| Project/Area Number |
60460136
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| Research Category |
Grant-in-Aid for General Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
電子機器工学
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| Research Institution | TOHOKU UNIVERSITY |
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Principal Investigator |
MIYAGI Mitsunobu RESEARCH INSTITUTE OF ELECTRICAL COMMUNICATION, TOHOKU UNTVERSITY, 電気通信研究所, 助教授 (90006263)
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| Co-Investigator(Kenkyū-buntansha) |
NISHIDA Shigeo RESEARCH INSTITUTE OF ELECTRICAL COMMUNICATION, TOHOKU UNIVERSITY, 電気通信研究所, 教授 (70006211)
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| Project Period (FY) |
1985 – 1986
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| Project Status |
Completed (Fiscal Year 1986)
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| Budget Amount *help |
¥6,800,000 (Direct Cost: ¥6,800,000)
Fiscal Year 1986: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1985: ¥5,900,000 (Direct Cost: ¥5,900,000)
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| Keywords | Infrared Transmission / Dielectric-Coated Waveguide / Hollow Waveguide / Thin-Film Coated Waveguide Laser / Waveguide-Type <CO_2> Laser / Germanium / 陽極酸化 |
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| Research Abstract |
1. NEW METHOD OF FABRICATING DIELECTRIC-COATED HOLLOW WAVEGUIDES
(1) FABRICATION BASED ON RF-SPUTTERING
TO FABRICATE DIELECTRIC-COATED METALLIC WAVEGUIDES BASED ON RF-SPUTTERING, ELECTROPLATING, AND ETCHING TECHNIQUES, THE ELECTROPLATING PROCESS IS THE MOST ESSENTIAL TO REDUCE WAVEGUIDE LOSSES. WE HAVE FOUND THAT A PLATING BATH CAUSING HIGH STRESS IS SUITABLE TO FABRICATE LOW-LOSS WAVEGUIDES. IN ORDER TO INTEND FABRICATING WAVEGUIDES WITH MULTI-LAYERED DIELECTRICS, VACUUM EVAPORATION PROCESS OF DIELECTRIC MATERIALS IS ALSO TRIED.
(1) ELECTRICALLY DEPOSITED GERMANIUM-COATED WAVEGUIDES
TO FABRICATE GERMANIUM-COATED WAVEGUIDES WITH RELATIVELY LARGE DIAMETER, A TECHNIQUE OF ELECTRODEPOSITION OF GERMANIUM INSIDE A METALLIC PIPE IS DEVELOPED AND WAVEGUIDES WITH SMALL LOSSES ARE FABRICATED.
(3) STUDY OF CHALCOGENIDE GLASSES
TO FABRICATE DIELECTRIC-COATED HOLLOW WAVEGUIDES WITH RATHER LONG LENGTH BY A GLASS DRAWING TECHNIQUE, CHALCOGENIDE GLASS COMPOSED OF GERMANIUM AND SULFUR IS SYNTHESIZED BY USING A ROCKING FURNACE. WAVELENGTH DEPENDENCE OF THE REFRACTIVE INDICES AS WELL AS THE ABSORPTION COEFFICIENTS OF THE SYNTHESIZED GLASS MATHERIALS IS STUDIED.
(4) ALUMINUM ANODIZING TECHNIQUE
ALUMINUM THIN FILM WAVEGUIDES HAVE BEEN FABRICATED BY USING ALUMINUM ANODIZING TECHNIQUE. DEPOSITION RATE OF THE THIN FILM IS FOUND TO BE VERY LARGE COMPARED WITH OTHER DEPOSITION TECHNIQUES.
2. FABRICATION OF THIN FILM-COATED WAVEGUIDE <CO_2> Lasers
AS AN APPLICATION OF DIELECTRIC-COATED HOLLOW WAVEGUIDES, A NEW TYPE OF RF-EXCITED WAVEGUIDE <@c@o_2> LASER WITH A RECTANGULAR CROSS SECTION IS PROPOSED AND FABRICATED WHICH IS COMPOSED OF TWO DIELECTRIC OR LOSSY MATERIALS AND TWO METALLIC ELECTRODES WHICH ARE COATED BY A THIN FILM WITH SMALL ABSORPTIONS. IT IS FOUND THAT OUTPUT POWERS OF THE NEW WAVEGUIDE LASER ARE MUCH LARGER THAN THOSE OF CONVENTIONAL ONES.
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