| Project/Area Number |
59870002
|
|---|
| Research Category |
Grant-in-Aid for Developmental Scientific Research
|
| Allocation Type | Single-year Grants |
|---|
| Research Field |
General anatomy (including Histology/Embryology)
|
|---|
| Research Institution | Tottori University School of Medicine |
|---|
Principal Investigator |
TANAKA Keiichi Tottori University School of Medicine, 医学部, 教授 (00031948)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
MITSUSHIMA Akira Tottori University School of Medicine, 医学部, 助手 (80116376)
森 金太郎 日立工機(株), 精機部, 主任技師
MORI Kintaro Hitachi Koki,Co.Ltd.
|
|---|
| Project Period (FY) |
1984 – 1986
|
| Project Status |
Completed (Fiscal Year 1986)
|
| Budget Amount *help |
¥7,100,000 (Direct Cost: ¥7,100,000)
Fiscal Year 1986: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1985: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1984: ¥5,300,000 (Direct Cost: ¥5,300,000)
|
|---|
| Keywords | ion beam / metal deposition / scanning electron microscope / high resolution / ultra fine grain / 白金 / 蒸着 / 高分解能走査電子顕微鏡 |
|---|
| Research Abstract |
An ion beam sputter coater for high resolution scanning electron microscopy was newly developed. It is equipped with a specimen chamber (an ion beam gun, a specimen stage, metal targets and a thickness monitor), control units and a vacuum system. With this apparatus, very thin metal film which is composed of fine platinum particles of about 15-20 A in diameter was obtained. The size of the particles is much smaller than that obtained by ordinary ion sputter coater (50-60 A in diameter). Tantalum and tungsten can be also used as coating metals. On observation with an ultra high resolution scanning electron microscope, the specimens which had been thinly coated by the new coater provided enough conductivity and yield of secondary electrons for taking pictures in good contrast. Thus the newly developed ion beam sputter coater have very high ability in compare with the ordinary ion sputter coater and it exercises its power at ultra high resolution scanning electron microscopy. In the future, this apparatus surely become a necessary in this research field.
|
