanese Journal of Applied Physics. 25. 1078-1083 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shinzo Morita: "Fabrication of Plasma Polymerized Films and Its Application to Lithography Process" Proceedings of the 1986 China-Japan Symposium on Thin Films. 23-26 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Yoshiyuki Uchida: "Automatic alignment technique for X-ray lithography using moire signals in reflection" Proceedings of SPIE-The International Society for Optical Engineering. 661. 95-101 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Yoshiyuki Uchida: "Development of double twin path laser interferometer for thin film thickness measurement" Proceedings of SPIE-The International Society for Optical Engineering. 661. 102-109 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: "Dependence of Exposure Characteristics of Resists on Synchrotron Radiation Wavelength" Proceedings of 1986 Dry Process Symposium. 104-109 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Yoshiyuki Uchida: "An automatic mask alignment technique using moire interference" Journal of Vacuum Science and Technology. B5. 244-247 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Masaru Hori: "Gold Particles Containing Plasma-Polymerized Styrene as an X-Ray Absorber" Plasma Chemistry and Plasma Processing. 7. 155-167 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Masaru Hori: "Plasma-Polymerized Dry-Developable Resist for Synchrotron Radiation Lithography" Journal of The Electrochemical Society. 134. 707-711 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Yoshiyuki Uchida: "Super Precision Step Hight Measurement Using Twin Path Laser Interferometer" Bulletin of Aichi Institute of Technology. 22B. 11-18 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kadry Montasser: "C-Si-O(B) Thin Film -A Possible X-Ray Mask Substrate Candidate" Japanese Journal of Applied Physics. 26. 237-239 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: "Dependence of Exposure Characteristics of Resists on Syncrotron Radiation Wavelength" Proceedings of the ACS Division of Polymeric Materials. 56. 424-428 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Yoshiyuki Uchida: "Total Dry Electron-Beam Vacuum Lithography System for a Rotary Encoder" Journal of The Vacuum Society of Japan. 30. 391-394 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Chun-Lin Shao: "Emission Properties of Electrodeless Argon Gas Discharge in VUV Region" Japanese Journal of Applied Physics. 26. 924-926 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shashikara Gangal: "Plasma Polymerized Electron Beam Resists Prepared From Methyl Methacrylate Using Various Carrier Gases" Thin Solid Films. 149. 341-350 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: "High Resolution Pattern Fabrication on Plasma Polymerized Resists by Synchrotron Radiation Exposure" Proceedings of The 8th International Symposium on Plasma Chemistry. 1035-1039 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Satoshi Itoh: "Au Containing Plasma Polymerize: Styrene for X-ray Mask Fabricated by Plasma Process" Proceedings of The 8th International Symposium on Plasma Chemistry. 1353-1357 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Takao Sato: "Effect of Dilution Gas on Hard Carbon Film Formation" Proceedings of The 8th International Symposium on Plasma Chemistry. 1595-1600 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: "Synchrotron Radiation Wavelength Dependence on Self Development of Plasma Polymerized Resist" Journal of Applied Polymer Science.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Hitomi Yamada: "Self Development of Polymethylmethacrylate by Synchrotron Radiation Exposure" Journal of The Electrochemical Society.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Shinzo Morita: Electron Beam Vacuum Lithography. Sofutogiken, LTD, 412 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kazuo Akashi: Photo-Plasma Processing. The Nikkankogyoshinbun, LTD, 370 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Susumu Nanba: Microscopical Structure Electronics. Ohmu, LTD, 522 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Masaru Hori: J.Vac.Sci.Technol.B4. 500-504 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] 内田悦行: 真空. 29. 424-428 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] Shuzo Hattori: Bull.Japan Soc.Prec.Eng.20. 73-78 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] Vijay T.Chitnis: Jpn.J.Appl.Phys.25. 1078-1083 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] Yoshiyuki Uckida: Proc.SPIE. 661. 95-101 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] Yoshiyuki Uchida: Proc.SPlE. 661. 102-109 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] Yoshiyuki Uchida: J.Vac.Sci.Technol.B5. 244-247 (1987)

    • Related Report
      1986 Annual Research Report
  • [Publications] 内田悦行: 愛知工業大学研究報告. 22B. (1987)

    • Related Report
      1986 Annual Research Report
  • [Publications] 内田悦行: 真空. 30. (1987)

    • Related Report
      1986 Annual Research Report
  • [Publications] Masaru Hori: Plasm Chem.& Plasma Process.(1987)

    • Related Report
      1986 Annual Research Report
  • [Publications] Masaru Hori: J.Electrochem.Soc.(1987)

    • Related Report
      1986 Annual Research Report
  • [Publications] Hitomi Yamada: J.Appl.polym.sci.(1987)

    • Related Report
      1986 Annual Research Report
  • [Publications] Hitomi Yamada: J.Electrochem.Soc.(1987)

    • Related Report
      1986 Annual Research Report
  • [Publications] Kadry Montasser: Jpn.J.Appl.Phys.(1987)

    • Related Report
      1986 Annual Research Report
  • [Publications] Shashi Gangal: Thin Solid Films. (1987)

    • Related Report
      1986 Annual Research Report
  • [Publications] 明石和夫: "光・プラズマプロセシング" 日刊工業新聞社, 370 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] Journal of Applied Physics. 58-8. (1985)

    • Related Report
      1985 Annual Research Report
  • [Publications] Journal of Vacuum Sci.& Tech.(1986)

    • Related Report
      1985 Annual Research Report
  • [Publications] Journal of Electrochem Sci.(1986)

    • Related Report
      1985 Annual Research Report
  • [Publications] Plasma Chem.& Plasma Proc.(1986)

    • Related Report
      1985 Annual Research Report
  • [Publications] 真空. (1986)

    • Related Report
      1985 Annual Research Report

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Published: 1987-03-31   Modified: 2016-04-21  

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