Fabrication of High-Speed Amorphous-Silicon Integrated Circuits
| Project/Area Number |
59850062
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| Research Category |
Grant-in-Aid for Developmental Scientific Research
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| Allocation Type | Single-year Grants |
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| Research Field |
電子機器工学
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
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| Project Period (FY) |
1984 – 1985
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| Project Status |
Completed (Fiscal Year 1985)
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| Budget Amount *help |
¥7,100,000 (Direct Cost: ¥7,100,000)
Fiscal Year 1985: ¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 1984: ¥4,100,000 (Direct Cost: ¥4,100,000)
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| Keywords | Thin-Film Transistor / Amorphous-Silicon / Integrated Circuit / Thermal-Oxidation / MOS Interface / Diode |
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| Research Abstract |
Amorphous-Silicon Thin-Film Transistors (a-Si FETs) are studying extensively, but there is a intrinsic difficulty in a-Si FETs caused by low field-effect mobility of a-Si. The object of this study is to improve FET performances by developing a novel FET fabrication process and a FET structure, and also to improve a-Si circuit performances by developing a novel circuit configuration.
First, we have developed a novel thermal-oxidation method of silicon at temperatures of as low as 250゜C. Electrical properties of the oxide and its interface have been evaluated. The breakdown field strength was more than 4MV/cm, the resistivity more than <10^(14)> <omega> and the interface state density about <10^(11)> / <cm^2> eV. By using this method we have developed a nearly ideal a-Si MOS FET and showed that the FET has the mobility of as high as 2.9 <cm^2> /Vs, the on-off current ratio of more than <10^6> and half-decay time in the current of as long as <10^(10)> years.
Second, we have invented a novel short channel a-Si FET structure where conventional restrictions caused by photo-lithography have been completely eliminated. Two-dimensional device simulation program has been developed and has been used to accumulate device design data. The self-aligned short-channel FET has been fabricated by using reactive ion etching method, and FET characteristics have been evaluated.
Third, a novel high speed logic circuit has been proposed which is formed by a-Si FETs and a-Si Schottky barrier diodes. Computer simulation indicated that the novel circuit with 1 <micro> m FET can be operated at multi-MHz rates. A prototype device has been fabricated and its performance at 80kHz has been evaluated.
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Report
(1 results)
Research Products
(10 results)
