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A developement of a new method to observe the direct image of surface atomic arrangements and a research of surface superlattice structures on semiconductors

Research Project

Project/Area Number 60065003
Research Category

Grant-in-Aid for Specially Promoted Research

Allocation TypeSingle-year Grants
Research InstitutionUniversity of Tokyo

Principal Investigator

INO Shozo  University of Tokyo, 理学部物理学教室, 教授 (70005867)

Co-Investigator(Kenkyū-buntansha) DAIMON Hiroshi  University of Tokyo, 理学部物理学教室, 助手 (20126121)
Project Period (FY) 1985 – 1987
Project Status Completed (Fiscal Year 1987)
Budget Amount *help
¥278,500,000 (Direct Cost: ¥278,500,000)
Fiscal Year 1987: ¥27,000,000 (Direct Cost: ¥27,000,000)
Fiscal Year 1986: ¥146,500,000 (Direct Cost: ¥146,500,000)
Fiscal Year 1985: ¥105,000,000 (Direct Cost: ¥105,000,000)
Keywordssurface structure / ion beam / 結晶表面 / X線全反射角分光 / 表面構造 / 反射高速電子回折 / X線分光
Research Abstract

This project intend to study the furface superstructures by detecting X-rays emitted from crystal surfaces irradiated by an electron beam or an ion beam. applying "total reflection angle X-ray spectroscopy (TRAXS)" which has discovered by ourselves.
According to this purpose. we constructed some new apparatus. such as an electron-beam TRAXS apparatus (1985), a photoelectron-diffraction apparatus (1985), an ion-beam TRAXS apparatus (1987), an apparatus for observation of surface atomic arrangements (1986) etc. We studied at first in detail the phenomena and mechanism of electron-beam TRAXS. As a result, it was clarified that the method have many advantages. such as (1):It is possible that the surface analysis of an area from where the RHEED pattern is produced,(2):Surface analysis is possible for the adsorbate ranging from 0.01 monoatomic layer to 10.000 monoatomic layers. (3):It is possible to measure the amount of the adsorbates irrespective of the growth modes. (4):It is possible to control the depth of the detection layers. (5):It is possible to study elementary analysis and the structure analysis at the interfaces inside the crystals.
Considering the above advantages and others. we developed new methods for surface structure analysis. such as. electron-beam TRAXS. ion-beam AES and ion-beam TRAXS. During photoelectron diffraction studies. we invented a new type electron energy analyzer. It is possible to observe directly the two-dimensional intensity distribution within the large solid angle of 2 . for the electrons emitted from a point of surface and having the same energy. We constructed a new apparatus for observation of surface atomic arrangement. in which the diameter of the electron beam is about 5A and operated in an ultra high vacuum of 1.7x10-10 Torr. Obtained resolution was about 1.4 A゜ at present.

Report

(3 results)
  • 1987 Final Research Report Summary
  • 1986 Annual Research Report
  • 1985 Annual Research Report
  • Research Products

    (23 results)

All Other

All Publications (23 results)

  • [Publications] S. Hasegawa; S. Ino; Y.Yamamoto and H. Daimon: Japan J. Appl.24. L387-L390 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] S. Hasegawa; H. Daimon; and S. Ino: Surf. Sci.186. 138 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] T. Aizawa; T. Tsuno; H. Daimon; and S. Ino: Phys. Rev.B36. 36 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] S. Ino; S. Hasegawa; H. Matsumoto and H. Daimon: Proc. 2nd International conf. The Structure of Surfaces, Amsterdam, June(1987). (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H. Daimon: Rev. Sci. Instrum.(1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H. Daimon; S. Nagano; T. Hanada; S. Ino; S. Suga and Y. Murata: Surf. Sci.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 応用物理学会 編 井野正三: "応用物理ハンドブックI" 丸善, (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] P.K.Larsen 編 S.Ino: "RHEED and Reflection Electron Imaging of Surfaces" Plenum, (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] S,Hasegawa; S,Ino; Y,Yamamoto; H,Daimon: "Chemical Analysis of Surfaces by Total-Reflection-Angle X-ray Spectroscopy in RHEED Experiments (RHEED-TRAXS)" Japan J. Appl.24. L387-L390 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] S,Hasegawa; H,Daimon; S,Ino: "A Study of Adsorptionand Desorption Processes of Ag on Si(111) Surface by Means of RHEED-TRAXS" Surf. Sci.186. 138- (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] T,Aizawa; T,Tsuno; H,Daimon; S,Ino: "Si(111)7x7 and Si(111) 3x 3-Al Surface Structure Analysis by Ion-Induced Auger Electron Spectroscopy" Phys. Rev.B36. 36- (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] S,Ino; S,Hasegawa; H,Matsumoto; H,Daimon: "High Sensitive %detection of a Few Atomic Layer Adsorbate by RHEED-TRAXS(Total Reflection Angle X-ray Spectroscopy)" (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H,Daimon: "A new Display-type %analyzer for the Energy and the Augular Distribution of Charged Particles" Rev. Sci. Instrum.(1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] Shozo Ino (edited by P.K. Larsen): Plenum. RHEED and reflection Electron Imaging of Surfaces, (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H,Daimon;S:Nagano;S,Ina;S,Suga;Y,Murata: Act.Rept.Synch.,Red.Lab.ISSP. 45-46 (1985)

    • Related Report
      1986 Annual Research Report
  • [Publications] S,Hasegawa;H,Daimon;S:Ino: Surface Sience.

    • Related Report
      1986 Annual Research Report
  • [Publications] Y,Yamanoto;S,Ino;T,Ichikawa: Japan.J.Appl.Phys.25. L331-L334 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] 井野正三: 科学. 56. 30-39 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] 難波秀利,大門寛,村田好正: "表面,微粒子(実験物理学講座14)第2、5章,光電子分光" 共立出版, (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] 田丸謙二編,村田好正,井野正三: "表面の科学,理論・実験・触媒化学への応用,第11編 低速電子回折および反射高速電子回折" 学会出版センター, (1985)

    • Related Report
      1986 Annual Research Report
  • [Publications] Japanese J.Appl.Phys.24-6. (1985)

    • Related Report
      1985 Annual Research Report
  • [Publications] Surface Science. 164. (1985)

    • Related Report
      1985 Annual Research Report
  • [Publications] 科学. 56-1. (1986)

    • Related Report
      1985 Annual Research Report

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Published: 1987-03-31   Modified: 2016-04-21  

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